Composition for layered transition metal chalcogenide compound layer and method of forming layered transition metal chalcogenide compound layer
US-10079144-B2 · Sep 18, 2018 · US
Molybdenum(0) precursors for deposition of molybdenum films
US11760768B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11760768-B2 |
| Application number | US-202117236020-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 21, 2021 |
| Priority date | Apr 21, 2021 |
| Publication date | Sep 19, 2023 |
| Grant date | Sep 19, 2023 |
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- Title
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Abstract
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Molybdenum(0) and coordination complexes are described. Methods for depositing molybdenum-containing films on a substrate are described. The substrate is exposed to a molybdenum precursor and a reactant to form the molybdenum-containing film (e.g., elemental molybdenum, molybdenum oxide, molybdenum carbide, molybdenum silicide, molybdenum disulfide, molybdenum nitride). The exposures can be sequential or simultaneous.
First claim
Opening claim text (preview).
What is claimed is: 1. A metal coordination complex comprising molybdenum(0) and having a structure selected from the group consisting of: Mo(CO) n (CNMe) (6-n) wherein n is from 1 to 3, Mo(CO) n (Py) (6-n) wherein n is from 1 to 3, Mo(CO)n(SMe 2 ) (6-n) wherein n is from 1 to 3, wherein n is from 1 to 3, wherein the metal coordination complex is substantially free of halogen and substantially free of a Mo-O bond, and wherein L is selected from the group consisting of a 2n-electron donor neutral monodentate ligand, a 2n-electron donor neutral bidentate ligand, a 2n-electron donor neutral tridentate ligand, and combinations thereof.
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Classifications
- C07F11/00Primary
Compounds containing elements of Groups 6 or 16 of the Periodic Table · CPC title
- C07F11/005Primary
compounds without a metal-carbon linkage · CPC title
Complexes or chelates of phosphines with metallic compounds or metals · CPC title
characterized by the use of precursors specially adapted for ALD · CPC title
from metallo-organic compounds · CPC title
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- What does patent US11760768B2 cover?
- Molybdenum(0) and coordination complexes are described. Methods for depositing molybdenum-containing films on a substrate are described. The substrate is exposed to a molybdenum precursor and a reactant to form the molybdenum-containing film (e.g., elemental molybdenum, molybdenum oxide, molybdenum carbide, molybdenum silicide, molybdenum disulfide, molybdenum nitride). The exposures can be seq…
- Who is the assignee on this patent?
- Applied Materials Inc
- What technology area does this patent fall under?
- Primary CPC classification C07F11/00. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Sep 19 2023 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 12 related publications on this page (citations in our corpus or others sharing the same primary CPC).