Non-Metallic Thermal CVD/ALD Gas Injector And Purge System

Patent metadata

Field	Value
Publication number	US-2017191159-A1
Application number	US-201615392489-A
Country	US
Kind code	A1
Filing date	Dec 28, 2016
Priority date	Jan 1, 2016
Publication date	Jul 6, 2017
Grant date	—

Abstract

Gas distribution assemblies and processing chambers using same are described. The gas distribution assemblies comprise a cooling plate with a quartz puck, a plurality of reactive gas sectors and a plurality of purge gas sectors suspended therefrom. The reactive gas sectors and purge gas sectors having a coaxial gas inlet with inner tubes and outer tubes, the inner tubes and outer tubes in fluid communication with different gas or vacuum ports in the front faces of the sectors. The sectors may be suspended from the cooling plate by a plurality of suspension rods comprising a metal rod body with an enlarged lower end positioned within a quartz frame with a silicon washer around the enlarged lower end.

First claim

What is claimed is:

1 . A gas distribution assembly comprising:
a cooling plate; and a plurality of reactive gas sectors axially arranged around a central axis; a plurality of purge gas sectors axially arranged around the central axis, each of the purge gas sectors positioned between reactive gas sectors; and a quartz puck at the central axis.

2 . The gas distribution assembly of claim 1 , wherein each of the reactive gas sectors comprise a wedge-shaped housing having a back face and a front face.

3 . The gas distribution assembly of claim 2 , wherein each of the reactive gas sectors has a coaxial gas inlet in fluid communication with the wedge-shaped housing, the coaxial gas inlet having an inner tube and an outer tube.

4 . The gas distribution assembly of claim 3 , wherein the inner tube is in fluid communication with a plenum within the wedge-shaped housing and the reactive gas sector includes a diffuser plate adjacent the plenum, the diffuser plate comprising a plurality of apertures to allow a gas flowing through the inner tube to pass into the plenum and diffuse through the plurality of apertures and out a reactive gas port in the front face of the wedge-shaped housing into a process region of a processing chamber.

5 . The gas distribution assembly of claim 4 , wherein the outer tube is in fluid communication with a vacuum port in the front face of the wedge-shaped housing, the vacuum port surrounding the diffuser plate of the reactive gas port.

6 . The gas distribution assembly of claim 5 , wherein the wedge-shaped housing and diffuser plate are quartz.

7 . The gas distribution assembly of claim 6 , wherein each of the reactive gas sectors are suspended from the cooling plate by a plurality of suspension rods.

8 . The gas distribution assembly of claim 7 , wherein each suspension rod comprises a metal rod body that passes through an opening in the back face of the wedge-shaped housing, the rod body having an enlarged lower end positioned within a quartz frame within the wedge-shaped housing, and a silicon washer is positioned within the quartz frame around the enlarged lower end.

9 . The gas distribution assembly of claim 8 , wherein each reactive gas sector is suspended from the cooling plate by at least three suspension rods.

10 . The gas distribution assembly of claim 1 , wherein each of the plurality of purge gas sectors comprises a housing with a back face, a front face, an outer peripheral leg and a radial leg.

11 . The gas distribution assembly of claim 10 , wherein each of the purge gas sectors has a coaxial gas inlet in fluid communication with the housing, the coaxial gas inlet having an inner tube and an outer tube.

12 . The gas distribution assembly of claim 11 , wherein the inner tube is in fluid communication with a purge gas port in the front face of the radial leg of the housing and the outer tube is in fluid communication a purge gas port in the front face of the outer peripheral leg of the housing.

13 . The gas distribution assembly of claim 12 , wherein the housing of each of the purge gas sectors are quartz.

14 . The gas distribution assembly of claim 13 , wherein each of the purge gas sectors are suspended from the cooling plate by a plurality of suspension rods.

