Surface treating apparatus

Patent metadata

Field	Value
Publication number	US-2018087140-A1
Application number	US-201715600928-A
Country	US
Kind code	A1
Filing date	May 22, 2017
Priority date	Sep 27, 2016
Publication date	Mar 29, 2018
Grant date	—

Abstract

A device capable of performing surface treatment evenly to an upper portion of a substrate is provided. An upper end of a substrate 54 is sandwiched and held by a clip 52 of a hanger 50. A pipe 56 as a treatment solution releasing section is provided on each side of the substrate 54 that is held by the hanger 50. This pipe 56 is provided with a hole 58 from which the treatment solution is released obliquely upward. The released treatment solution flows down on a surface of the substrate 54, reaches a lower portion thereof, is circulated by a pump 60, and is released from the pipe 56 again.

First claim

1 . A surface treatment device comprising:
a holding member that holds an upper portion of a treatment target; a treatment solution releasing section that releases a treatment solution to the holding member and causes the treatment solution to flow on a surface of the treatment target held by the holding member; and a transferring mechanism that changes a relative position of the treatment target, which is held by the holding member, to the treatment solution releasing section.

2 . The surface treatment device according to claim 1 , wherein:
at least a part of the holding member has such thickness that, when flowing on a surface of the holding member toward the treatment target, the released treatment solution flows perpendicularly with respect to the surface of the treatment target and reaches the treatment target.

3 . The surface treatment device according to claim 2 , wherein:
a corner of a lower end of the holding member that holds the treatment target has a curved surface shape in a cross section.

4 . The surface treatment device according to claim 2 , wherein:
a lower end of the holding member that holds the treatment target has a semi-circular shape in a cross section.

5 . The surface treatment device according to claim 1 , wherein:
a plurality of the holding members is provided and is configured that the treatment targets are transferred with a specified space being interposed therebetween, and the plurality of the holding members is configured that the treatment solution also flows through the space between the treatment targets.

6 . The surface treatment device according to claim 5 , wherein:
the plurality of the holding members is configured that the holding member is also located in an upper portion of the space between the adjacent treatment targets.

7 . The surface treatment device according to claim 6 , wherein:
the plurality of the holding members is configured that an end of the treatment target overlaps a part of the adjacent holding member.

8 . The surface treatment device according to claim 5 , wherein:
a guide is provided at an end of the holding member such that the treatment solution flows toward the treatment target held by the adjacent holding member.

9 . The surface treatment device according to claim 1 , wherein:
the treatment target is a thin plate, and the holding member is configured to sandwich the thin plate from both sides, is provided with gripping projections to sandwich the thin plate on inner sides, and is provided with an adhesion prevention projection to avoid adhesion of the thin plate to the holding member.

10 . The surface treatment device according to claim 1 , wherein:
the treatment solution releasing section is provided at a plurality of positions in a transferring direction of the treatment target, at least one of the treatment solution releasing sections releases a plating solution, and at least another one thereof releases a cleaning solution, and the treatment solution releasing sections are configured that a position where the treatment solution releasing section releasing the plating solution applies the plating solution to the holding member is lower than a position where the treatment solution releasing section releasing the cleaning solution applies the cleaning solution to the holding member.

11 . A surface treatment method comprising:
holding an upper portion of a treatment target; and releasing a treatment solution to a position above an upper end of the treatment target, causing the treatment solution to flow on a surface of the treatment target, and thereby treating the surface of the treatment target.

12 . A surface treatment device comprising:
a holding member that holds an upper portion of a treatment target; a treatment solution releasing section that causes a treatment solution to flow on a surface of the treatment target held by the holding member; and a transferring mechanism that changes a relative position of the treatment target held by the holding member with respect to the treatment solution releasing section, wherein a plurality of the holding members is provided and is configured that the treatment targets are transferred with a specified space being interposed therebetween, and it is configured that the treatment solution also flows through the space between the treatment targets.

13 . A surface treatment device comprising:
a holding member that holds an upper portion of a thin plate as a treatment target; a treatment solution releasing section that causes a treatment solution to flow on a surface of the thin plate held by the holding member; and a transferring mechanism that changes a relative position of the treatment target held by the holding member to the treatment solution releasing section, wherein the holding member is configured to sandwich the thin plate from both sides, is provided with gripping projections to sandwich the thin plate on inner sides, and is provided with adhesion prevention projections to avoid adhesion of the thin plate to the holding member.

Assignees

• Uemura Kogyo Kk

Inventors

• Utsumi Masayuki
• Yamamoto Hisamitsu
• Hoshi Syunsaku
• Mizumoto Junji

Classifications

• C23C18/163

  Supporting devices for articles to be coated · CPC title

• C23C4/12 Primary

  characterised by the method of spraying · CPC title

• B05B1/044

  Slits, e.g. narrow openings defined by two straight and parallel lips; Elongated outlets for producing very wide discharges, e.g. fluid curtains (B05B1/046 takes precedence) · CPC title

• C23C4/02

  Pretreatment of the material to be coated, e.g. for coating on selected surface areas · CPC title

• C23C18/31

  Coating with metals · CPC title