Surface treating apparatus

Patent metadata

Field	Value
Publication number	US-11001928-B2
Application number	US-201916727390-A
Country	US
Kind code	B2
Filing date	Dec 26, 2019
Priority date	Jan 10, 2019
Publication date	May 11, 2021
Grant date	May 11, 2021

Abstract

The film forming mechanism 110 ejects a continuous laminar liquid under pressure of about 0.01 MPa at a flow rate of 5 to 10 L/min. Such a liquid film prevents droplets reflected on a surface of an antiscattering member 60 from splashing and entering the adjacent treatment chamber. When a plate-like work 10 is shaken to collide with the liquid film, the film flows down along the plate-like work 10 since the film formed by the film forming mechanism 110 is liquid. Thereby, a shake of the plate-like work 10 is converged. An amount of air flowing in toward a transport direction in each treatment chamber is reduced.

First claim

What is claimed is:

1. A surface treating apparatus comprising:
a first treatment chamber in which a sheet-shaped treatment object is carried in a vertically held state;
a first processing solution flow down mechanism, provided in the first treatment chamber, for squirting a first processing solution to flow down from an upper portion of the carried sheet-shaped treatment object over a surface region of the vertically held sheet-shaped treatment object;
a second treatment chamber adjacent to the first treatment chamber in which the sheet-shaped treatment object is carried in a vertically held state;
a second processing solution flow down mechanism, provided in the second treatment chamber, for squirting a second processing solution to flow down from the upper portion of the carried sheet-shaped treatment object over a surface region of the vertically held sheet-shaped treatment object;
a partition wall, provided between the first treatment chamber and the second treatment chamber, having a carry-in opening that enables the sheet-shaped treatment object to be carried in through the carry-in opening in the vertically held state; and
a film forming mechanism provided between the first processing solution flow down mechanism in the first treatment chamber and the second processing solution flow down mechanism in the second treatment chamber that forms a thin layered liquid film along a direction of gravity on a plane orthogonal to a direction in which the sheet-shaped treatment object is carried.

2. The surface treating apparatus according to claim 1 , wherein the film forming mechanism is provided in the first treatment chamber or the second treatment chamber in a vicinity of the carry-in opening.

3. The surface treating apparatus according to claim 2 , further including an air flow rate control mechanism that controls air to flow in a vertical direction along the two planes of the sheet-shaped treatment object.

4. The surface treating apparatus according to claim 1 , wherein the liquid film is composed of a same liquid that is squirted to flow down over the sheet-shaped treatment object in the treatment chamber.

5. The surface treating apparatus according to claim 1 , wherein the liquid film has a film opening narrower than the carry-in opening.

6. The surface treating apparatus according to claim 5 , wherein the film opening is wider than a width of a holding part for holding the sheet-shaped treatment object.

7. The surface treating apparatus according to claim 1 , wherein a thickness of the sheet-shaped treatment object is 40 μm or less.

8. The surface treating apparatus according to claim 1 , wherein the film opening is formed by arranging a pair of discharge parts apart from each other.

9. The surface treating apparatus according to claim 8 , wherein the pair of discharge parts discharge liquid obliquely so as to face the film opening.

10. The surface treating apparatus according to claim 1 , further including a guiding plate that is spaced wider than the carry-in opening and guides the liquid film.

11. The surface treating apparatus according to claim 3 , wherein the air flow rate control mechanism includes an air suction port and a height adjustment mechanism that adjusts a distance between the air suction port and the sheet-shaped treatment object.

Assignees

• Uemura Kogyo Kk

Inventors

• Utsumi Masayuki
• Takeuchi Masaharu

Classifications

• H05K2203/1518

  Vertically held PCB · CPC title

• H05K3/181

  by electroless plating (adhesives therefor H05K3/387) · CPC title

• H05K3/0085

  Apparatus for treatments of printed circuits with liquids not provided for in groups H05K3/02 - H05K3/46; conveyors and holding means therefor (apparatus specially adapted for manufacturing assemblages of electric components, e.g. printed circuit boards, H05K13/00) · CPC title

• C23C18/1628

  Specific elements or parts of the apparatus · CPC title

• C23C18/1619 Primary

  Apparatus for electroless plating · CPC title