Piezoelectric material piezoelectric element and electronic apparatus

Patent metadata

Field	Value
Publication number	US-9960343-B2
Application number	US-201615280678-A
Country	US
Kind code	B2
Filing date	Sep 29, 2016
Priority date	Aug 27, 2012
Publication date	May 1, 2018
Grant date	May 1, 2018

Abstract

The present invention provides a piezoelectric material not containing lead and potassium, showing satisfactory insulation and piezoelectricity, and having a high Curie temperature. The invention relates to a piezoelectric material includes a main component containing a perovskite-type metal oxide represented by Formula (1): (Na x Ba 1-y )(Nb y Ti 1-y )O 3 (wherein, 0.80≤x≤0.94 and 0.83≤y≤0.94), and an additive component containing at least one element selected from Mn and Ni, wherein the content of the Ni is 0 mol or more and 0.05 mol or less based on 1 mol of the perovskite-type metal oxide, and the content of the Mn is 0 mol or more and 0.005 mol or less based on 1 mol of the perovskite-type metal oxide.

First claim

The invention claimed is:

1. A piezoelectric material comprising:
an oxide containing Na, Ba, Nb, and Ti; and
at least one element selected from Mn and Ni,
wherein x, which is a molar ratio of Na based on 1 mol of the oxide containing Na, Ba, Nb, and Ti, is in a range of 0.80≤x≤0.92,
y, which is a molar ratio of Nb based on a sum of numbers of moles of Nb and Ti, is in a range of 0.83≤y≤0.92, and
a molar ratio of Ba is represented, by use of the value of y, as 1−y, and
wherein the content of the Ni is 0.05 mol or less based on 1 mol of the oxide containing Na, Ba, Nb, and Ti, and
the content of the Mn is 0.005 mol or less based on 1 mol of the oxide containing Na, Ba, Nb, and Ti.

2. The piezoelectric material according to claim 1 , wherein
the oxide is represented by Formula (1): (Na x Ba 1-y )(Nb y Ti 1-y )O 3 , and
wherein 0.80≤x<0.92 and 0.83≤y<0.92.

3. The piezoelectric material according to claim 1 , further comprising 0.01 mol or less (excluding 0 mol) of Cu based on 1 mol of the oxide.

4. The piezoelectric material according to claim 1 , wherein a requirement of x<y is satisfied.

5. A piezoelectric ceramic comprising a piezoelectric material, wherein
the piezoelectric material comprises the piezoelectric material according to claim 1 as a main component; and
Mn is present inside crystal grains constituting the piezoelectric ceramic.

6. A piezoelectric ceramic comprising a piezoelectric material, wherein
the piezoelectric material comprises the piezoelectric material according to claim 1 as a main component; and
Ni is present at grain boundaries of crystal grains constituting the piezoelectric ceramic.

7. A piezoelectric element comprising:
a first electrode,
the piezoelectric material according to claim 1 , and
a second electrode.

8. A multilayered piezoelectric element comprising:
piezoelectric material layers; and
electrodes,
wherein the piezoelectric material layers and the electrodes are alternately stacked, and
the piezoelectric material layers contain the piezoelectric material according to claim 1 .

9. The multilayered piezoelectric element according to claim 8 , wherein
The electrode comprises Ag and Pd, and
the weight ratio M1/M2 of the weight content M1 of the Ag to the weight content M2 of the Pd satisfies 1.5≤M1/M2≤9.0.

10. The multilayered piezoelectric element according to claim 8 , wherein the electrode comprises at least one of Ni and Cu.

11. A method of producing a multilayered piezoelectric element according to claim 8 , comprising:
(A) preparing a slurry by dispersing a metal compound powder at containing Na, Nb, Ba, Ti, and at least one element selected from Ni and Mn;
(B) preparing a green compact from the slurry;
(C) forming a layered product by forming an electrode on the green compact and alternately stacking the green compacts containing the metal compound and the electrodes; and
(D) preparing a multilayered piezoelectric element by sintering the layered product, wherein
the sintering in the step (D) is performed at a sintering temperature of 1200° C. or less.

12. A liquid discharge head comprising a liquid chamber provided with a vibratory unit comprising the piezoelectric element according to claim 7 and a discharge port communicating with the liquid chamber.

13. A liquid discharge device comprising a conveying unit for conveying a recording medium and the liquid discharge head according to claim 12 .

14. An ultrasonic motor at comprising:
a vibratory component comprising the piezoelectric element according to claim 7 , and
a movable component being in contact with the vibratory component.

15. An optical apparatus comprising a driving unit provided with the ultrasonic motor according to claim 14 .

16. A vibratory device comprising a vibratory component provided with the piezoelectric element according to claim 7 .

17. A dust removing device comprising the vibratory device according to claim 16 .

18. An image pickup device at comprising:
the dust removing device according to claim 17 , and
an image pickup element unit,
wherein the dust removing device has a diaphragm disposed on the light-receiving surface side of the image pickup element unit.

19. A piezoelectric acoustic component comprising the piezoelectric element according to claim 7 .

20. A liquid discharge head comprising a liquid chamber provided with a vibratory unit comprising the multilayered piezoelectric element according to claim 8 , and a discharge port communicating with the liquid chamber.

21. A liquid discharge device comprising a conveying unit for conveying a recording medium and the liquid discharge head according to claim 20 .

22. An ultrasonic motor comprising:
a vibratory component comprising the multilayered piezoelectric element according to claim 8 , and
a movable component being in contact with the vibratory component.

23. An optical apparatus comprising a driving unit provided with the ultrasonic motor according to claim 22 .

24. A vibratory device comprising a vibratory component provided with the multilayered piezoelectric element according to claim 8 .

25. A dust removing device comprising the vibratory device according to claim 24 .

26. An image pickup device comprising:
the dust removing device according to claim 25 , and
an image pickup element unit,
wherein the dust removing device has a diaphragm disposed on the light-receiving surface side of the image pickup element unit.

27. A piezoelectric acoustic component comprising the multilayered piezoelectric element according to claim 8 .

28. An electronic apparatus comprising the piezoelectric element according to claim 7 .

29. An electronic apparatus comprising the multilayered piezoelectric element according to claim 8 .

Assignees

• Canon Kk

Inventors

• Ueda Miki
• Watanabe Takayuki
• Murakami Shunsuke

Classifications

• C04B2235/81

  Materials characterised by the absence of phases other than the main phase, i.e. single phase materials · CPC title

• H02N2/163

  Motors with ring stator · CPC title

• C04B2235/3236

  Alkaline earth titanates · CPC title

• C04B2235/768

  Perovskite structure ABO3 · CPC title

• C04B2235/3262

  Manganese oxides, manganates, rhenium oxides or oxide-forming salts thereof, e.g. MnO · CPC title