Piezoelectric material, method of producing piezoelectric material, piezoelectric element, and electronic apparatus

Patent metadata

Field	Value
Publication number	US-10103314-B2
Application number	US-201615563899-A
Country	US
Kind code	B2
Filing date	Mar 24, 2016
Priority date	Apr 3, 2015
Publication date	Oct 16, 2018
Grant date	Oct 16, 2018

Abstract

The piezoelectric material of the present invention includes a main component composed of a perovskite-type metal oxide represented by Formula (1), at least one of Mn and Ni, and Mg. The content of Ni is 0 mol or more and 0.05 mol or less based on 1 mol of the perovskite-type metal oxide, and the content of Mn is 0 mol or more and 0.005 mol or less based on 1 mol of the perovskite-type metal oxide, provided that the content of Mn and the content of Ni are not simultaneously 0 mol. The content of Mg is 0.001 mol or more and 0.020 mol or less based on 1 mol of the perovskite-type metal oxide.
Formula (1): (Na x Ba 1-y )(Nb y Ti 1-y )O 3 (where x is 0.83 or more and 0.95 or less, y is 0.85 or more and 0.95 or less, and x/y is 0.95 or more and 1.05 or less).

First claim

The invention claimed is:

1. A piezoelectric material comprising:
a perovskite-type metal oxide represented by Formula (1): (Na x Ba 1-y )(Nb y Ti 1-y )O 3 ,
where x is 0.83 or more and 0.95 or less, y is 0.85 or more and 0.95 or less, and x/y is 0.95 or more and 1.05 or less;
at least one of Mn and Ni; and
Mg,
wherein
the content of Ni is 0.050 mol or less based on 1 mol of the perovskite-type metal oxide,
the content of Mn is 0.005 mol or less based on 1 mol of the perovskite-type metal oxide; and
the content of Mg is 0.001 mol or more and 0.020 mol or less based on 1 mol of the perovskite-type metal oxide.

2. The piezoelectric material according to claim 1 , wherein the piezoelectric material has crystal grains having an average equivalent circle diameter of 0.5 μm or more and 20 μm or less.

3. A method of producing the piezoelectric material according to claim 1 , the method comprising:
a step of firing a raw material powder at least containing Na, Nb, Ba, Ti, and Mg and containing at least one of Mn and Ni, wherein
the molar ratio of Na to Nb contained in the raw material powder is 0.95 or more and 1.10 or less.

4. The method according to claim 3 , wherein the firing temperature is 1200° C. or less.

5. A piezoelectric element comprising:
an electrode;
a piezoelectric material member;
wherein
the piezoelectric material member is the piezoelectric material according to claim 1 .

6. The piezoelectric element according to claim 5 , comprising:
a plurality of the piezoelectric material members; and
a plurality of the electrodes,
wherein
the piezoelectric material members and the electrodes are alternately stacked.

7. The piezoelectric element according to claim 6 , wherein
the electrode contains Ag and Pd at a weight ratio of Ag to Pd is 1.5 or more and 9.0 or less.

8. The piezoelectric element according to claim 6 , wherein
the electrode contains at least one of Ni and Cu.

9. A liquid discharge head comprising:
a liquid chamber including a vibratory unit including the piezoelectric element according to claim 5 ; and
a discharge port communicating with the liquid chamber.

10. A liquid discharge device comprising:
a transfer object-holding unit; and
the liquid discharge head according to claim 9 .

11. An ultrasonic motor comprising:
a vibratory component including the piezoelectric element according to claim 5 ; and
a movable component being in contact with the vibratory component.

12. An optical apparatus comprising:
a driving unit including the ultrasonic motor according to claim 11 .

13. A vibratory device comprising:
a vibratory component including a diaphragm provided with the piezoelectric element according to claim 5 .

14. A dust removing device comprising:
a vibratory unit including the vibratory device according to claim 13 .

15. An image pickup device at least comprising:
the dust removing device according to claim 14 ; and
an image pickup element unit, wherein
the dust removing device has a diaphragm on the light-receiving surface side of the image pickup element unit.

16. A piezoelectric acoustic component comprising:
the piezoelectric element according to claim 5 ; and
an electric circuit.

17. An electronic apparatus comprising:
the piezoelectric element according to claim 5 ; and
an electric circuit.

Assignees

• Canon Kk

Inventors

• Miura Kaoru
• Ueda Miki
• Watanabe Takayuki
• Murakami Shunsuke
• Hayashi Jumpei
• Kubota Makoto

Classifications

• C04B2235/662

  Annealing after sintering · CPC title

• C04B35/6264

  Mixing media, e.g. organic solvents · CPC title

• C04B35/62695

  Granulation or pelletising (devices for shaping artificial aggregates from ceramic mixtures B28B1/004) · CPC title

• C04B2235/3262

  Manganese oxides, manganates, rhenium oxides or oxide-forming salts thereof, e.g. MnO · CPC title

• C04B35/63416

  Polyvinylalcohols [PVA]; Polyvinylacetates · CPC title