Baking apparatus and method

Patent metadata

Field	Value
Publication number	US-9536759-B2
Application number	US-201514725285-A
Country	US
Kind code	B2
Filing date	May 29, 2015
Priority date	May 29, 2015
Publication date	Jan 3, 2017
Grant date	Jan 3, 2017

Abstract

A baking apparatus for baking a wafer is provided. The baking apparatus includes a wafer chuck configured to hold the wafer, and a heating device disposed over the wafer chuck and configured to heat the wafer. The baking apparatus also includes a carrying arm configured to transport the wafer over the wafer chuck. The wafer chuck is in physical contact with the center area of the bottom surface of the wafer when the wafer is held by the wafer chuck.

First claim

What is claimed is:

1. A baking apparatus for baking a wafer, comprising:
a chamber defining an interior and having an opening for providing access to the interior;
a support base disposed within the interior, the support base having a support surface and a guiding opening extending along the support surface;
a wafer chuck configured to hold the wafer, the wafer chuck being disposed within the interior and configured to move between a retracted position adjacent the support base and an extended position displaced from the support base;
a heating device, disposed within the interior and over the wafer chuck, configured to heat the wafer; and
a carrying arm disposed within the interior and configured to transport the wafer over the wafer chuck, the carrying arm having a slot sized and shaped to receive the wafer chuck, the carrying arm extending through the guiding opening of the support surface and being movable from a baking transfer position adjacent the opening of the chamber to a chuck transfer position aligned over the wafer chuck,
wherein, for baking the wafer, the carry arm is configured to move along the guiding opening and transport the wafer from the baking transfer position to the chuck transfer position, at which the wafer chuck moves toward the extended position to engage through the slot of the guiding arm to contact a bottom surface of the wafer such that the wafer is held by the wafer chuck, beneath the heating device, and is no longer carried by the carry arm.

2. The baking apparatus as claimed in claim 1 , wherein the wafer chuck is raised to a contacting position in which it is in contact with a center area after the wafer is located over the wafer chuck, and the wafer is raised to a heating position that is close to the heating device by the wafer chuck after the wafer is held on the wafer chuck.

3. The baking apparatus as claimed in claim 1 , wherein the wafer is located between the heating device and the wafer chuck when the wafer is held by the wafer chuck.

4. The baking apparatus as claimed in claim 1 , wherein the wafer is rotated by the wafer chuck when the wafer is heated by the heating device.

5. The baking apparatus as claimed in claim 1 , wherein the wafer chuck is rotated before the wafer is put onto the wafer chuck.

6. The baking apparatus as claimed in claim 1 , wherein an average rising speed of the wafer chuck when the wafer chuck is far from the wafer over a predetermined distance relative to the wafer is about 6 times to about 50 times an average rising speed of the wafer chuck within the predetermined distance, wherein the predetermined distance is in a range from about 1 mm to about 5 mm.

7. The baking apparatus as claimed in claim 1 , wherein an area of the bottom surface of the wafer is about 1 times to about 36 times an area of a retaining surface of the wafer chuck, wherein the retaining surface contacts the bottom surface when the wafer is held by the wafer chuck.

8. The baking apparatus as claimed in claim 1 , wherein the heating device has a heating surface facing a retaining surface of the wafer chuck, and an area of the heating surface is greater than or equal to a top surface of the wafer.

9. The baking apparatus as claimed in claim 1 , wherein the heating device has a heating temperature in a range from about 70° C. to about 250° C.

10. A baking apparatus for baking a wafer, comprising:
a chamber defining an interior and having an opening for providing access to the interior;
a support base disposed within the interior, the support base having a support surface and a guiding opening extending along the support surface;
a wafer chuck configured to hold the wafer, the wafer chuck being disposed within the interior and configured to move between a retracted position adjacent the support base and an extended position displaced from the support base;
a heating device, disposed within the interior and over the wafer chuck, configured to heat the wafer; and
a carrying arm disposed within the interior and configured to transport the wafer over the wafer chuck, the carrying arm having a slot sized and shaped to receive the wafer chuck, the carrying arm extending through the guiding opening of the support surface and being movable from a baking transfer position adjacent the opening of the chamber to a chuck transfer position aligned over the wafer chuck,
wherein, for baking the wafer, the carry arm is configured to move along the guiding opening and transport the wafer from the baking transfer position to the chuck transfer position, at which the wafer chuck moves toward the extended position to engage through the slot of the guiding arm to contact a bottom surface of the wafer such that the wafer is held by the wafer chuck, beneath the heating device, and is no longer carried by the carry arm,
wherein the wafer is rotated by the wafer chuck when the wafer is heated by the heating device.

11. The baking apparatus as claimed in claim 10 , wherein the wafer is located between the heating device and the wafer chuck when the wafer is held by the wafer chuck.

12. The baking apparatus as claimed in claim 10 , wherein the wafer chuck contacts a center area of a bottom surface of the wafer when the wafer is held by the wafer chuck.

13. The baking apparatus as claimed in claim 10 , wherein the wafer chuck is rotated before the wafer is put onto the wafer chuck.

14. The baking apparatus as claimed in claim 10 , wherein an area of the bottom surface of the wafer is about 1 times to about 36 times an area of a retaining surface of the wafer chuck, wherein the retaining surface contacts the bottom surface when the wafer is held by the wafer chuck.

15. The baking apparatus as claimed in claim 10 , wherein the heating device has a heating surface facing a retaining surface of the wafer chuck, and an area of the heating surface is greater than or equal to a top surface of the wafer.

16. The baking apparatus as claimed in claim 1 , wherein the wafer is descended by the wafer chuck to make the wafer contact the carrying arm after the wafer is heated by the heating device.

17. The baking apparatus as claimed in claim 1 , wherein the wafer comprises a substrate and a photoresist coated on the substrate, and the photoresist faces the heating device when the wafer is held by the wafer chuck.

18. The baking apparatus as claimed in claim 10 , wherein the wafer chuck is raised to a contacting position in which it is in contact with an center area of the bottom surface of the wafer after the wafer is located over the wafer chuck, and the wafer is raised to a heating position that is close to the heating device by the wafer chuck after the wafer is held on the wafer chuck.

19. The baking apparatus as claimed in claim 10 , wherein an average rising speed of the wafer chuck when the wafer chuck is far from the wafer over a predetermined distance relative to the wafer is about 6 times to about 50 times an average rising speed of the wafer chuck within the predetermined distance, wherein the predetermined distance is in a range from about 1 mm to about 5 mm.

20. The baking apparatus as claimed in claim 10 , wherein the heating device has a heating temperature in a range from about 70° C. to about 250° C.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Yang Ching-Hai
• Li shang-sheng
• Kao Yao-Hwan

Classifications

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/0462

  characterised by the construction of the processing chambers, e.g. modular processing chambers · CPC title

• H10P72/0434

  mainly by convection · CPC title

• H10P72/76

  using mechanical means, e.g. clamps or pinches · CPC title

• H10P72/50

  for positioning, orientation or alignment · CPC title