Substrate carrier system for moving substrates in a vertical oven and method for processing substrates

Patent metadata

Field	Value
Publication number	US-9530678-B2
Application number	US-201414444889-A
Country	US
Kind code	B2
Filing date	Jul 28, 2014
Priority date	Jul 28, 2014
Publication date	Dec 27, 2016
Grant date	Dec 27, 2016

Abstract

A substrate carrier system for moving substrates in a vertical oven and a method for processing substrates are disclosed. In some embodiments, a method for oxidizing material or depositing material includes carrying a plurality of substrates by a substrate carrier and inserting the substrate carrier into a vertical oven, wherein the plurality of substrates are held by the substrate carrier in predefined positions, wherein an angle measured between a main surface of a substrate of the plurality of substrates at one of the predefined positions and a vertical direction is less than 20 degrees. The method further includes oxidizing a material on the plurality of substrates or depositing a material onto the plurality of substrates.

First claim

What is claimed is:

1. A method for oxidizing material or depositing material, the method comprising:
carrying a plurality of substrates by a substrate carrier;
inserting the substrate carrier into a vertical oven, wherein the plurality of substrates are held by the substrate carrier in predefined positions, wherein an angle measured between a main surface of a substrate of the plurality of substrates at one of the predefined positions and a vertical direction is less than 20 degrees; and
oxidizing a material on the plurality of substrates or depositing a material onto the plurality of substrates.

2. The method according to claim 1 , wherein the angle measured between the main surface of the substrate of the plurality of substrates at one of the predefined positions and the vertical direction is less than 3 degrees.

3. The method according to claim 1 , wherein oxidizing the material on the plurality of substrates or depositing the material onto the plurality of substrates comprises heating the vertical oven to a temperature above 80% of a melting point of the substrate of the plurality of substrates.

4. The method according to claim 3 , wherein the substrates comprise a material selected from the group consisting of silicon-based semiconductor substrates, silicon carbide-based semiconductor substrates, gallium arsenide-based semiconductor substrates, gallium nitride-based semiconductor substrates, aluminum gallium nitride-based semiconductor substrates and gallium nitride-based semiconductor substrates.

5. The method according to claim 1 , wherein depositing the material onto the plurality of substrates comprises depositing the material selected from the group consisting of tetraethyl orthosilicate, polysilicon, doped amorphous silicon, undoped amorphous silicon and silicon nitride.

6. The method according to claim 1 , wherein main surfaces of the plurality of substrates carried by the substrate carrier at the predefined positions are substantially parallel to each other.

7. The method according to claim 1 , further comprising:
receiving the substrate carrier into a holding position in a substrate carrier support structure in a direction substantially orthogonal to an insertion direction of the substrate carrier support structure into the vertical oven; and
inserting the substrate carrier support structure along the insertion direction into the vertical oven.

8. The method according to claim 7 , wherein the substrate carrier and the substrate carrier support structure comprise quartz, aluminum oxide, silicon or silicon carbide.

9. The method according to claim 7 , further comprising:
guiding the substrate carrier in a direction substantially orthogonal to the insertion direction towards the holding position by engaging a first lateral guide and a second lateral guide located respectively on a first lateral side and an opposite second lateral side of the substrate carrier with a first lateral guide and a second lateral guide located respectively in a first longitudinal support structure and a second longitudinal support structure of the substrate carrier support structure; and
receiving the substrate carrier into the holding position by stopping the insertion of the substrate carrier at the holding position by a third longitudinal support structure of the substrate carrier support structure.

10. The method according to claim 7 , further comprising preventing a movement of the substrate carrier at the holding position in a direction by fastening a fastening structure located on a third lateral side of the substrate carrier to a third longitudinal support structure.

11. The method according to claim 1 , wherein the substrates of the plurality of substrates are substantially equal substrates.

12. The method according to claim 1 , wherein the vertical direction is substantially parallel to a vertical axis of the vertical oven or a direction of gravity.

13. A method for forming a material layer on a substrate, the method comprising:
inserting the substrate into a vertical oven, wherein an angle measured between a main surface of the substrate and a vertical direction is less than 20 degrees; and
forming the material layer on the substrate.

14. The method according to claim 13 , wherein forming the material layer on the substrate comprises oxidizing or depositing material onto the substrate.

15. A method for oxidizing material or depositing material, the method comprising:
carrying a plurality of substrates by a substrate carrier;
receiving the substrate carrier into a holding position in a substrate carrier support structure in a direction substantially orthogonal to an insertion direction of the substrate carrier support structure into an vertical oven;
inserting the substrate carrier support structure along the insertion direction into the vertical oven, wherein the plurality of substrates are held by the substrate carrier in predefined positions, wherein an angle measured between a main surface of a substrate of the plurality of substrates at one of the predefined positions and a vertical direction is less than 20 degrees; and
oxidizing a material on the plurality of substrates or depositing a material onto the plurality of substrates.

Assignees

• Infineon Technologies Ag

Inventors

• Stefaner Andreas
• Schieder Heimo
• Denifl Guenter
• Moennich Roland
• Winkler Anton Gernot

Classifications

• H10P72/3312

  Vertical transfer of a batch of workpieces · CPC title

• H10P72/3311 Primary

  Horizontal transfer of a batch of workpieces · CPC title

• H10P72/127

  characterised by the substrate support · CPC title

• H10P72/13

  Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements · CPC title

• H10P14/6334

  using decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition (deposition by physical ablation of a target H10P14/6329) · CPC title