Piezoelectric material, piezoelectric element, and electronic apparatus

Patent metadata

Field	Value
Publication number	US-10516093-B2
Application number	US-201815923843-A
Country	US
Kind code	B2
Filing date	Mar 16, 2018
Priority date	Aug 27, 2012
Publication date	Dec 24, 2019
Grant date	Dec 24, 2019

Abstract

The present invention provides a piezoelectric material not containing lead and potassium, showing satisfactory insulation and piezoelectricity, and having a high Curie temperature. The invention relates to a piezoelectric material includes a main component containing a perovskite-type metal oxide represented by Formula (1): (NaxBa1-y)(NbyTi1-y)O3 (wherein, 0.80≤x≤0.94 and 0.83≤y≤0.94), and an additive component containing at least one element selected from Mn and Ni, wherein the content of the Ni is 0 mol or more and 0.05 mol or less based on 1 mol of the perovskite-type metal oxide, and the content of the Mn is 0 mol or more and 0.005 mol or less based on 1 mol of the perovskite-type metal oxide.

First claim

The invention claimed is:

1. A piezoelectric material comprising:
an oxide containing Na, Ba, Nb, and Ti; and
at least one element selected from Mn and Ni,
wherein x, which is a molar ratio of Na based on a sum of numbers of moles of Nb and Ti, is in a range of 0.80≤x≤0.94,
y, which is a molar ratio of Nb based on the sum, is in a range of 0.83≤y≤0.94, and
a molar ratio of Ba based on the sum is 0.06 or more and 0.17 or less, and
wherein a requirement of x<y is satisfied.

2. The piezoelectric material according to claim 1 , wherein
the oxide is represented by Formula (1): (Na x Ba 1-y )(Nb y Ti 1-y )O 3 , and
wherein 0.80≤x≤0.94 and 0.83≤y≤0.94.

3. The piezoelectric material according to claim 1 , further comprising 0.01 mol or less of Cu based on the sum.

4. The piezoelectric material according to claim 1 ,
wherein the content of the Ni is 0.05 mol or less based on the sum, and
the content of the Mn is 0.005 mol or less based on the sum.

5. A piezoelectric ceramic comprising a piezoelectric material, wherein
the piezoelectric material comprises the piezoelectric material according to claim 1 ; and
Mn is present inside crystal grains constituting the piezoelectric ceramic.

6. A piezoelectric ceramic comprising a piezoelectric material, wherein
the piezoelectric material comprises the piezoelectric material according to claim 1 ; and
Ni is present at grain boundaries of crystal grains constituting the piezoelectric ceramic.

7. A piezoelectric element comprising:
an electrode; and
the piezoelectric material according to claim 1 .

8. The piezoelectric element according to claim 7 ,
wherein the piezoelectric material and the electrode are alternately stacked.

9. The piezoelectric element according to claim 8 , wherein
the electrode comprises Ag and Pd, and
the weight ratio M 1 /M 2 of the weight content M 1 of the Ag to the weight content M 2 of the Pd satisfies 1.5≤M 1 /M 2 ≤9.0.

10. The piezoelectric element according to claim 8 , wherein the electrode comprises at least one of Ni and Cu.

11. A method of producing the piezoelectric element according to claim 8 , comprising:
(A) preparing a slurry by dispersing a metal compound powder containing Na, Nb, Ba, Ti, and at least one element selected from Ni and Mn;
(B) preparing a green compact from the slurry;
(C) forming a layered product by forming an electrode on the green compact and alternately stacking the green compacts containing the metal compound and the electrodes; and
(D) preparing a multilayered piezoelectric element by sintering the layered product, wherein
the sintering in the step (D) is performed at a sintering temperature of 1200° C. or less.

12. A liquid discharge head comprising a liquid chamber provided with a vibratory unit comprising the piezoelectric element according to claim 7 and a discharge port communicating with the liquid chamber.

13. A liquid discharge device comprising a conveying unit for conveying a recording medium and the liquid discharge head according to claim 12 .

14. An ultrasonic motor comprising:
a first component comprising the piezoelectric element according to claim 7 , and a second component being in contact with the first component.

