Substrate holder and method for bonding two substrates
US-11315813-B2 · Apr 26, 2022 · US
This page is not indexed by search engines while we improve data quality.
Patent family 52988040
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 52988040 |
| Family type | — |
| Earliest priority | Apr 10, 2015 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US11315813B2 — Substrate holder and method for bonding two substrates |
Representative publication
Best representative member for this family based on priority and filing country.
US11315813B2 — Substrate holder and method for bonding two substrates (published Apr 26, 2022)
Member publications
Related publications in this family.
Substrate holder and method for bonding two substrates
US-2018040495-A1 · Feb 8, 2018 · US