Horizontal substrate boat

Patent metadata

Field	Value
Publication number	US-11521876-B2
Application number	US-201916293471-A
Country	US
Kind code	B2
Filing date	Mar 5, 2019
Priority date	Mar 7, 2018
Publication date	Dec 6, 2022
Grant date	Dec 6, 2022

Abstract

A horizontal substrate carrier is provided, for example a carrier for holding semiconductor substrates during horizontal thermal processing. The horizontal substrate carrier has asymmetrically placed support rails. One side of the horizontal substrate carrier has no upper rail while the other side of the horizontal substrate carrier has an upper rail placed at a relatively high location, for example at an angular location of 60° or more, more preferably of 70° or more, and most preferably at 90°. The side without an upper rail may be used for robotic loading of the horizontal substrate carrier. In a preferred embodiment, only three rails are provided: one upper rail on one side and two lower rails. The use and placement of these three rails can hold the substrate in precise uniform locations, minimize substrate movement, and minimize particle generation, all while allowing for easy robotic access.

First claim

What is claimed is:

1. A horizontal substrate carrier, comprising:
a plurality of horizontal rails, the horizontal rails extending along the horizontal substrate carrier horizontally;
a plurality of slots for holding a substrate, the slots located in the plurality of horizontal rails, the plurality of horizontal rails arranged so that only slots of three horizontal rails will engage a substrate carried in the horizontal substrate carrier, wherein the plurality of horizontal rails are asymmetrical such that a first side of the horizontal substrate carrier has a first rail at a first angular position of 60 degrees or more, and a second side of the horizontal substrate carrier has a second rail at a second angular position of less than 60 degrees, the first and second angular positions being relative to a vertical line extending from a central horizontal axis of the horizontal substrate carrier to a bottom of the horizontal substrate carrier, the central horizontal axis of the horizontal substrate carrier being a reference axis of rotation for the first and second angular positions; and
a counterbalance located on the second side of the horizontal substrate carrier.

2. The horizontal substrate carrier of claim 1 , wherein the plurality of horizontal rails further comprise a third rail on the first side of the horizontal substrate carrier at a third angular position of less than 60 degrees.

3. The horizontal substrate carrier of claim 1 , wherein the counterbalance is connected to the second rail.

4. The horizontal substrate carrier of claim 1 , wherein the first rail is at an angular position of 70 to 90 degrees around the reference axis and relative to the vertical line.

5. The horizontal substrate carrier of claim 4 , further comprising a third rail on the first side of the horizontal substrate carrier, wherein the second and third rails are at angular positions of 45 degrees or less around the reference axis and relative to the vertical line.

6. The horizontal substrate carrier of claim 1 , wherein the configuration of the plurality of slots and the plurality of horizontal rails provides for holding the substrate with a vertical deviation of less than +/−0.1 degrees.

7. A horizontal substrate carrier, comprising:
a plurality of horizontal rails, the plurality of horizontal rails extending along the horizontal substrate carrier horizontally between a first end support structure at a first end of the horizontal substrate carrier and a second end support structure at a second end of the horizontal substrate carrier, first ends of the plurality of horizontal rails connected to the first end support structure and second ends of the plurality of horizontal rails connected to the second end support structure, the plurality of horizontal rails comprising,
a first lower rail on a first side of the horizontal substrate carrier,
a second lower rail on a second side of the horizontal substrate carrier, and
a first upper rail on a first side of the horizontal substrate carrier,

wherein the plurality of horizontal rails are configured so that only three horizontal rails engage a substrate when the substrate is carried in the horizontal substrate carrier,
wherein the first upper rail being at an angular position of 60 degrees or more relative to a vertical line extending from a central horizontal axis of the horizontal substrate carrier to a bottom of the horizontal substrate carrier, the central horizontal axis of the horizontal substrate carrier being a reference axis of rotation for the angular position, and wherein the first lower rail and the second lower rail both being at angular positions of 45 degrees or less around the reference axis relative to the vertical line, and
wherein none of the plurality of horizontal rails is located on the second side of the horizontal substrate carrier at angular positions of 45 degrees or more around the reference axis; and
a counterbalance located on the second side of the horizontal substrate carrier.

8. The horizontal substrate carrier of claim 7 , the first upper rail being at an angular position of 70 to 90 degrees around the reference axis relative to the vertical line.

9. The horizontal substrate carrier of claim 8 , the first lower rail and the second lower rail both being at angular positions between 25 to 30 degrees around the reference axis relative to the vertical line.

10. The horizontal substrate carrier of claim 9 , the first upper rail being at an angular position of 90 degrees around the reference axis relative to the vertical line.

11. The horizontal substrate carrier of claim 7 , wherein the counterbalance is connected to the second lower rail.

12. The horizontal substrate carrier of claim 7 , wherein the counterbalance is connected to the first end support structure and the second end support structure.

13. A horizontal substrate carrier, comprising:
a plurality of horizontal rails, the plurality of horizontal rails extending along the horizontal substrate carrier horizontally between a first end support structure at a first end of the horizontal substrate carrier and a second end support structure at a second end of the horizontal substrate carrier, first ends of the plurality of horizontal rails connected to the first end support structure and second ends of the plurality of horizontal rails connected to the second end support structure, the plurality of horizontal rails comprising,
a first lower rail on a first side of the horizontal substrate carrier,
a second lower rail on a second side of the horizontal substrate carrier, and
a first upper rail on a first side of the horizontal substrate carrier;

wherein the second lower rail is heavier than the first lower rail to offset a combined weight of the first lower rail and the first upper rail,
wherein none of the plurality of horizontal rails is located on the second side of the horizontal substrate carrier at angular positions of 45 degrees or more relative to a vertical line extending from a central horizontal axis of the horizontal substrate carrier to a bottom of the horizontal substrate carrier, the central horizontal axis of the horizontal substrate carrier being a reference axis of rotation for the angular position.

14. The horizontal substrate carrier of claim 13 , wherein the first upper rail is at an angular position of 70 to 90 degrees relative to the vertical line.

15. The horizontal substrate carrier of claim 14 , wherein the first lower rail and the second lower rail both are at angular positions of 25 to 30 degrees relative to the vertical line.

16. A substrate processing system, comprising:
a furnace having a horizontal heating chamber; and
a horizontal substrate carrier within the horizontal heating chamber, the horizontal substrate carrier, comprising:
a plurality of horizontal rails, the horizontal rails extending along the horizontal substrate carrier horizontally;
a plurality of slots for holding a substrate, the slots located in the plurality of horizontal rails, the plurality of horizontal rails arranged so that only slots of three horizontal rails will engage a substrate carried in the horizontal substrate carrier;
wherein the plurality of horizontal rails are asymmetrical such that a first side of the horizontal substrate carrier has a first rail at a first angular position of 60 degrees or more, and a second side of the horizontal substrate carrier does not have a corresponding second rail at a second angular position on the second side of the horizontal substrate carrier corresponding to the first angular position, the first and second angular positions being

Assignees

• Tokyo Electron Ltd

Inventors

• Domsa Ioan
• Colgan Ian
• Saito Makoto
• Yamazaki Mitsuru
• Eyres George

Classifications

• H10P72/0434

  mainly by convection · CPC title

• H10P72/13 Primary

  Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements · CPC title

• H10P72/15 Primary

  Horizontal carrier comprising wall type elements whereby the substrates are vertically supported, e.g. comprising sidewalls · CPC title

• H01L21/67313

  Electricity · mapped topic

• H01L21/67326 Primary

  Electricity · mapped topic