15. An optical apparatus comprising a driving unit provided with the ultrasonic motor according to claim 14 .

16. A vibratory device comprising a first component provided with the piezoelectric element according to claim 7 .

17. A dust removing device comprising a vibratory unit provided with the vibratory device according to claim 16 .

18. An image pickup device comprising:
the dust removing device according to claim 17 , and
an image pickup element unit,
wherein the dust removing device has a diaphragm disposed on the light-receiving surface side of the image pickup element unit.

19. A piezoelectric acoustic component comprising the piezoelectric element according to claim 7 .

20. An electronic apparatus comprising the piezoelectric element according to claim 7 .

21. A piezoelectric material comprising:
an oxide containing Na, Ba, Nb, and Ti; and
at least one element selected from Mn and Ni,
wherein x, which is a molar ratio of Na based on a sum of numbers of moles of Nb and Ti, is in a range of 0.80≤x<0.92,
y, which is a molar ratio of Nb based on the sum, is in a range of 0.80≤y <0.92, and
a molar ratio of Ba based on the sum is more than 0.08 and 0.20 or less, and wherein the content of the Ni is 0.05 mol or less based on the sum, and the content of the Mn is 0.005 mol or less based on the sum.

22. The piezoelectric material according to claim 21 ,
wherein the oxide is represented by Formula (1): (Na x Ba 1-y )(Nb y Ti 1-y )O 3 , and wherein 0.80≤x<0.92 and 0.83≤y<0.92.

23. The piezoelectric material according to claim 21 , further comprising 0.01 mol or less of Cu based on the sum.

24. The piezoelectric material according to claim 21 , wherein a requirement of x<y is satisfied.

25. A piezoelectric ceramic comprising a piezoelectric material,
wherein the piezoelectric material comprises the piezoelectric material according to claim 21 ; and
Mn is present inside crystal grains constituting the piezoelectric ceramic.

26. A piezoelectric ceramic comprising a piezoelectric material, wherein
the piezoelectric material comprises the piezoelectric material according to claim 21 ; and
Ni is present at grain boundaries of crystal grains constituting the piezoelectric ceramic.

27. A piezoelectric element comprising:
an electrode; and
the piezoelectric material according to claim 21 .

28. The piezoelectric element according to claim 27 ,
wherein the piezoelectric material and the electrode are alternately stacked.

29. The piezoelectric element according to claim 28 , wherein
the electrode comprises Ag and Pd, and
the weight ratio M 1 /M 2 of the weight content M 1 of the Ag to the weight content M 2 of the Pd satisfies 1.5≤M 1 /M 2 ≤ 9 . 0 .

30. The piezoelectric element according to claim 28 , wherein the electrode comprises at least one of Ni and Cu.

31. A method of producing the piezoelectric element according to claim 28 , comprising:
(A) preparing a slurry by dispersing a metal compound powder containing Na, Nb, Ba, Ti, and at least one element selected from Ni and Mn;
(B) preparing a green compact from the slurry;
(C) forming a layered product by forming an electrode on the green compact and alternately stacking the green compacts containing the metal compound and the electrodes; and
(D) preparing a multilayered piezoelectric element by sintering the layered product, wherein
the sintering in the step (D) is performed at a sintering temperature of 1200° C. or less.

32. A liquid discharge head comprising a liquid chamber provided with a vibratory unit comprising the piezoelectric element according to claim 27 and a discharge port communicating with the liquid chamber.

33. A liquid discharge device comprising a conveying unit for conveying a recording medium and the liquid discharge head according to claim 32 .

34. An ultrasonic motor comprising:
a first component comprising the piezoelectric element according to claim 27 , and a second component being in contact with the first component.

35. An o

Assignees

• Canon Kk

Inventors

• Ueda Miki
• Watanabe Takayuki
• Murakami Shunsuke

Classifications

• C04B35/495 Primary

  based on vanadium, niobium, tantalum, molybdenum or tungsten oxides or solid solutions thereof with other oxides, e.g. vanadates, niobates, tantalates, molybdates or tungstates · CPC title

• C04B2235/449

  Organic acids, e.g. EDTA, citrate, acetate, oxalate · CPC title

• H02N2/163

  Motors with ring stator · CPC title

• C04B2235/3201

  Alkali metal oxides or oxide-forming salts thereof · CPC title

• H02N2/10

  producing rotary motion, e.g. rotary motors · CPC title