Heating and cooling device
US-2017203377-A1 · Jul 20, 2017 · US
Substrate holder and method for bonding two substrates
US11315813B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11315813-B2 |
| Application number | US-201515551733-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 10, 2015 |
| Priority date | Apr 10, 2015 |
| Publication date | Apr 26, 2022 |
| Grant date | Apr 26, 2022 |
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Abstract
Official abstract text for this publication.
A substrate holder having a fixing surface for holding a substrate, a system having such a substrate holder, a use of such a substrate holder, a method for bonding two substrates and a product, particularly a substrate stack, produced using such a method and also a use of such a substrate holder for such a method.
First claim
Opening claim text (preview).
Having described the invention, the following is claimed: 1. A method for bonding an upper substrate to a lower substrate, the method comprising: aligning the upper substrate to the lower substrate when a distance between the upper substrate and the lower substrate is (d 1 ); heating the lower substrate such that the heated lower substrate radiates heat and heats the upper substrate at the distance (d 1 ) to a first temperature; bringing the upper substrate and the heated lowe…
Assignees
Inventors
Classifications
Electricity · mapped topic
- H10P72/0428Primary
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
- H10P72/18Primary
Electricity · mapped topic
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Frequently asked questions
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- What does patent US11315813B2 cover?
- A substrate holder having a fixing surface for holding a substrate, a system having such a substrate holder, a use of such a substrate holder, a method for bonding two substrates and a product, particularly a substrate stack, produced using such a method and also a use of such a substrate holder for such a method.
- Who is the assignee on this patent?
- Ev Group E Thallner Gmbh
- What technology area does this patent fall under?
- Primary CPC classification H10P72/0428. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Apr 26 2022 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 5 related publications on this page (citations in our corpus or others sharing the same primary CPC).