Surface treating apparatus

Patent metadata

Field	Value
Publication number	US-2018117618-A1
Application number	US-201715727109-A
Country	US
Kind code	A1
Filing date	Oct 6, 2017
Priority date	Nov 2, 2016
Publication date	May 3, 2018
Grant date	—

Abstract

A surface treating apparatus that suppresses occurrence of defects is provided. A treatment solution is accumulated in a tank 15 through a treatment solution collecting port/air discharging port 13 in a lower portion of a bath 4 . An air heated by the treatment solution flows toward an upper portion (portion without the treatment solution) of the tank 15 via the treatment solution collecting port/air discharging port 13 in the lower portion of the bath 4 , and is discharged via an exhaust duct 17 . In this way, the air that is heated and tends to flow upward in the bath 4 is discharged from the lower portion thereof and is replaced with an external air from the upper portion thereof. Accordingly, the air in the bath 4 can be maintained at a uniform temperature. Thus, the treatment solution that reaches a lower portion of a substrate 54 from an upper portion thereof can be maintained at a uniform temperature. The air is caused to flow toward the lower portion from the upper portion in the bath 4 , so that the substrate 54 is pulled downward, and swinging of the substrate 54 can thus be reduced. Therefore, the substrate 54 can be less likely to contact an inlet 44 and an outlet 46.

First claim

What is claimed is:

1 . A surface treating apparatus comprising:
a holding member that holds an upper portion of a treatment target; a treatment solution releasing section that discharges a treatment solution onto the holding member or the treatment target to allow the treatment solution to flow on a surface of the treatment target held by the holding member; and a body that accommodates at least the treatment solution releasing section and the treatment target, wherein an air intake is provided in an upper portion of the body, and an air discharging port is provided in a lower portion of the body.

2 . The surface treating apparatus according to claim 1 , wherein
the air intake is provided above a portion where the treatment solution discharged from the treatment solution releasing section contacts the treatment target, and the air discharging port is provided below the treatment target.

3 . The surface treating apparatus according to claim 1 , wherein
the air discharging port is used as a collecting port for collecting the treatment solution.

4 . The surface treating apparatus according to claim 1 , further comprising:
an upper supporting member that supports the holding member from above; a transferring mechanism that moves the upper supporting member; and a protective member that is provided at least on a lower side of the transferring mechanism, wherein the upper supporting member supports the holding member through a part where no protective member is provided.

5 . The surface treating apparatus according to claim 4 , wherein
the protective member is also provided on side surfaces of the transferring mechanism.

6 . The surface treating apparatus according to claim 5 , wherein
a fluid is filled in a space defined by the protective member so that the lower side of the transferring mechanism or at least a part of the transferring mechanism can be immersed in the fluid.

7 . The surface treating apparatus according to claim 6 , wherein
a water supply port and a water drain port are provided in the space defined by the protective member so that the fluid can be replaced.

8 . The surface treating apparatus according to claim 6 , wherein
the transferring mechanism is formed of stainless steel, titanium, carbon steel, brass, or plastic.

9 . A surface treating apparatus comprising:
a continuous body that is a bath connecting body including a plurality of bath bodies connected to each other and is provided with a communicating port in each body for communicating with an adjacent body; a holding member that holds an upper portion of a treatment target; a transferring mechanism that moves the holding member to move the treatment target into each body via the communicating port of the continuous body; and a treatment solution releasing section that is a treatment solution releasing section provided in each body and discharges a treatment solution onto the holding member or the treatment target to allow the treatment solution to flow on a surface of the treatment target held by the holding member, wherein the treatment solution releasing section is configured not to discharge the treatment solution onto the treatment target in the vicinity of the adjacent body such that the treatment solution is not splattered on the adjacent body via the communicating port, and an air intake is provided in an upper portion of the body, and an air discharging port is provided in a lower portion of each body in the vicinity of the adjacent body.

10 . The surface treating apparatus according to claim 9 , wherein
the air intake is provided above a portion where the treatment solution discharged from the treatment solution releasing section contacts the treatment target, and the air discharging port is provided below the treatment target.

11 . The surface treating apparatus according to claim 9 , wherein
the air discharging port is used as a collecting port for collecting the treatment solution.

12 . The surface treating apparatus according to claim 9 , further comprising:
an upper supporting member that supports the holding member from above; a transferring mechanism that moves the upper supporting member; and a protective member that is provided at least on a lower side of the transferring mechanism, wherein the upper supporting member supports the holding member through a part where no protective member is provided.

13 . The surface treating apparatus according to claim 12 , wherein
the protective member is also provided on side surfaces of the transferring mechanism.

14 . The surface treating apparatus according to claim 13 , wherein
a fluid is filled in a space defined by the protective member so that the lower side of the transferring mechanism or at least a part of the transferring mechanism can be immersed in the fluid.

15 . The surface treating apparatus according to claim 14 , wherein
a water supply port and a water drain port are provided in the space defined by the protective member so that the fluid can be replaced.

16 . The surface treating apparatus according to claim 14 , wherein
the transferring mechanism is formed of stainless steel, titanium, carbon steel, brass, or plastic.

Assignees

• Uemura Kogyo Kk

Inventors

• Utsumi Masayuki
• Tanigawa Masahito

Classifications

• C23C18/168

  Control of temperature, e.g. temperature of bath, substrate · CPC title

• C23C18/1619 Primary

  Apparatus for electroless plating · CPC title

• B08B11/02

  Devices for holding articles during cleaning {(B08B9/42 takes precedence)} · CPC title

• C23C18/1632

  Features specific for the apparatus, e.g. layout of cells and of its equipment, multiple cells · CPC title

• C23C18/38

  Coating with copper · CPC title