Method of polishing group III-V materials

Patent metadata

Field	Value
Publication number	US-10418248-B2
Application number	US-201715433068-A
Country	US
Kind code	B2
Filing date	Feb 15, 2017
Priority date	Feb 16, 2016
Publication date	Sep 17, 2019
Grant date	Sep 17, 2019

Abstract

Disclosed is a method of chemically-mechanically polishing a substrate. The method comprises, consists of, or consists essentially of (a) contacting a substrate containing at least one Group III-V material, with a polishing pad and a chemical-mechanical polishing composition comprising water, abrasive particles having a negative surface charge, and an oxidizing agent for oxidizing the Group III-V material in an amount of from about 0.01 wt. % to about 5 wt. %, wherein the polishing composition has a pH of from about 2 to about 5; (b) moving the polishing pad and the chemical-mechanical polishing composition relative to the substrate; and (c) abrading at least a portion of the substrate to polish the substrate. In some embodiments, the Group III-V material is a semiconductor that includes at least one element from Group III of the Periodic Table and at least one element from Group V of the Periodic Table.

First claim

The invention claimed is:

1. A method of chemically-mechanically polishing a substrate, the method comprising:
(a) contacting a substrate containing at least one Group III-V material, and additionally containing silicon oxide, silicon nitride, or polysilicon, or combinations thereof; with a polishing pad and a chemical-mechanical polishing composition consisting essentially of water, colloidal silica abrasive particles having a zeta potential of from about −10 mV to about −60 mV, wherein the colloidal silica abrasive particles have an average particle size of from about 20 nm to about 200 nm, and an oxidizing agent for oxidizing the Group III-V material in an amount of from about 0.01 wt. % to about 5 wt. %, wherein the polishing composition has a pH of from about 2 to about 5;
(b) moving the polishing pad and the chemical-mechanical polishing composition relative to the substrate; and
(c) abrading at least a portion of the at least one Group III-V material, as well as the silicon oxide, silicon nitride, or polysilicon, to polish the substrate.

2. The method of claim 1 , wherein the Group III-V material contains Si, In, P, Ga, As, Ge, N, or any combination thereof.

3. The method of claim 2 , wherein the Group III-V material contains GaAs, AlAs, GaN, AlN, InN, GaInP, SiGe, InGaAs, InP, or any combination thereof.

4. The method of claim 3 , wherein the Group III-V material contains GaAs, InGaAs, InP, or any combination thereof.

5. The method of claim 1 , wherein the abrasive particles have a zeta potential of from about −20 mV to about −30 mV.

6. The method of claim 1 , wherein the abrasive particles are present in an amount of about 0.01 wt. % to about 5 wt. % of the polishing composition.

7. The method of claim 1 , wherein the oxidizing agent is hydrogen peroxide, an amine oxide, a quinone, peroxy carboxylic acid, hypervalent oxyhalide, persulfate, redox-active metal ion or coordination complex thereof, or any combination thereof.

8. The method of claim 7 , wherein the oxidizing agent is an amine oxide comprising pyridine-N-oxide, trimethylamine-N-oxide, 2-hydroxypyridine N-oxide, 8-hydroxyquinoline N-oxide, picolinic acid N-oxide, pyrazine N-oxide, or any combination thereof.

9. The method of claim 7 , wherein the oxidizing agent is a quinone comprising 2,6-dimethoxy-1,4-benzoquinone, 2,6-dimethylbenzoquinone, naphthaquinone, anthraquinone, sulfonated naphthaquinone such as, 1,2-naphthaquinone-4-sulfonic acid, sulfonated anthraquinone such as, anthraquinone-2-sulfonic acid, 1,5-diaminoanthraquinone, catechol, or any combination thereof.

10. The method of claim 7 , wherein the oxidizing agent is hydrogen peroxide.

11. The method of claim 1 , wherein the oxidizing agent is present in an amount of about 0.01 wt. % to about 1 wt. % of the polishing composition.

12. The method of claim 1 , wherein the pH of the composition is from about 2.3 to about 5.

Assignees

• Cabot Microelectronics Corp

Inventors

• Petro Benjamin
• Whitener Glenn
• Ward William

Classifications

• H10P90/129

  by polishing · CPC title

• H10P52/402 Primary

  of semiconductor materials · CPC title

• C09K3/1436

  Composite particles, e.g. coated particles · CPC title

• C09K3/1409

  Abrasive particles per se (preparation of diamond C01B32/25) · CPC title

• C09G1/02

  containing abrasives or grinding agents {(abrasives as such C09K3/14; polishing of semi-conductors H10P52/40)} · CPC title