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Molybdenum (IV) amide precursors and use thereof in atomic layer deposition
US9802220B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9802220-B2 |
| Application number | US-201113817591-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 25, 2011 |
| Priority date | Aug 27, 2010 |
| Publication date | Oct 31, 2017 |
| Grant date | Oct 31, 2017 |
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Abstract
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Molybdenum (IV) amide complexes are disclosed herein corresponding in structure to Formula (I): wherein: L is —NR 1 R 2 ; R 1 and R 2 are C 1 -C 6 -alkyl or hydrogen; R is C 1 -C 6 -alkyl; and n is zero, 1, 2 or 3. Further, methods of forming MoO 2 films by atomic layer deposition (ALD) using Formula (I) complexes and Mo[N(Me)(Et)] 4 are disclosed herein.
First claim
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What is claimed is: 1. A method of forming a MoO 2 film by atomic layer deposition, the method comprising delivering Mo[N(Me)(Et)] 4 to a substrate.
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Classifications
of refractory metals or yttrium · CPC title
- C07F11/00Primary
Compounds containing elements of Groups 6 or 16 of the Periodic Table · CPC title
- B05D1/60Primary
Deposition of organic layers from vapour phase (vapour phase deposition in general C23C14/00, C23C16/00) · CPC title
- C07F17/00Primary
Metallocenes · CPC title
Atomic layer deposition [ALD] · CPC title
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- What does patent US9802220B2 cover?
- Molybdenum (IV) amide complexes are disclosed herein corresponding in structure to Formula (I): wherein: L is —NR 1 R 2 ; R 1 and R 2 are C 1 -C 6 -alkyl or hydrogen; R is C 1 -C 6 -alkyl; and n is zero, 1, 2 or 3. Further, methods of forming MoO 2 films by atomic layer deposition (ALD) using Formula (I) complexes and Mo[N(Me)(Et)] 4 are disclosed herein.
- Who is the assignee on this patent?
- Heys Peter Nicholas, Odedra Rajesh, Hindley Sarah Louise, and 1 more
- What technology area does this patent fall under?
- Primary CPC classification C07F11/00. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Oct 31 2017 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).