Process kit for a substrate support

Patent metadata

Field	Value
Publication number	US-11387134-B2
Application number	US-201916249716-A
Country	US
Kind code	B2
Filing date	Jan 16, 2019
Priority date	Jan 19, 2018
Publication date	Jul 12, 2022
Grant date	Jul 12, 2022

Abstract

Methods and apparatus for processing substrates are provided herein. In some embodiments, a process kit for a substrate support includes: an upper edge ring made of quartz and having an upper surface and a lower surface, wherein the upper surface is substantially planar and the lower surface includes a stepped lower surface to define a radially outermost portion and a radially innermost portion of the upper edge ring.

First claim

The invention claimed is:

1. A process kit for a substrate support, comprising:
an upper edge ring made of quartz and having an upper surface and a lower surface, wherein the upper surface is substantially planar and the lower surface includes a stepped lower surface having a first step that defines a radially outermost portion of the upper edge ring and having a second step that defines a radially innermost portion of the upper edge ring, the upper edge ring having a central portion extending between and spacing the radially outermost portion and the radially innermost portion, and wherein an inner surface of the upper edge ring extends at a constant diameter from the upper surface to the lower surface; and
a lower edge ring, wherein the lower edge ring is radially spaced from the first step of the stepped lower surface and the lower edge ring is configured to interface with the second step of the stepped lower surface of the upper edge ring.

2. The process kit of claim 1 , wherein the lower edge ring has a notch along an upper and outer peripheral edge, wherein the second step of the stepped lower surface of the upper edge ring is configured to interface with the notch.

3. The process kit of claim 1 , wherein the upper edge ring has an inner diameter that is less than an inner diameter of the lower edge ring and an outer diameter that is greater than an outer diameter of the lower edge ring.

4. The process kit of claim 1 , wherein the lower edge ring is electrically conductive.

5. The process kit of claim 1 , wherein the radially outermost portion has a thickness greater than a thickness of the radially innermost portion.

6. The process kit of claim 1 , wherein the upper edge ring includes a curved upper peripheral edge connecting the upper surface to an outer peripheral wall of the upper edge ring or to the lower surface of the upper edge ring.

7. The process kit of claim 1 , wherein the upper edge ring has a width of about 1.5 inches to about 2.0 inches.

8. The process kit of claim 1 , wherein the radially innermost portion of the upper edge ring has an outer diameter of about 13.5 inches to about 14.5 inches.

9. A substrate support, comprising:
a base supporting a substrate support surface configured to support a substrate having a given diameter; and
the process kit of claim 1 disposed atop the substrate support, wherein:
the lower edge ring has an upper surface positioned at a height above the upper surface of the base and below the substrate support surface; and
the upper edge ring has an inner diameter that is less than the given diameter and an outer diameter that is greater than that of the base.

10. The substrate support of claim 9 , further comprising:
an upper portion of the substrate support disposed above the base, wherein an upper surface of the upper portion of the substrate support comprises the substrate support surface.

11. The substrate support of claim 10 , wherein the upper portion of the substrate support includes an outer peripheral ledge extending radially outward, and wherein the lower surface of the upper edge ring is configured to rest at least on the outer peripheral ledge.

12. The substrate support of claim 9 , wherein the lower edge ring includes curved edges.

13. A process kit for a substrate support, comprising:
a lower edge ring, wherein the lower edge ring is electrically conductive, and has a rectangular cross-sectional shape with an upper and outer peripheral notch; and
an upper edge ring having a contoured lower surface configured to interface with the lower edge ring, the upper edge ring further having an inner diameter that is less than an inner diameter of the lower edge ring and an outer diameter that is greater than an outer diameter of the lower edge ring, the upper edge ring further having an upper surface that is substantially planar, wherein the upper edge ring is fabricated from quartz, and wherein the contoured lower surface of the upper edge ring includes a stepped lower surface that generally reduces a thickness of the upper edge ring from a radially outermost portion to a radially innermost portion.

14. The process kit of claim 13 , wherein the contoured lower surface of the upper edge ring includes a stepped lower surface that generally reduces a thickness of the upper edge ring from a radially outermost portion to a radially innermost portion.

15. The process kit of claim 14 , wherein the stepped lower surface includes one step to define the radially outermost portion and the radially innermost portion.

16. The process kit of claim 15 , wherein the radially innermost portion of the upper edge ring is configured to interface with the lower edge ring.

17. The process kit of claim 13 , wherein the lower edge ring is made of aluminum or an aluminum alloy.

18. The process kit of claim 13 , wherein the lower edge ring has the notch along an upper and outer peripheral edge, wherein the contoured lower surface of the upper edge ring is configured to interface with the notch.

19. The process kit of claim 13 , wherein the upper edge ring includes a curved upper peripheral edge connecting the upper surface to an outer peripheral wall of the upper edge ring or to the contoured lower surface of the upper edge ring.

Assignees

• Applied Materials Inc

Inventors

• Mustafa Muhannad
• Rasheed Muhammad M
• Lei Yu
• Gelatos Avgerinos V
• Banthia Vikash
• Calderon Victor H
• Toh Shi Wei
• Lee Yung-Hsin
• Sen Anindita

Classifications

• H10P72/7616

  characterised by a coating, a hardness or a material · CPC title

• H10P72/72

  using electrostatic chucks · CPC title

• H10P72/7611 Primary

  characterised by edge profile or support profile · CPC title

• H01J2237/3344

  isotropy · CPC title

• H01J37/32715 Primary

  Workpiece holder · CPC title