Placement member and method of manufacturing the same

Patent metadata

Field	Value
Publication number	US-10937684-B2
Application number	US-201314648221-A
Country	US
Kind code	B2
Filing date	Nov 14, 2013
Priority date	Nov 28, 2012
Publication date	Mar 2, 2021
Grant date	Mar 2, 2021

Abstract

A placement member (1) in accordance with an embodiment of the present invention includes a base (4) having a placement section (3) on which an object (2) is placed, and a coating film (5) that coats at least a part of the placement section (3). The placement section (3) has a bottom face (8), a plurality of projections (9) projecting from the bottom face (8), and an annular protrusion (10) that protrudes from the bottom face (8) at the same height as the plurality of projections (9) and surrounds the plurality of projections (9). The coating film (5) has a first region (15) that coats top faces (11) of the projections (9) and a second region (16) that coats a top face (13) of the annular protrusion (10) and has a smaller thickness than that of the first region (15).

First claim

The invention claimed is:

1. A placement member for a vacuum chuck, the placement member comprising:
a base including a placement section on which an object is placed and an exhaust hole, wherein the placement section comprises a bottom face, a plurality of projections protruding from the bottom face, and an annular protrusion that protrudes from the bottom face and surrounds the plurality of projections, wherein the plurality of projections and the annular protrusion have a same height, and wherein the exhaust hole penetrates the base and is configured to be connected to an exhaust system so as to create a vacuum suction force that seals the object to the placement section;
a first film that coats each of the plurality of projections and the annular protrusion and has an equal thickness across each of the plurality of projections and the annular protrusion, such that the plurality of projections with the first film and the annular protrusion with the first film have a same height; and
a second film that coats the first film on each of the plurality of projections but not on the annular protrusion, such that the plurality of projections with the first film and the second film have a greater height than the annular protrusion with only the first film,
wherein a thickness of the first film is smaller than a thickness of the second film,
wherein the first film is made of silicon oxide, and
wherein the second film is made of titanium nitride.

2. The placement member according to claim 1 , wherein the thickness of the second film is within the range of 1 to 3 μm.

3. The placement member according to claim 1 , wherein the plurality of projections with the first film and the second film constitute a support section that supports the object, and wherein the annular protrusion with the first film but not the second film constitutes a seal section that seals a space between the object and the placement section.

4. The placement member according to claim 1 , wherein side faces of the plurality of projections and the annular protrusion are exposed without being coated.

5. A method of manufacturing a placement member for a vacuum chuck, the method comprising:
preparing a base including a placement section on which an object is placed and an exhaust hole, the placement section comprising a bottom face, a plurality of projections protruding from the bottom face, and an annular protrusion that surrounds the plurality of projections and protrudes from the bottom face, wherein the plurality of projections and the annular protrusion have a same height, and wherein the exhaust hole penetrates the base and is configured to be connected to an exhaust system so as to create a vacuum suction force that seals the object to the placement section; and
forming a first film that coats a top face of each of the plurality of projections and the annular protrusion and has an equal thickness across each of the plurality of projections and the annular protrusion, such that the plurality of projections with the first film and the annular protrusion with the first film have a same height; and
forming a second film that coats the first film on each of the plurality of projections but not on the annular protrusion, such that the plurality of projections with the first film and the second film have a greater height than the annular protrusion with only the first film,
wherein a thickness of the first film is smaller than a thickness of the second film,
wherein the first film is made of silicon oxide, and
wherein the second film is made of titanium nitride.

6. The method of manufacturing the placement member according to claim 5 , wherein the preparing the base includes simultaneously grinding the top faces of the plurality of projections and the top face of the annular protrusion, thereby making the height of the plurality of projections equal to the height of the annular protrusion.

7. A placement member comprising:
a base including a placement section on which an object is placed, wherein the placement section comprises a bottom face, a plurality of projections protruding from the bottom face, and an annular protrusion that protrudes from the bottom face and surrounds the plurality of projections, wherein the plurality of projections and the annular protrusion have a same height;
a first film that coats each of the plurality of projections and the annular protrusion and has an equal thickness across each of the plurality of projections and the annular protrusion, such that the plurality of projections with the first film and the annular protrusion with the first film have a same height; and
a second film that coats the first film on each of the plurality of projections but not on the annular protrusion, such that the plurality of projections with the first film and the second film have a greater height than the annular protrusion with only the first film,
wherein a thickness of the first film is smaller than a thickness of the second film,
wherein the first film is made of silicon oxide, and
wherein the second film is made of titanium nitride.

8. The placement member according to claim 7 , wherein the thickness of the second film is within the range of 1 to 3 μm.

9. The placement member according to claim 7 , wherein the plurality of projections with the first film and the second film constitute a support section that supports the object, and wherein the annular protrusion with the first film but not the second film constitutes a seal section that seals a space between the object and the placement section.

10. The placement member according to claim 7 , wherein side faces of the plurality of projections and the annular protrusion are exposed without being coated.

Assignees

• Kyocera Corp

Inventors

• Horiuchi Masahiko

Classifications

• H10P72/7614

  characterised by a plurality of individual support members, e.g. support posts or protrusions · CPC title

• H10P72/7616 Primary

  characterised by a coating, a hardness or a material · CPC title

• B05D7/52

  Two layers · CPC title

• G03F7/707

  Chucks, e.g. chucking or un-chucking operations or structural details · CPC title

• H01L21/68757 Primary

  Electricity · mapped topic