Controlling alignment during a thermal cycle

Patent metadata

Field	Value
Publication number	US-9880197-B2
Application number	US-201715453819-A
Country	US
Kind code	B2
Filing date	Mar 8, 2017
Priority date	Mar 25, 2009
Publication date	Jan 30, 2018
Grant date	Jan 30, 2018

Abstract

A method of testing an integrated circuit of a device is described. Air is allowed through a fluid line to modify a size of a volume defined between the first and second components of an actuator to move a contactor support structure relative to the apparatus and urge terminals on the contactor support structure against contacts on the device. Air is automatically released from the fluid line through a pressure relief valve when a pressure of the air in the fluid line reaches a predetermined value. The holder is moved relative to the apparatus frame to disengage the terminals from the contacts while maintaining the first and second components of the actuator in a substantially stationary relationship with one another. A connecting arrangement is provided including first and second connecting pieces with complementary interengaging formations that restricts movement of the contactor substrate relative to the distribution board substrate in a tangential direction.

First claim

What is claimed is:

1. An apparatus for testing an integrated circuit of a device, comprising:
an apparatus frame;
a holder for the device, secured to the apparatus frame;
a distribution board substrate;
a contactor substrate;
at least a first connecting arrangement that connects the contactor substrate to the distribution board substrate to jointly form a contactor support structure held by the apparatus frame, the first connecting arrangement including first and second connecting pieces with complementary interengaging formations that allow for movement of the contactor substrate relative to the distribution board substrate in a first radial direction and restricts movement of the contactor substrate relative to the distribution board substrate in a first tangential direction transverse to the first radial direction;
a plurality of terminals held by the contactor support structure, the holder and contactor support structure being movable relative to one another so that each one of the terminals releasably makes contact with a respective contact of the device;
a power source;
a power electrical path connecting the power source to a power terminal of the terminals held by the support structure;
a signal source; and
a plurality of signal electrical paths, each connecting the signal source to a respective signal terminal of the terminals held by the support structure.

2. The apparatus of claim 1 , wherein the contactor support structure includes at least a second connecting arrangement connecting the contactor substrate to the distribution board substrate, the second connecting arrangement including first and second connecting pieces with complementary interengaging formations that allow for movement of the contactor substrate relative to the distribution board substrate in a second radial direction and restricts movement of the contactor substrate relative to the distribution board substrate in a second tangential direction transverse to the second radial direction.

3. The apparatus of claim 2 , wherein the second radial direction is at an angle relative to the first radial direction.

4. The apparatus of claim 3 , wherein lines from the first and second connecting arrangements respectively in the first and second radial directions intersect within a central are of the distribution board substrate.

5. The apparatus of claim 1 , further comprising:
an actuator connected between the apparatus frame and the contactor support structure, having first and second portions that are movable relative to one another to move the contactor support structure relative to the apparatus frame and toward the surface of the holder so that the terminals are urged against contacts of the device.

6. The apparatus of claim 1 , further comprising:
a cartridge including a cartridge frame that is removably mountable to the apparatus frame, the contactor board forming part of the cartridge;
a contactor interface on the contactor support structure; and
a connector interface having a surface for connecting to a surface of the contactor interface.

7. A cartridge, comprising:
a cartridge frame;
formations on the cartridge frame for mounting the cartridge frame in a fixed position to an apparatus frame;
a distribution board substrate;
a contactor substrate;
at least a first connecting arrangement that connects the contactor substrate to the distribution board substrate to jointly form a contactor support structure held by the apparatus frame, the first connecting arrangement including first and second connecting pieces with complementary interengaging formations that allow for movement of the contactor substrate relative to the distribution board substrate in a first radial direction and restricts movement of the contactor substrate relative to the distribution board substrate in a first tangential direction transverse to the first radial direction;
a contactor interface on the contactor support structure;
a plurality of terminals, held by the contactor support structure, for contacting contacts on a device; and
a plurality of conductors, held by the contactor support structure, connecting the interface to the terminals.

8. The cartridge of claim 7 , wherein the contactor support structure includes at least a second connecting arrangement connecting the contactor substrate to the distribution board substrate, the second connecting arrangement including first and second connecting pieces with complementary interengaging formations that allow for movement of the contactor substrate relative to the distribution board substrate in a second radial direction and restricts movement of the contactor substrate relative to the distribution board substrate in a second tangential direction transverse to the second radial direction.

9. The cartridge of claim 8 , wherein the second radial direction is at an angle relative to the first radial direction.

10. The cartridge of claim 9 , wherein a lines from the first and second connecting arrangements respectively in the first and second radial directions intersect within a central are of the distribution board substrate.

Assignees

• Aehr Test Systems

Inventors

• Lindsey Scott E
• Yeh Junyje
• Jovanovic Jovan
• Malathong Seang P

Classifications

• G01R1/07307

  with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card · CPC title

• G01R31/2886

  Features relating to contacting the IC under test, e.g. probe heads; chucks (G01R31/2865 takes precedence, test connections, e.g. test sockets, or probes per se, G01R1/04 or G01R1/06) · CPC title

• G01R31/2863

  Contacting devices, e.g. sockets, burn-in boards or mounting fixtures (in general G01R1/04) · CPC title

• G01R1/06705

  Apparatus for holding or moving single probes (for moving multiple probe heads or ICs under test G01R31/2886) · CPC title

• G01R1/0491

  for testing integrated circuits on wafers, e.g. wafer-level test cartridge · CPC title