Determining interaction forces in a dynamic mode AFM during imaging

Patent metadata

Field	Value
Publication number	US-10578643-B2
Application number	US-201615757704-A
Country	US
Kind code	B2
Filing date	Aug 17, 2016
Priority date	Aug 18, 2015
Publication date	Mar 3, 2020
Grant date	Mar 3, 2020

Abstract

A method and system for calibrating force (F12) in a dynamic mode atomic force microscope (AFM). An AFM tip (11) is disposed on a first cantilever (12). The first cantilever (12) is actuated to oscillate the AFM tip (11) in a dynamic mode. A first sensor (16) is configured to measure a first parameter (A1) of the oscillating AFM tip (11). A second sensor (26) is configured to measure a second parameter (A2) of a resilient element (22). The oscillating AFM tip (11) is moved in proximity to the resilient element (22) while measuring the first parameter (A1) of the AFM tip (11) and the second parameter (A2) of the resilient element (22). A force (F12) between the oscillating AFM tip (11) and the resilient element (22) is calculated based on the measured second parameter (A2) and a calibrated force constant (K2) of the resilient element (22).

First claim

The invention claimed is:

1. A method of calibrating force in a dynamic mode atomic force microscope (AFM), the method comprising;
providing an AFM tip disposed on a first cantilever;
actuating the first cantilever to oscillate the AFM tip in a dynamic mode;
providing a first sensor configured to measure a first parameter of the AFN tip during oscillating of the AFM tip;
providing a resilient element having a force constant, wherein a fundamental frequency of the resilient element is at least a factor ten higher than a fundamental frequency of the first cantilever;
providing a second sensor configured to measure a second parameter of the resilient element;
moving the AFM tip, while the AFM tip is oscillating due to the actuating, in proximity to the resilient element while measuring:
a value of the first parameter of the AFM tip, and
a value of the second parameter of the resilient element;

calculating a force between the AFM tip and the resilient element based on:
the measured value of the second parameter, and
a calibrated value of the force constant of the resilient element; and

storing a correlation between:
the force between the AFM tip and, the resilient element, and
the measured value of the first parameter of the AFM tip.

2. The method according to claim 1 , wherein the resilient element comprises a second cantilever.

3. The, method according to claim 1 , wherein the value of the first parameter is a function of one or more of the group consisting of: an amplitude, a frequency, and a phase of the oscillating of the AFM tip.

4. The method according to claim 1 , wherein the second parameter is a function of one or more of the group consisting of: a deflection of the resilient element, and displacement of the resilient element.

5. The method according to claim 1 , wherein the first sensor comprises a position sensitive detector configured to measure a position of a first light beam on the position sensitive detector reflected by the first cantilever, wherein the position of the first light beam is a function of the first parameter of the AFM tip during the oscillating.

6. The method according to claim 1 , wherein the second sensor comprises a position sensitive detector configured to measure a position of a second light'beam on the position sensitive detector reflected by the first cantilever, wherein the position of the light beam on the position sensitive detector is a function of the second parameter of the resilient element.

7. The method according to claim 1 , further comprising calibrating the force constant of the resilient element as a function of the measured value of the second parameter.

8. The method according to claim 1 , further comprising determining a force in a dynamic mode atomic force microscope measurement by:
moving the oscillating AFM tip over a sample surface while measuring the value of the first parameter; and
calculating a force during the oscillating of the AFM tip, between the AFM tip and the sample surface based on the stored correlation between the calculated force and the measured first parameter of the oscillating AFM tip.

9. The method according to claim 8 , further comprising using a dynamic mode atomic force microscope for applying a predetermined force to a sample surface by determining the force while varying a distance between the AIN tip and the sample surface until the predetermined force is achieved.

10. A dynamic mode atomic force microscope (AFM) system comprising:
an ARM tip disposed on: a first cantilever;
an actuator configured to actuate the first cantilever to oscillate the AFM tip in a dynamic mode;
a first sensor configured to measure a first parameter of the AFM tip during oscillating of the AFM time;
a resilient element having a force constant, wherein a fundamental frequency of the resilient element is at least a factor ten higher than a fundamental frequency of the first cantilever;
a second sensor configured to measure a second parameter of the resilient element;
a controller configured and programmed for:
moving the AFM tip, while the AFM tip is oscillating due to the actuating by the actuator, in proximity to the resilient element while measuring:
a value of the first parameter of the AFM tip, and
a value of the second parameter of the resilient element;

calculating a force between the AFM tip and the resilient element based on:
the measured value of the second parameter, and
a calibrated value of the force constant of the resilient element; and

storing a correlation between:
the force between the AFM tip and the resilient element, and
the measured value of the first parameter of the AFM tip.

11. The system according to claim 10 , wherein the resilient element comprises a second cantilever, wherein the first cantilever is arranged with respect to the second cantilever to tap a surface of the second cantilever with the AFM tip of the first cantilever.

12. The system according to claim 10 , further comprising a light source configured to direct a first light beam onto the first cantilever, and wherein the first sensor comprises a position sensitive detector for measuring a deflection of the first light beam resulting from movement of the first cantilever.

13. The system according to claim 10 , further comprising a feedback controller configured to control a relative distance between, the AFM tip and the resilient element based on the measured first parameter.

14. The system according to claim 10 , further comprising a light source configured to direct a second light beam onto the resilient element, and
wherein the second sensor comprises a position sensitive detector for measuring a deflection of the second light beam resulting from movement of the resilient element.

Assignees

• TNO

Inventors

• Sadeghian Marnani Hamed
• Tamer Mehmet Selman

Classifications

• G01Q60/34

  Tapping mode · CPC title

• G01Q40/02 Primary

  Calibration standards and methods of fabrication thereof · CPC title

• G01Q20/02

  by optical means · CPC title

• G01Q40/00 Primary

  Calibration, e.g. of probes · CPC title