Surface treating apparatus

Patent metadata

Field	Value
Publication number	US-2018100237-A1
Application number	US-201715696499-A
Country	US
Kind code	A1
Filing date	Sep 6, 2017
Priority date	Oct 11, 2016
Publication date	Apr 12, 2018
Grant date	—

Abstract

To provide surface treatment that can reduce occurrence of defects caused by incorporation of dust. Rollers 40 are rotatably fixed to rotating shafts 72 provided to protrude from lateral protective walls 49 . The lateral protective walls 49 are fixed perpendicularly to lower protective walls 47 fixed to outer walls 39 . Hanging plates 64 of a hanger 50 extend through a space 43 between both lower protective walls 47 and support clips 52 . A liquid 41 , such as water, is filled in spaces defined by the lateral protective walls 49 , the lower protective walls 47 , and the outer walls 39 . The liquid 41 is filled to cover about half of each rotating shaft 72 . Thus, fine dust generated by a transferring mechanism is captured by the liquid 41 and prevented from drifting from the space 34 toward the substrate 54.

First claim

What is claimed is:

1 . A surface treating apparatus, comprising:
a holding member for holding an upper part of a treatment target; a treatment solution releasing section for discharging a treatment solution onto the holding member or the treatment target to allow the treatment solution to flow over a surface of the treatment target held by the holding member; an upper supporting member for supporting the holding member from above; a transferring mechanism for moving the upper supporting member; and protective members provided at least below the transferring mechanism, wherein the upper supporting member supports the holding member through a part where no protective member is provided.

2 . The surface treating apparatus according to claim 1 ,
further comprising additional protective members provided on both sides of the transferring mechanism.

3 . The surface treating apparatus according to claim 2 ,
wherein a liquid is filled in a space defined by the protective members so that a lower part of the transferring mechanism or at least a part of the transferring mechanism can be immersed in the liquid.

4 . The surface treating apparatus according to claim 3 ,
wherein a water supply port and a water drain port are provided in the space defined by the protective members so that the liquid can be replaced.

5 . The surface treating apparatus according to claim 3 ,
wherein the transferring mechanism is formed of stainless, titanium, carbon steel, brass or plastic.

6 . A surface treating apparatus, comprising:
a holding member for holding an upper part of a treatment target; a treatment bath in which a treatment target held by the holding member is immersed in a treatment solution; an upper supporting member for supporting the holding member from above; a transferring mechanism for moving the upper supporting member; and protective members provided at least below the transferring mechanism, wherein the upper supporting member supports the holding member through a part where no protective member is provided.

Assignees

• Uemura Kogyo Kk

Inventors

• Utsumi Masayuki
• Naka Nobuhiko

Classifications

• C23C18/1632

  Features specific for the apparatus, e.g. layout of cells and of its equipment, multiple cells · CPC title

• C23C18/1619 Primary

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• C23C18/38 Primary

  Coating with copper · CPC title

• C25D17/02

  Tanks; Installations therefor · CPC title

• C25D17/00 Primary

  Constructional parts, or assemblies thereof, of cells for electrolytic coating · CPC title