Apparatus for testing electronic devices

Patent metadata

Field	Value
Publication number	US-9316683-B2
Application number	US-201514833938-A
Country	US
Kind code	B2
Filing date	Aug 24, 2015
Priority date	Apr 27, 2005
Publication date	Apr 19, 2016
Grant date	Apr 19, 2016

Abstract

An apparatus is described for burn-in and/or functional testing of microelectronic circuits of unsingulated wafers. A large number of power, ground, and signal connections can be made to a large number of contacts on a wafer. The apparatus has a cartridge that allows for fanning-in of electric paths. A distribution board has a plurality of interfaces that are strategically positioned to provide a dense configuration. The interfaces are connected through flexible attachments to an array of first connector modules. Each one of the first connector modules can be independently connected to a respective one of a plurality of second connector modules, thereby reducing stresses on a frame of the apparatus. Further features include for example a piston that allows for tight control of forces exerted by terminals onto contacts of a wafer.

First claim

What is claimed:

1. An apparatus for testing an integrated circuit of a device, comprising:
an apparatus frame;
a holder, having a surface against which the device is placed, mounted to the apparatus frame;
a cartridge frame mounted to the apparatus frame;
a contactor support structure;
a contactor interface on the contactor support structure;
a plurality of terminals held by the contactor support structure;
a plurality of conductors, held by the contactor support structure, connecting the interface to the terminals; and
an actuator connected between the cartridge frame and the contactor support structure, having first and second portions that are movable relative to one another to move the contactor support structure relative to the cartridge frame and toward the surface of the holder so that the terminals are urged against contacts of the device.

2. The apparatus of claim 1 , wherein the first and second portions of the actuator are a cylinder and a piston, respectively, the piston being located in the cylinder so that the cylinder and the piston jointly define a volume, further comprising a fluid line connected to the volume to modify a pressure of the volume and move the piston relative to the cylinder.

3. The apparatus of claim 1 , further comprising a travel sensor for measuring the movement of the contactor support structure relative to the cartridge frame.

4. The apparatus of claim 2 , wherein the cartridge frame includes a lower backing plate and a support structure, and wherein the travel sensor includes an outer portion attached to the support structure and an inner portion attached to the backing plate, and wherein actuation of the actuator causes the relative movement between the outer portion and the inner portion.

5. The apparatus of claim 3 , wherein the travel sensor measures the change of inductance or capacitance between the outer portion and the inner portion.

6. An apparatus for testing an integrated circuit of a device, comprising:
an apparatus frame;
a holder, having a surface against which the device is placed, mounted to the apparatus frame;
a cartridge frame mounted to the apparatus frame;
a contactor support structure;
a contactor interface on the contactor support structure;
a plurality of terminals held by the contactor support structure;
a plurality of conductors, held by the contactor support structure, connecting the interface to the terminals;
a variable-force actuator connected between the cartridge frame and the contactor support structure, having first and second portions that are movable relative to one another to move the contactor support structure relative to the cartridge frame and toward the surface of the holder so that the terminals are urged against contacts of the device; and
a travel sensor connected to the cartridge frame for measuring the movement of the cartridge frame relative to the apparatus frame.

7. The apparatus of claim 6 , wherein the cartridge frame includes a lower backing plate and a support structure, and wherein the travel sensor includes an outer portion attached to the support structure and an inner portion attached to the backing plate, and wherein actuation of the actuator causes the relative movement between the outer portion and the inner portion.

8. The apparatus of claim 6 , wherein the device with the holder is moveable relative to the frame in a direction toward the contactor support structure.

9. The apparatus of claim 6 , wherein the variable-force actuator comprises a piston.

10. The apparatus of claim 9 , wherein the pressure of the piston is set so that the piston is in the middle of its stroke when the terminals are urged against the contacts of the device.

Assignees

• Aehr Test Systems

Inventors

• Richmond Ii Donald P
• Deboe Kenneth W
• Uher Frank O
• Jovanovic Jovan
• Lindsey Scott E
• Maenner Thomas T
• Shepherd Patrick M
• Tyson Jeffrey L
• Carbone Mark C
• Burke Paul W
• Cao Doan D
• Tomic James F
• Vu Long V

Classifications

• H10P74/00 Primary

  Testing or measuring during manufacture or treatment of wafers, substrates or devices · CPC title

• G01R31/2872 Primary

  related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation · CPC title

• G01R31/2868 Primary

  Complete testing stations; systems; procedures; software aspects · CPC title

• G01R31/003

  Environmental or reliability tests (of individual semiconductors G01R31/2642; of PCB's G01R31/2817; of IC's G01R31/2855; of other circuits G01R31/2849) · CPC title

• G01R31/287 Primary

  Procedures; Software aspects · CPC title