Piezoelectric material, piezoelectric element, and electronic apparatus

Patent metadata

Field	Value
Publication number	US-10074796-B2
Application number	US-201615563892-A
Country	US
Kind code	B2
Filing date	Mar 24, 2016
Priority date	Apr 3, 2015
Publication date	Sep 11, 2018
Grant date	Sep 11, 2018

Abstract

Formula (1): (NaxBa1-y)(NbyTi1-y)O3 (where x is 0.83 or more and 0.95 or less, y is 0.85 or more and 0.95 or less, and x/y is 0.95 or more and 1.05 or less).

First claim

The invention claimed is:

1. A piezoelectric material comprising:
a perovskite-type metal oxide represented by Formula (1): (Na x Ba 1-y )(Nb y Ti 1-y )O 3 , where x is 0.83 or more and 0.95 or less, y is 0.85 or more and 0.95 or less, and x/y is 0.95 or more and 1.05 or less;
Zn; and
Mg,
wherein
the content of Zn is 0.005 mol or more and 0.050 mol or less based on 1 mol of the perovskite-type metal oxide; and
the content of Mg is 0.001 mol or more and 0.020 mol or less based on 1 mol of the perovskite-type metal oxide.

2. The piezoelectric material according to claim 1 , wherein the piezoelectric material is constituted by crystal grains having an average equivalent circle diameter of 0.5 μm or more and 20 μm or less.

3. A method of producing the piezoelectric material according to claim 1 , the method comprising:
a step of firing a raw material powder at least containing Na, Nb, Ba, Ti, Zn, and Mg, wherein
the molar ratio of Na to Nb contained the raw material powder is 0.95 or more and 1.10 or less.

4. The method according to claim 3 , wherein the firing temperature is 1000° C. or more and 1150° C. or less.

5. A piezoelectric element comprising:
an electrode;
a piezoelectric material member;
wherein
the piezoelectric material member is the piezoelectric material according to claim 1 .

6. The piezoelectric element according to claim 5 comprising:
a plurality of the piezoelectric material; and
a plurality of the electrodes,
wherein
the piezoelectric material and the electrodes are alternately stacked.

7. The piezoelectric element according to claim 6 , wherein
the electrode contains Ag and Pd at a weight ratio M1/M2 of the weight M1 of Ag to the weight M2 of Pd is 1.5 or more and 9.0 or less.

8. The piezoelectric element according to claim 6 , wherein
the electrode contains at least one of Ni and Cu.

9. A liquid discharge head comprising:
a liquid chamber including a vibratory unit including the piezoelectric element according to claim 5 ; and
a discharge port communicating with the liquid chamber.

10. A liquid discharge device comprising:
a transfer object-holding unit; and
the liquid discharge head according to claim 9 .

11. An ultrasonic motor comprising:
a vibratory component including the piezoelectric element according to claim 5 ; and
a movable component being in contact with the vibratory component.

12. An optical apparatus comprising:
a driving unit including the ultrasonic motor according to claim 11 .

13. A vibratory device comprising:
a vibratory component including a diaphragm provided with the piezoelectric element according to claim 5 .

14. A dust removing device comprising:
a vibratory unit including the vibratory device according to claim 13 .

15. An image pickup device comprising:
the dust removing device according to claim 14 ; and
an image pickup element unit, wherein
the dust removing device has a diaphragm on the light-receiving surface side of the image pickup element unit.

16. A piezoelectric acoustic component comprising:
the piezoelectric element according to claim 5 .

17. An electronic apparatus comprising:
the piezoelectric element according to claim 5 ; and
an electric circuit.

Assignees

• Canon Kk

Inventors

• Ueda Miki
• Miura Kaoru
• Watanabe Takayuki
• Murakami Shunsuke
• Hayashi Jumpei
• Kubota Makoto

Classifications

• H01L41/083

  Electricity · mapped topic

• C04B35/62695

  Granulation or pelletising (devices for shaping artificial aggregates from ceramic mixtures B28B1/004) · CPC title

• H01L41/1873 Primary

  Electricity · mapped topic

• B08B7/028

  Using ultrasounds · CPC title

• H02N2/106

  Langevin motors · CPC title