System for testing an integrated circuit of a device and its method of use

Patent metadata

Field	Value
Publication number	US-9250291-B2
Application number	US-201213554722-A
Country	US
Kind code	B2
Filing date	Jul 20, 2012
Priority date	Dec 19, 2007
Publication date	Feb 2, 2016
Grant date	Feb 2, 2016

Abstract

A cartridge, including a cartridge frame, formations on the cartridge frame for mounting the cartridge frame in a fixed position to an apparatus frame, a contactor support structure, a contactor interface on the contactor support structure, a plurality of terminals, held by the contactor support structure, for contacting contacts on a device, and a plurality of conductors, held by the contactor support structure, connecting the interface to the terminals.

First claim

What is claimed:

1. An apparatus for testing an integrated circuit of a device, comprising:
an apparatus frame;
a cartridge including a common subassembly, including a cartridge frame, and a first unique contactor subassembly that is replaceable with a second unique contactor subassembly;
a contactor interface on the contactor support structure;
a connector interface having a surface for connecting to a surface of the contactor interface;
a holder for the device, secured to the apparatus frame;
a plurality of terminals held by the contactor support structure, the holder and contactor support structure being movable relative to one another so that each one of the terminals makes releasable contact with a respective contact of the device;
a power source;
a power electrical path connecting the power source to a power terminal of the terminals held by the support structure;
a signal source; and
a plurality of signal electrical paths, each connecting the signal source to a respective signal terminal of the terminals held by the support structure.

2. The apparatus of claim 1 , further comprising:
an actuator connected between the apparatus frame and the contactor support structure, having first and second portions that are movable relative to one another to move the contactor support structure relative to the apparatus frame and toward the surface of the holder so that the terminals are urged against contacts of the device.

3. The apparatus of claim 2 , wherein the first and second portions of the actuator are a cylinder and a piston, respectively, the piston being located in the cylinder so that the cylinder and the piston jointly define a volume, further comprising:
a fluid line connected to the volume to modify a pressure of the volume and move the piston relative to the cylinder.

4. The apparatus of claim 3 , wherein a cross-sectional surface area of the volume normal to a direction of movement of the piston relative to the cylinder is modifiable.

5. The apparatus of claim 4 , wherein the piston includes a main piston component and the cylinder includes a main cylinder component, further comprising:
a volume-defining component that is selectably attachable to either the main piston component or the main cylinder component to modify the cross-sectional area of the volume.

6. The apparatus of claim 5 , comprising a plurality of volume-defining components, each being selectably attachable to either the main piston component or the main cylinder component to progressively modify the cross-sectional area of the volume.

7. The apparatus of claim 5 , wherein the volume-defining component is a ring.

8. The apparatus of claim 3 , further comprising:
a spring; and
a spring adjustment mechanism having a first portion secured to the piston and a second portion connected to the spring, the spring adjustment mechanism being adjustable to adjust a force of the spring and level the piston relative to the cylinder.

9. The apparatus of claim 2 , wherein the actuator includes an inflatable and deflatable bladder, the first and second portions of the actuator being opposing sides of the bladder.

10. The apparatus of claim 1 , further comprising:
a plurality of electrical components mounted on each contactor support structure.

11. The apparatus of claim 10 , wherein the electrical components are mounted on a side on the contactor support structure opposing the terminals held by the contactor support structure.

12. The apparatus of claim 10 , further comprising:
a force distribution substrate, the electrical components being located between the force distribution substrate and the contactor support structure; and
a stand-off component between the force distribution substrate and the contactor substrate to transfer force from the contactor substrate to the force distribution substrate.

13. The apparatus of claim 1 , wherein the contactor support structure includes a distribution board substrate and a contactor substrate mounted to the distribution board substrate.

14. The apparatus of claim 13 , wherein the distribution board has a plurality of layers having a plurality of different stiffnesses, one of the layers in a half of the distribution board substrate opposing the terminals held by the contactor support structure being stiffer than a majority of the layers.

15. The apparatus of claim 1 , wherein the contactor interface is on a side of the contactor board assembly opposing the terminals held by the contactor board assembly.

16. The apparatus of claim 15 , further comprising:
a flexible cable, the connector interface being connected to the flexible cable to form a flexible attachment, the cartridge frame including an opening and the flexible attachment passing at least partially through the opening.

17. The apparatus of claim 1 , further comprising:
a pressure reduction passage in communication with an area between the common subassembly and the second unique contactor subassembly and having an outlet on an external side of the cartridge; and
a pump connected to the outlet of the pressure reduction passage so as to reduce a pressure in the area between the common subassembly and the second unique contactor subassembly.

18. The apparatus of claim 1 , further comprising a connector including:
a connector body; and
a plurality of connector conductors held by the connector body, the connector interface being surfaces of the connector conductors.

19. The apparatus of claim 18 , wherein the connector conductors include a plurality of signal connector conductors and a plurality of ground connector conductors, further comprising:
a bulk ground return connected to the ground connector conductors but not to the signal connector conductors.

20. The apparatus of claim 19 , wherein each signal connector conductor and each ground connector conductor are coaxially located one within the other with an insulation layer between the signal connector conductor and the ground connector conductor.

21. The apparatus of claim 18 , further comprising:
a flexible cable, the flexible cable being mounted to the connector and extending from the connector in a direction opposing the connector interface.

22. The apparatus of claim 18 , further comprising:
a pin on the connector body, wherein the contactor support structure has an opening that receives the pin to align the connector interface with the contactor interface.

Assignees

• Lindsey Scott E
• Jovanovic Jovan
• Hendrickson David S
• Richmond Ii Donald P
• Aehr Test Systems

Inventors

• Lindsey Scott E
• Jovanovic Jovan
• Hendrickson David S
• Richmond Ii Donald P

Classifications

• G01R31/31908

  Tester set-up, e.g. configuring the tester to the device under test [DUT], down loading test patterns · CPC title

• G01R31/2891 Primary

  related to sensing or controlling of force, position, temperature (G01R31/2874 takes precedence; sensing of force G01L; sensing of position G01B, G01D; sensing of temperature G01K; controlling in general G05) · CPC title

• G01R31/287

  Procedures; Software aspects · CPC title