Piezoelectric material, piezoelectric element, and electronic equipment

Patent metadata

Field	Value
Publication number	US-11837975-B2
Application number	US-202016775542-A
Country	US
Kind code	B2
Filing date	Jan 29, 2020
Priority date	Aug 4, 2017
Publication date	Dec 5, 2023
Grant date	Dec 5, 2023

Abstract

A piezoelectric material includes: an oxide containing Na, Ba, Nb, Ti, and Mn, in which the oxide has a perovskite-type structure, a total amount of metal elements other than Na, Ba, Nb, Ti, and Mn contained in the piezoelectric material is 0.5 mol % or less with respect to a total amount of Na, Ba, Nb, Ti, and Mn, a molar ratio x of Ti to a total molar amount of Nb and Ti is 0.05≤x≤0.12, a molar ratio y of Na to Nb is 0.93≤y≤0.98, a molar ratio z of Ba to Ti is 1.09≤z≤1.60, a molar ratio m of Mn to the total molar amount of Nb and Ti is 0.0006≤m≤0.0030, and 1.07≤y×z≤1.50 is satisfied.

First claim

What is claimed is:

1. A piezoelectric material comprising:
an oxide containing Na, Ba, Nb, Ti, and Mn,
wherein:
the oxide has a perovskite-type structure,
a total amount of metal elements other than Na, Ba, Nb, Ti, and Mn contained in the piezoelectric material is 0.5 mol % or less with respect to a total amount of Na, Ba, Nb, Ti, and Mn,
a molar ratio x of Ti to a total molar amount of Nb and Ti is 0.05≤x≤0.12, and a molar ratio y of Na to Nb is 0.93≤y≤0.98,
a molar ratio z of Ba to Ti is 1.09≤z≤1.60,
a molar ratio m of Mn to the total molar amount of Nb and Ti is 0.0006≤m≤0.0030, and
1.07≤y×z≤1.50 is satisfied,
wherein the piezoelectric material has a Curie temperature of 235° C. or more, and
wherein the piezoelectric material has a piezoelectric constant |d 31 | of 61.3 pm/V or more.

2. The piezoelectric material according to claim 1 , wherein a molar ratio b of Ba to a total molar amount of Na and Ba contained in the piezoelectric material is 0.08≤b≤0.13.

3. The piezoelectric material according to claim 1 , wherein a Pb component and a K component contained in the piezoelectric material are less than 1000 ppm in total.

4. A piezoelectric element comprising:
an electrode; and
a piezoelectric material portion,
wherein the piezoelectric material portion is formed of the piezoelectric material according to claim 1 .

5. The piezoelectric element according to claim 4 , wherein the piezoelectric material portion has polarization-electric field hysteresis characteristics, and
when coercive electric fields at two coercive electric field points in the hysteresis characteristics when an applied electric field is swept from −20 kV/cm to 20 kV/cm are referred to as Ec 1 and Ec 2 , a difference between |Ec 1 | and |Ec 2 | is 1.0 kV/cm or more.

6. The piezoelectric element according to claim 4 , wherein the electrode and the piezoelectric material portion are alternately stacked.

7. A liquid ejection head comprising:
a liquid chamber provided with a vibrating portion in which the piezoelectric element according to claim 4 is disposed; and
an ejection orifice communicating with the liquid chamber.

8. A liquid ejecting apparatus comprising:
a placement portion for a transfer object; and
the liquid ejection head according to claim 7 .

9. A vibration wave motor comprising:
a vibrating body in which the piezoelectric element according to claim 4 is disposed; and
a moving body in contact with the vibrating body.

10. An optical apparatus comprising:
the vibration wave motor according to claim 9 in a drive unit.

11. A vibration device comprising:
a vibrating body in which the piezoelectric element according to claim 4 is disposed on a diaphragm.

12. A dust removing apparatus comprising:
the vibration device according to claim 11 .

13. An image pickup apparatus comprising:
the dust removing apparatus according to claim 12 ; and
an image pickup element unit,
wherein the diaphragm of the dust removing apparatus is provided on a light-receiving surface side of the image pickup element unit.

14. An electronic equipment comprising:
the piezoelectric element according to claim 4 .

Assignees

• Canon Kk
• Fuji Chemical Kk

Inventors

• Kubota Makoto
• Oshima Kanako
• Yabuta Hisato
• Matsuda Takanori
• Ueda Miki
• Uchida Fumio
• Imai Hiroki
• Maeda Kenji
• Shimizu Chiemi

Classifications

• H02N2/103 Primary

  by pressing one or more vibrators against the rotor · CPC title

• B41J2/14233

  of film type, deformed by bending and disposed on a diaphragm · CPC title

• C04B35/495 Primary

  based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates · CPC title

• C04B35/62695

  Granulation or pelletising (devices for shaping artificial aggregates from ceramic mixtures B28B1/004) · CPC title

• C04B35/63416

  Polyvinylalcohols [PVA]; Polyvinylacetates · CPC title