Piezoelectric material and piezoelectric element using the same, and electronic apparatus using the piezoelectronic element

Patent metadata

Field	Value
Publication number	US-9660174-B2
Application number	US-201314420135-A
Country	US
Kind code	B2
Filing date	Aug 21, 2013
Priority date	Aug 27, 2012
Publication date	May 23, 2017
Grant date	May 23, 2017

Abstract

Provided is a lead-free piezoelectric material having a high Curie temperature, a satisfactory mechanical quality factor, and a satisfactory Young's modulus, and a piezoelectric element and a multilayered piezoelectric element each using the piezoelectric material. The piezoelectric material contains 0.04 mol % or more to 2.00 mol % or less of Cu with respect to 1 mol of a perovskite-type metal oxide represented by the following general formula: (K v Bi w Ba 1-v-w ) 1-y Na x (Nb y Ti 1-y )O 3 where relationships of 0<v≦0.39, 0<w≦0.39, 0.9≦w/v≦1.1, 0.80≦x≦0.95, and 0.85≦y≦0.95 are satisfied.

First claim

The invention claimed is:

1. A piezoelectric material comprising:
a perovskite-type metal oxide represented by general formula (1):
(K v Bi w Ba 1-v-w ) 1-y Na x (Nb y Ti 1-y )O 3   (1),

where relationships of 0<v≦0.39, 0<w≦0.39, 0.9≦w/v≦1.1, 0.80≦x<0.95, 0.85≦y≦0.95, and x<y are satisfied; and
0.04 mol % to 2.00 mol % of Cu with respect to 1 mol of the perovskite-type metal oxide.

2. The piezoelectric material according to claim 1 , wherein the piezoelectric material satisfies relationships of 0<v≦0.05 and 0<w≦0.05 in the general formula (1).

3. A piezoelectric element comprising:
a first electrode;
a piezoelectric material; and
a second electrode,
wherein the piezoelectric material comprises the piezoelectric material according to claim 1 .

4. A multilayered piezoelectric element comprising a piezoelectric material layer and an electrode layer comprising an internal electrode, which are alternately stacked,
wherein the piezoelectric material layer comprises the piezoelectric material according to claim 1 .

5. The multilayered piezoelectric element according to claim 4 , wherein the internal electrode comprises Ag and Pd, and a weight ratio M1/M2 of a content weight M1 of the Ag to a content weight M2 of the Pd satisfies a relationship of 1.5≦M1/M2≦9.0.

6. The multilayered piezoelectric element according to claim 4 , wherein the internal electrode contains at least one of Ni and Cu.

7. A manufacturing method for the multilayered piezoelectric element as defined in claim 4 , comprising:
a step (A) of obtaining a slurry by dispersing a metal compound containing at least one of K, Bi, Ba, Na, Nb, Ti, and Cu;
a step (B) of obtaining a compact from the slurry;
a step (C) of forming an electrode on the compact; and
a step (D) of obtaining the multilayered piezoelectric element by sintering a compact in which the compact containing the metal compound and the electrode are stacked alternately,
the step (D) being performed at a sintering temperature of 1,150° C. or less.

8. A liquid discharge head comprising:
a liquid chamber comprising a vibration portion including the piezoelectric element according to claim 3 ; and
an ejection port communicating to the liquid chamber.

9. A liquid discharge device comprising:
a conveyance portion for a recording medium; and
the liquid discharge head according to claim 8 .

10. An ultrasonic motor comprising:
a vibration body including the piezoelectric element according to claim 3 ; and
a moving body to be brought into contact with the vibration body.

11. An optical device comprising a drive portion including the ultrasonic motor according to claim 10 .

12. A vibration device comprising a vibration body including a diaphragm including the piezoelectric element according to claim 3 .

13. A dust removing device comprising a vibration portion including the vibration device according to claim 12 .

14. An imaging device comprising:
the dust removing device according to claim 13 ; and
an image pickup element unit,
wherein the diaphragm of the dust removing device is disposed on a light receiving plane side of the image pickup element unit.

15. An electronic apparatus, comprising a piezoelectric acoustic component including the piezoelectric element according to claim 3 .

16. A liquid discharge head comprising:
a liquid chamber comprising a vibration portion including the multilayered piezoelectric element according to claim 4 ; and
an ejection port communicating to the liquid chamber.

17. A liquid discharge device comprising:
a conveyance portion for a recording medium; and
the liquid discharge head according to claim 16 .

18. An ultrasonic motor comprising:
a vibration body including the multilayered piezoelectric element according to claim 4 ; and
a moving body to be brought into contact with the vibration body.

19. An optical device comprising a drive portion including the ultrasonic motor according to claim 18 .

20. A vibration device comprising a vibration body including a diaphragm including the multilayered piezoelectric element according to claim 4 .

21. A dust removing device comprising a vibration portion including the vibration device according to claim 20 .

22. An imaging device comprising:
the dust removing device according to claim 21 ; and
an image pickup element unit,
wherein the diaphragm of the dust removing device is disposed on a light receiving plane side of the image pickup element unit.

23. An electronic apparatus, comprising a piezoelectric acoustic component including the multilayered piezoelectric element according to claim 4 .

Assignees

• Canon Kk
• Univ Yamanashi

Inventors

• Murakami Shunsuke
• Watanabe Takayuki
• Ueda Miki
• Kumada Nobuhiro

Classifications

• C04B2235/77

  Density · CPC title

• B41J2202/03

  Specific materials used · CPC title

• C04B2235/3298

  Bismuth oxides, bismuthates or oxide forming salts thereof, e.g. zinc bismuthate · CPC title

• C04B35/6261

  Milling · CPC title

• C04B2235/3201

  Alkali metal oxides or oxide-forming salts thereof · CPC title