System for testing an integrated circuit of a device and its method of use

Patent metadata

Field	Value
Publication number	US-11977098-B2
Application number	US-202318159794-A
Country	US
Kind code	B2
Filing date	Jan 26, 2023
Priority date	Mar 25, 2009
Publication date	May 7, 2024
Grant date	May 7, 2024

Abstract

A method of testing an integrated circuit of a device is described. Air is allowed through a fluid line to modify a size of a volume defined between the first and second components of an actuator to move a contactor support structure relative to the apparatus and urge terminals on the contactor support structure against contacts on the device. Air is automatically released from the fluid line through a pressure relief valve when a pressure of the air in the fluid line reaches a predetermined value. The holder is moved relative to the apparatus frame to disengage the terminals from the contacts while maintaining the first and second components of the actuator in a substantially stationary relationship with one another. A connecting arrangement is provided including first and second connecting pieces with complementary interengaging formations that restricts movement of the contactor substrate relative to the distribution board substrate in a tangential direction.

First claim

What is claimed:

1. A method of testing an integrated circuit of a device, comprising:
locating a compensating piece against a first piece of a subassembly of a contactor board assembly, the compensating piece having a profiled surface to improve planarity of a surface of the subassembly other than the profiled surface of the compensating piece, the compensating piece and the contactor board assembly forming part of a cartridge that includes a common subassembly and a first unique contactor subassembly;
removably mounting a cartridge frame of the cartridge to an apparatus frame;
connecting a surface of a connector interface to a surface of a contactor interface;
holding the device against a surface of a holder;
moving the contactor board assembly relative to the holder to bring terminals of the contactor board assembly into contact with contacts on the device; and
providing signals through the terminals and contacts to the integrated circuit; and
replacing the first unique contactor subassembly with a second unique contactor subassembly.

2. The method of claim 1 , wherein the compensating piece is held between first and second pieces of the subassembly.

3. The method of claim 1 , wherein the compensating piece has a two-dimensional profile to compensate for a two-dimensional profile of the surface of the subassembly.

4. The method of claim 1 , further comprising:
actuating first and second components of an actuator to move a contactor support structure relative to an apparatus frame and urge terminals on the contactor support structure against contacts on the device.

5. The method of claim 4 further comprising:
allowing air through a fluid line to modify a size of a volume defined between the first and second components of the actuator to move the contactor support structure relative to the apparatus frame.

6. The method of claim 1 , wherein a plurality of electrical components are mounted on the contactor board assembly.

7. The method of claim 6 , wherein the electrical components are mounted on a side on the contactor board assembly opposing the terminals held by the contactor board assembly.

8. The method of claim 6 , wherein the electrical components are located between a force distribution substrate and the contactor board assembly, further comprising:
transferring force from the contactor substrate to the force distribution substrate through a stand-off component, the stand-off component being located between the compensating piece and the surface of the subassembly.

9. The method of claim 1 , wherein the contactor support structure includes a distribution board substrate and a contactor substrate mounted to the distribution board substrate.

10. The method of claim 1 , further comprising:
reducing a pressure in an area between the common subassembly and the second unique contactor subassembly, the compensating piece compensating for at least a profile change of the surface due to said reduction in pressure.

11. An apparatus for testing an integrated circuit of a device, comprising:
an apparatus frame;
a cartridge for holding the device, including a cartridge frame that is removably mountable to the apparatus frame
a subassembly including:
a contactor support structure;
a contactor interface on the contactor support structure;
a connector interface having a surface for connecting to a surface of the contactor interface;
a compensating piece with a profiled surface that improves planarity of a surface of the subassembly other than the profiled surface of the compensating piece; and a plurality of terminals held by the contactor support structure, a holder and contactor support structure being movable relative to one another so that each one of the terminals releasably makes contact with a respective contact of the device;
a power source;
a power electrical path connecting the power source to a power terminal of the terminals held by the support structure;
a signal source; and
a plurality of signal electrical paths, each connecting the signal source to a respective signal terminal of the terminals held by the support structure, wherein the cartridge includes a common subassembly and a first unique contactor subassembly that is replaceable with a second unique contactor subassembly.

12. The apparatus of claim 11 , wherein the compensating piece has a three-dimensional profile to compensate for a three-dimensional profile of the surface of the subassembly.

13. The apparatus of claim 11 , further comprising:
an actuator connected between the apparatus frame and the contactor support structure, having first and second portions that are movable relative to one another to move the contactor support structure relative to the apparatus frame and toward the surface of the holder so that the terminals are urged against contacts of the device.

14. The apparatus of claim 13 , wherein the actuator has a volume defined between the first and second components and a fluid line connected to the volume to allow air through the volume and thereby modify a size of the volume and move the contactor support structure relative to the apparatus frame.

15. The apparatus of claim 11 , further comprising:
a plurality of electrical components mounted on the contactor support structure.

16. The apparatus of claim 15 , wherein the electrical components are mounted on a side on the contactor support structure opposing the terminals held by the contactor support structure.

17. The apparatus of claim 15 , further comprising:
a force distribution substrate, the electrical components being located between the force distribution substrate and the contactor support structure; and
a stand-off component between the force distribution substrate and the contactor substrate to transfer force from the contactor substrate to the force distribution substrate, the stand-off component being located between the compensating piece and the surface of the subassembly.

18. The apparatus of claim 11 , further comprising a contactor board assembly having the contactor support structure, the terminals and a compensating piece with a profiled surface that improves planarity of a surface of the contactor board assembly other than the profiled surface of the compensating piece.

19. The apparatus of claim 11 , wherein the contactor support structure includes a distribution board substrate and a contactor substrate mounted to the distribution board substrate.

20. The apparatus of claim 11 , further comprising:
a pressure reduction passage in communication with an area between the common subassembly and the second unique contactor subassembly and having an outlet on an external side of the cartridge; and
a pump connected to the outlet of the pressure reduction passage so as to reduce a pressure in the area between the common subassembly and the second unique contactor subassembly, the compensating piece compensating for at least a profile change of the surface due to said reduction in pressure.

21. A cartridge, comprising:
a cartridge frame;
formations on the cartridge frame for mounting the cartridge frame in a fixed position to an apparatus frame;
a subassembly including:
a contactor support structure;
a contactor interface on the contactor support structure;
a connector interface having a surface for connecting to a surface of the contactor interface;
a compensating piece with a profiled surface that improves planarity of a surface of the subassembly other than the profiled surface of the compensatin

Assignees

• Aehr Test Systems

Inventors

• Lindsey Scott E
• Yeh Junjye
• Jovanovic Jovan
• Malathong Seang P

Classifications

• G01R1/0441 Primary

  Details · CPC title

• G01R1/0416

  Connectors, terminals (G01R1/0425 and G01R1/0433 take precedence; with measurement function for battery poles G01R31/364) · CPC title

• G01R1/0491

  for testing integrated circuits on wafers, e.g. wafer-level test cartridge · CPC title

• G01R1/06705

  Apparatus for holding or moving single probes (for moving multiple probe heads or ICs under test G01R31/2886) · CPC title

• G01R1/07307

  with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card · CPC title