Back grinding apparatus and wear amount measuring method using the same
US-2024424637-A1 · Dec 26, 2024 · US
US9613840B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9613840-B2 |
| Application number | US-201114238091-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 22, 2011 |
| Priority date | Aug 12, 2011 |
| Publication date | Apr 4, 2017 |
| Grant date | Apr 4, 2017 |
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This invention relates to a method and a device for temporary bonding of a first substrate with a second substrate. The device is comprised of a mounting apparatus for mounting of the first substrate on a mounting contour with an active mounting surface. The mounting apparatus has an outer ring section for controllable fixing of the first substrate. Deformation means are provided for controllable deformation of the first substrate. The deformation means act within the outer ring section. Bonding means are provided for bonding of the first substrate with the second substrate.
Opening claim text (preview).
Having described the invention, the following is claimed: 1. A device for temporary bonding of a first substrate with a second substrate comprising: a mounting apparatus for mounting of the first substrate on a mounting contour with an active mounting surface of the mounting apparatus, the mounting apparatus comprising: a) an outer ring section for controllable fixing of the first substrate, and b) an inner ring section positioned inside of an inner edge of the outer edge secti…
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