Method of manufacturing a semiconductor device

Patent metadata

Field	Value
Publication number	US-12265332-B2
Application number	US-202117491743-A
Country	US
Kind code	B2
Filing date	Oct 1, 2021
Priority date	Jun 18, 2021
Publication date	Apr 1, 2025
Grant date	Apr 1, 2025

Abstract

A method of manufacturing a semiconductor device includes forming a first resist layer over a substrate, and forming a second resist layer over the first resist layer. The second resist layer is patterned to expose a portion of the first resist layer to form a second resist layer pattern. The first resist layer is exposed to extreme ultraviolet (XUV) radiation diffracted by the second resist layer pattern. Portions of the first resist layer exposed to the XUV radiation diffracted by the second resist layer are removed.

First claim

What is claimed is:

1. A method of manufacturing a semiconductor device, comprising:
forming a first resist layer over a substrate;
forming a second resist layer over the first resist layer, wherein the second resist layer is a metal-containing resist;
patterning the second resist layer to expose a portion of the first resist layer to form a second resist layer pattern, wherein the patterning includes exposing the second resist layer to a scanning electron beam;
exposing the first resist layer to extreme ultraviolet (XUV) radiation diffracted by the second resist layer pattern; and
removing portions of the first resist layer exposed to the XUV radiation diffracted by the second resist layer.

2. The method according to claim 1 , wherein the exposing the first resist layer to diffracted XUV radiation includes a directional exposure.

3. The method according to claim 1 , wherein the second resist layer is made of a negative tone resist.

4. The method according to claim 1 , wherein the diffracted XUV radiation has a wavelength ranging from 0.1 nm to 100 nm.

5. The method according to claim 4 , wherein the diffracted XUV radiation has a wavelength ranging from 10 nm to 30 nm.

6. The method according to claim 1 , wherein the first resist layer is a chemically amplified resist.

7. The method according to claim 1 , wherein the second resist layer is formed directly on the first resist layer.

8. The method according to claim 1 , wherein the second resist layer comprises an organometallic compound.

9. The method according to claim 1 , wherein the second resist layer comprises a tin oxide.

10. A method of manufacturing a semiconductor device, comprising,
forming a first photoresist layer over a substrate;
forming a second photoresist layer over the first photoresist layer,
wherein the second photoresist layer is different from the first photoresist layer, and the second photoresist layer is a metal-containing resist;
selectively exposing the second photoresist layer to a scanning electron beam to form a latent image in the second photoresist layer;
developing the second photoresist layer to form a pattern in the second photoresist layer exposing a portion of the first photoresist layer;
flood exposing remaining portions of the second photoresist layer and the first photoresist layer to an exposure radiation having a wavelength ranging from 0.1 nm to 100 nm,
wherein the remaining portions of the second photoresist layer diffract the exposure radiation; and
developing the first photoresist layer to expose portions of the substrate.

11. The method according to claim 10 , wherein the flood exposing is a directional exposure.

12. The method according to claim 10 , wherein the first photoresist layer is made of a positive tone resist and the second photoresist layer is a made of a negative tone resist.

13. The method according to claim 10 , wherein the first photoresist layer is a chemically amplified resist.

14. The method according to claim 10 , wherein the second resist layer is formed directly on the first resist layer.

15. The method according to claim 10 , wherein the remaining second photoresist layer is removed during the developing the first photoresist layer.

16. A method of manufacturing a semiconductor device, comprising:
forming a first resist layer over a substrate;
forming a second resist layer over the first resist layer, wherein the second resist layer is a metal-containing resist;
exposing the second resist layer to a scanning electron beam;
developing the second resist layer to form a second resist layer pattern in the second resist layer exposing a portion of the first resist layer;
exposing the first resist layer to extreme ultraviolet (XUV) radiation diffracted by the second resist layer pattern; and
removing portions of the first resist layer exposed to the XUV radiation diffracted by the second resist layer.

17. The method according to claim 16 , wherein the exposing the first resist layer to diffracted XUV radiation includes a directional exposure.

18. The method according to claim 16 , wherein the second resist layer is a made of a negative tone resist.

19. The method according to claim 16 , wherein the diffracted XUV radiation has a wavelength ranging from 0.1 nm to 100 nm.

20. The method according to claim 19 , wherein the diffracted XUV radiation has a wavelength ranging from 10 nm to 30 nm.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Lai Yu-Tse
• Chen Minfeng
• Chang Ya Hui

Classifications

• H10P76/2041 Primary

  Photolithographic processes · CPC title

• H10P50/73

  using masks for insulating materials · CPC title

• H10P76/4085

  characterised by the processes involved to create the masks · CPC title

• H10P76/2042

  using lasers · CPC title

• H10P14/6336

  in the presence of a plasma [PECVD] · CPC title