Fluid composition and method for conducting a material removing operation

Patent metadata

Field	Value
Publication number	US-11518913-B2
Application number	US-202017004988-A
Country	US
Kind code	B2
Filing date	Aug 27, 2020
Priority date	Aug 30, 2019
Publication date	Dec 6, 2022
Grant date	Dec 6, 2022

Abstract

A fluid composition suitable for chemical mechanical polishing a substrate can in include a multi-valent metal borate, at least one oxidizer, and a solvent. The fluid composition can be essentially free of abrasive particles and may achieve a high material removal rate and excellent surface finish.

First claim

What is claimed is:

1. A fluid composition comprising: a multi-valent metal borate; at least one oxidizing agent; and a solvent, wherein
the multi-valent metal borate includes iron(III)borate, copper(II)borate, or a combination thereof;
the oxidizing agent includes a permanganate salt in an amount of at least 1 wt % to not greater than 20 wt % based on the total weight of the fluid composition; and
a pH of the fluid composition is not greater than 5.

2. The fluid composition of claim 1 , wherein the multi-valent metal borate consists essentially of iron(III)borate.

3. The fluid composition of claim 1 , wherein the fluid composition is essentially free of abrasive particles.

4. The fluid composition of claim 3 , wherein an amount of the multi-valent metal borate is at least 0.01 wt and not greater than 5 wt % based on the total weight of the fluid composition.

5. The fluid composition of claim 1 , wherein a molar ratio of multi-valent metal-ions to boron of the fluid composition ranges from 1:1 to 1:10.

6. The fluid composition of claim 1 , wherein the oxidizing agent includes potassium permanganate.

7. The fluid composition of claim 1 , wherein the fluid composition is adapted for chemical mechanical polishing of a substrate.

8. The fluid composition of claim 7 , wherein the substrate includes a group III-V compound or a group IV-IV compound.

9. A method of polishing a substrate, comprising:
providing a fluid composition, wherein the fluid composition comprises a multi-valent metal borate, at least one oxidizing agent and water;
bringing the fluid composition in contact with the substrate and a polishing pad; and
polishing the substrate,

wherein the multi-valent metal borate includes iron(III)borate, copper(II)borate, or a combination thereof; and the oxidizing agent includes a permanganate salt in an amount of at least 1 wt % and not greater than 10 wt %, and a pH of the fluid composition is not greater than 5.

10. The method of claim 9 , wherein the fluid composition is essentially free of abrasive particles.

11. The method of claim 9 , wherein the substrate includes a metal, a metal alloy, a polymer, a group III-V compound, or a group IV-IV compound.

12. The method of claim 11 , wherein the substrate includes silicon carbide.

13. A kit adapted for preparing a fluid for polishing a substrate, the kit comprising a first package and a second package, wherein the first package comprises a multi-valent metal salt, wherein an anion of the multi-valent metal salt includes nitrate, chloride, bromide, iodide, sulfate, phosphate, or any combination thereof;
the second package comprises boric acid;
the first package or the second package further comprise at least one oxidizing agent, the oxidizing agent including a permanganate salt; and
the kit is adapted for preparing a fluid for polishing a substrate

wherein an amount of the permanganate salt of the fluid after combining the first and the second package is at least 1 wt % and not greater than 10 wt %, and a pH of the fluid is not greater than 5.

14. The kit of claim 13 , wherein the first package and the second package are essentially free of abrasive particles.

15. The kit of claim 13 , wherein the second package comprises the at least one oxidizing agent.

16. The kit of claim 13 , wherein the kit is adapted that after combining package 1 and package 2 a multi-valent metal borate is formed in-situ, and wherein the obtained fluid composition is essentially free of abrasive particles.

17. The kit of claim 13 , wherein the first package and the second package are essentially free of abrasive particles.

Assignees

• Saint Gobain Ceramics

Inventors

• Fu Lin
• Sherlock Jason A
• Bui Long Huy
• Ward Douglas E

Classifications

• C01B35/127

  of heavy metals · CPC title

• C23F3/06

  with acidic solutions · CPC title

• C23F3/03

  with acidic solutions · CPC title

• C23F3/04

  Heavy metals · CPC title

• C09G1/04 Primary

  Aqueous dispersions (C09G1/02 takes precedence) · CPC title