15 . The gas distribution assembly of claim 14 , wherein each suspension rod comprises a metal rod body that passes through an opening in the back face of the housing, the rod body having an enlarged lower end positioned within a quartz frame within the housing, and a silicon washer is positioned within the quartz frame around the enlarged lower end.

16 . The gas distribution assembly of claim 15 , wherein each purge gas sector is suspended from the cooling plate by at least two suspension rods.

17 . The gas distribution assembly of claim 1 , the quartz puck comprises a housing with at least one vacuum port and at least one purge gas port and is suspended from the cooling plate by a plurality of suspension rods, each suspension rod comprising a metal rod body that passes through an opening in a back face of the housing, the rod body having an enlarged lower end positioned within a quartz frame within the housing, and a silicon washer is positioned within the quartz frame around the enlarged lower end.

18 . The gas distribution assembly of claim 17 , wherein the cooling plate comprises a conductive body with a channel therethrough to flow a fluid from an inlet end of the channel to an outlet end of the channel.

19 . A gas distribution assembly comprising:
a cooling plate having a conductive body with a channel therethrough to flow a fluid from an inlet end of the channel to an outlet end of the channel; and a plurality of reactive gas sectors axially arranged around a central axis, each of the reactive gas sectors comprising
a quartz wedge-shaped housing with a back face and a front face and a coaxial gas inlet in fluid communication with the wedge-shaped housing,
the coaxial gas inlet having an inner tube and an outer tube, the inner tube is in fluid communication with a plenum within the wedge-shaped housing and the reactive gas sector includes a diffuser plate adjacent the plenum, the diffuser plate comprising a plurality of apertures to allow a gas flowing through the inner tube to pass into the plenum and diffuse through the plurality of apertures and out a reactive gas port in the front face of the wedge-shaped housing into a process region of a processing chamber,
the outer tube is in fluid communication with a vacuum port in the front face of the wedge-shaped housing, the vacuum port surrounding the diffuser plate of the reactive gas port,
each reactive gas sector suspended from the cooling plate by at least three suspension rods, each suspension rod comprises a metal rod body that passes through an opening in the back face of the wedge-shaped housing, the rod body having an enlarged lower end positioned within a quartz frame within the wedge-shaped housing, and a silicon washer is positioned within the quartz frame around the enlarged lower end;
a plurality of purge gas sectors axially arranged around the central axis, each of the purge gas sectors positioned between reactive gas sectors, each purge gas sector comprising
a quartz housing with a back face, a front face, an outer peripheral leg, a radial leg and a coaxial gas inlet in fluid communication with the housing, the coaxial gas inlet having an inner tube and an outer tube,
the inner tube is in fluid communication with a purge gas port in the front face of the radial leg of the housing,
the outer tube is in fluid communication a purge gas port in the front face of the outer peripheral leg of the housing,
each of the purge gas sectors suspended from the cooling plate by at least two suspension rods, each suspension rod comprises a metal rod body that passes through an opening in the back face of the housing, the rod body having an enlarged lower end positioned within a quartz frame within the housing, and a silicon washer is positioned within the quartz frame around the enlarged lower end; and
a quartz puck at the central axis, the plurality of reactive gas sectors and purge gas sectors alternatingly arranged around an outer edge of the quartz puck, the quartz puck comprises at least one vacuum port and at least one purge gas port and is suspended from the cooling plate by a plurality of suspension rods, each suspension rod comprising a metal rod body that passes through an opening in a back face of the housing, the rod body having an enlarged

Assignees

• Applied Materials Inc

Inventors

• Polyak Alexander S
• Yudovsky Joseph

Classifications

• H10P14/24

  using chemical vapour deposition [CVD] · CPC title

• C23C16/4401 Primary

  Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber · CPC title

• C23C16/45572

  Cooled nozzles · CPC title

• C23C16/45551

  for relative movement of the substrate and the gas injectors or half-reaction reactor compartments · CPC title

• C23C16/45563

  Gas nozzles · CPC title