Method and apparatus for drying substrate
US-10197333-B2 · Feb 5, 2019 · US
US2018110128A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2018110128-A1 |
| Application number | US-201715785938-A |
| Country | US |
| Kind code | A1 |
| Filing date | Oct 17, 2017 |
| Priority date | Oct 18, 2016 |
| Publication date | Apr 19, 2018 |
| Grant date | — |
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A drying apparatus of the present invention includes a drying tank for performing drying processing of a workpiece, a fixture for the workpiece, heating means opposed to a front surface of the workpiece, and heating means opposed to a back surface of the workpiece, wherein each heating means is inclined from a horizontal line in its longitudinal direction.
Opening claim text (preview).
What is claimed is: 1 . A drying apparatus comprising: a drying tank for performing drying processing of a workpiece, a fixture for the workpiece, a heating means opposed to a front surface of the workpiece, and a heating means opposed to a back surface of the workpiece, wherein each heating means is inclined from a horizontal line in its longitudinal direction. 2 . The drying apparatus according to claim 1 , wherein said drying tank includes a gas injection means opposed to the front surface of the workpiece and a gas injection means opposed to the back surface of the workpiece, wherein a nozzle hole of each gas injection means is inclined obliquely downward. 3 . The drying apparatus according to claim 1 , wherein said drying tank includes a conveying mechanism of the fixture. 4 . The drying apparatus according to claim 2 , wherein said drying tank includes an exhaust port provided in a bottom surface thereof. 5 . The drying apparatus according to claim 4 , wherein said drying tank includes a gas straightening plate that is provided above the exhaust port to allow gas injected through the nozzle hole to strike on the gas straightening plate. 6 . The drying apparatus according to claim 5 , wherein a surface of said gas straightening plate which faces the workpiece has a curved shape being convex upward. 7 . The drying apparatus according to claim 2 , wherein said gas injection means includes a lifting mechanism. 8 . The drying apparatus according to claim 1 , wherein said drying apparatus further includes a front tank provided on an inlet side of the drying tank, and a rear tank provided on an outlet side of the drying tank, wherein the front tank and the rear tank each have a gas injection means opposed to the front surface of the workpiece and a gas injection means opposed to the back surface of the workpiece. 9 . The drying apparatus according to claim 8 , wherein said gas injection means is provided at least at one of a position facing an upper portion of the workpiece and a position facing a lower portion thereof. 10 . The drying apparatus according to claim 8 , wherein said drying apparatus further includes a reserve heating tank provided on an inlet side of the front tank, wherein the reserve heating tank has heated liquid injection means.
Ducting arrangements from the source of air or other gases to the materials or objects being dried · CPC title
Vertically held PCB · CPC title
the objects or batches of materials being carried by trays or racks {or receptacles, which may be connected to endless chains or belts (trays, racks per se F26B25/18; with vertical movement F26B15/22)} · CPC title
from infrared-emitting elements {(by radiation emanating from passages containing heated fluids other than combustion gases F26B23/10)} · CPC title
Heating or thermal processing not related to soldering, firing, curing or laminating, e.g. for shaping the substrate or during finish plating · CPC title
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