Forming mesas on an electrostatic chuck

Patent metadata

Field	Value
Publication number	US-12074052-B2
Application number	US-202318206931-A
Country	US
Kind code	B2
Filing date	Jun 7, 2023
Priority date	Feb 23, 2021
Publication date	Aug 27, 2024
Grant date	Aug 27, 2024

Abstract

A body of an electrostatic chuck comprises mesas disposed on a polished surface of the body. Each of the mesas comprises an adhesion layer disposed on the polished surface of the body, a transition layer disposed over the adhesion layer, and a coating layer disposed over the transition layer. The coating layer has a hardness of at least 14 GPa. The body further comprises a sidewall coating disposed over a sidewall of the body. A method for preparing the body comprises polishing the surface of the body and cleaning the polished surface. The method further comprises depositing the mesas by depositing the adhesion layer on the body, the transition layer over the adhesion layer, and the coating layer over the transition layer. Further, the method includes, polishing the mesas.

First claim

What is claimed is:

1. A method for preparing a body of an electrostatic chuck, the method comprising:
polishing a surface of the body to create a polished surface;
cleaning the polished surface of the body;
depositing mesas on the polished surface of the body, wherein each mesa comprises:
an adhesion layer on the polished surface of the body;
a transition layer over the adhesion layer; and
a coating layer over the transition layer; and

polishing the mesas.

2. The method of claim 1 , wherein the adhesion layer is metallic.

3. The method of claim 2 , wherein the adhesion layer is comprised of aluminum or erbium.

4. The method of claim 1 , wherein the transition layer is comprised of an oxide material.

5. The method of claim 1 , wherein at least a portion of the transition layer is deposited onto the polished surface of the body.

6. The method of claim 1 , wherein the coating layer is comprised of an oxynitride material having about 20 percent to about 40 percent oxygen.

7. The method of claim 1 , wherein the coating layer is comprised of an oxynitride material having less than 20 percent oxygen.

8. The method of claim 7 , wherein the oxynitride material having less than 20 percent oxygen is aluminum oxynitride or erbium oxynitride.

9. A body of an electrostatic chuck, the body comprising:
mesas disposed on a polished surface of the body, each mesa comprising:
an adhesion layer disposed on the polished surface of the body;
a transition layer disposed over the adhesion layer; and
a coating layer disposed over the transition layer; and

a sidewall coating disposed over a sidewall of the body.

10. The body of claim 9 , wherein the adhesion layer is metallic.

11. The body of claim 10 , wherein the adhesion layer is comprised of aluminum or erbium.

12. The body of claim 9 , wherein:
the transition layer is comprised of an oxide material including a metal; and
the coating layer is comprised of an oxynitride material including the metal.

13. The body of claim 12 , wherein the metal is aluminum or erbium.

14. The body of claim 9 , wherein the coating layer is comprised of an oxynitride material having about 20 percent to about 40 percent oxygen.

15. The body of claim 9 , wherein the coating layer is comprised of an oxynitride material having less than 20 percent oxygen.

16. The body of claim 15 , wherein the oxynitride material having less than 20 percent oxygen is aluminum oxynitride or erbium oxynitride.

17. An electrostatic chuck comprising:
a body comprising:
mesas disposed on a polished surface of the body, each mesa comprising:
an adhesion layer disposed on the polished surface of the body;
a transition layer disposed over the adhesion layer; and
a coating layer disposed over the transition layer; and

a sidewall coating disposed over a sidewall of the body; and

a base attached to the body.

18. The electrostatic chuck of claim 17 , wherein the coating layer is comprised of an oxynitride material having about 20 percent to about 40 percent oxygen.

19. The electrostatic chuck of claim 17 , wherein the coating layer is comprised of an oxynitride material having less than 20 percent oxygen.

20. The electrostatic chuck of claim 19 , wherein the oxynitride material having less than 20 percent oxygen is aluminum oxynitride or erbium oxynitride.

Assignees

• Applied Materials Inc

Inventors

• Boyd Jr Wendell Glenn
• Wu Stanley
• Boyd Matthew

Classifications

• H10P72/722 Primary

  Details of electrostatic chucks · CPC title

• H10P72/7614

  characterised by a plurality of individual support members, e.g. support posts or protrusions · CPC title

• H10P72/7616

  characterised by a coating, a hardness or a material · CPC title

• H10P72/0434 Primary

  mainly by convection · CPC title

• C23C16/0227

  by cleaning or etching · CPC title