System and method for scanning an object with an electron beam using overlapping scans and electron beam counter-deflection

Patent metadata

Field	Value
Publication number	US-10541104-B2
Application number	US-201514795793-A
Country	US
Kind code	B2
Filing date	Jul 9, 2015
Priority date	Jul 9, 2015
Publication date	Jan 21, 2020
Grant date	Jan 21, 2020

Abstract

A method and a charged particle beam system that includes charged particle beam optics and a movable stage; wherein the movable stage is configured to introduce a movement between the object and charged particle beam optics; wherein the movement is of a constant velocity and along a first direction; wherein the charged particle beam optics is configured to scan, by the charged particle beam, multiple areas of the object so that each point of the multiple areas is scanned multiple times; wherein the multiple areas partially overlap; wherein the scanning is executed by the charged particle beam optics; wherein the scanning comprises performing counter-movement deflections of the charged particle beam for at least partially compensating for the movement; and wherein each area of the multiple areas is scanned by following an area scan scheme that defines multiple scan lines that differ from each other.

First claim

What is claimed is:

1. A charged particle beam system, comprising:
charged particle beam optics including a module that generates a charged particle beam, wherein the charged particle beam optics are configured to scan, by the charged particle beam, multiple areas of an object, wherein:
each area of the multiple areas partially overlaps with at least one adjacent area of the multiple areas so that at least some points of the multiple areas are scanned multiple times,
each area of the multiple areas is scanned by following an area scan scheme that defines a scan pattern having multiple scan lines, wherein a first area of the multiple areas partially overlaps with a second area of the multiple areas, the scan pattern of the first area is different from the scan pattern of the second area, and the multiple scan lines of the first area are substantially parallel to the multiple scan lines of the second area, and
each area of the multiple areas corresponds to a different field of view of the charged particle beam optics,

a movable stage configured to introduce a movement along a first direction at a constant velocity between the object and the charged particle beam optics;
wherein the scanning is executed by the charged particle beam optics and includes performing counter-movement deflections of the charged particle beam along a second direction substantially opposite the first direction for at least partially compensating for the movement.

2. The charged particle beam system according to claim 1 wherein a first area scan scheme differs from a second area scan scheme by at least one charged particle beam parameter; wherein the first area scan scheme is used for scanning a first area of the object; wherein the second area scan scheme is used for scanning a second area of the object; and wherein the first area of the object and the second area of the object belong to the multiple areas.

3. The charged particle beam system according to claim 1 wherein adjacent areas of the object are scanned in an interleaved manner.

4. A method for scanning an object with a charged particle beam, the method comprising:
introducing a movement of a constant velocity between the object and charged particle beam optics along a first direction; and
scanning, by the charged particle beam, multiple partially overlapping areas of the object so that at least some points of the multiple areas are scanned multiple times and each area of the multiple areas is scanned by following an area scan scheme that defines a scan pattern having multiple scan lines, wherein each area of the multiple areas corresponds to a different field of view of the charged particle beam optics, and a first area scan scheme used for scanning a first area of the multiple areas is different from a second area scan scheme used for scanning a second area of the multiple areas, the scanning including performing counter-movement deflections of the charged particle beam along a second direction substantially opposite the first direction for at least partially compensating for the movement;
wherein the scanning is executed by the charged particle beam optics;
wherein the first area partially overlaps with the second area, the scan pattern of the first area is different from the scan pattern of the second area, and the multiple scan lines of the first area are substantially parallel to the multiple scan lines of the second area;
wherein the first area scan scheme is used for charging the first area; and
wherein the second area scan scheme is used for discharging the second area.

5. The method according to claim 4 further comprising generating images of the multiple areas by an imaging module.

6. The method according to claim 4 wherein the first area scan scheme differs from the second area scan scheme by at least one charged particle beam parameter; and
wherein the first area and the second area belong to the multiple areas.

7. The method according to claim 6 wherein the at least one charged particle beam parameter is an energy of the charge particle beam.

8. The method according to claim 6 wherein the at least one charged particle beam parameter is a width of the charge particle beam.

9. The method according to claim 6 wherein the at least one charged particle beam parameter is an intensity of the charge particle beam.

10. The method according to claim 6 wherein the at least one charged particle beam parameter is a scan direction of the charge particle beam.

11. The method according to claim 4 wherein the charged particle beam is scanned at a scan rate along the multiple scan lines; and wherein a ratio between the scan rate and the constant velocity is not a whole number.

12. The method according to claim 4 wherein at least one area scan scheme defines multiple scan lines of alternating scan directions.

13. The method according to claim 4 wherein adjacent areas of the object are scanned in an interleaved manner.

14. The method according to claim 13 wherein the first area scan scheme differs from the second area scan scheme by at least one charged particle beam parameter; and wherein the first area of the object and the second area of the object belong to the multiple areas of the object.

15. A method for scanning an object with a charged particle beam, the method comprising:
introducing a movement of a constant velocity between the object and charged particle beam optics along a first direction; and
scanning, by the charged particle beam, multiple areas of the object, wherein:
each area of the multiple areas partially overlaps with at least one adjacent area of the multiple areas so that at least some points of the multiple areas are scanned multiple times,
each area of the multiple areas is scanned by following an area scan scheme that defines a scan pattern having multiple scan lines, wherein a first area of the multiple areas partially overlaps with a second area of the multiple areas, the scan pattern of the first area is different from the scan pattern of the second area, and the multiple scan lines of the first area are substantially parallel to the multiple scan lines of the second area, and
each area of the multiple areas corresponds to a different field of view of the charged particle beam optics,

wherein the scanning includes performing counter-movement deflections of the charged particle beam along a second direction substantially opposite the first direction for at least partially compensating for the movement;
wherein the scanning is executed by the charged particle beam optics.

16. The method according to claim 15 wherein a first area scan scheme differs from a second area scan scheme by at least one charged particle beam parameter; wherein the first area scan scheme is used for scanning a first area of the object;
wherein the second area scan scheme is used for scanning a second area of the object; and
wherein the first area of the object and the second area of the object belong to the multiple areas.

17. The method according to claim 15 wherein adjacent areas of the object are scanned in an interleaved manner.

18. The method according to claim 15 further comprising generating images of the multiple areas by an imaging module.

19. The method according to claim 15 wherein the charged particle beam is scanned at a scan rate along the multiple scan lines; and wherein a ratio between the scan rate and the constant velocity is not a whole number.

Assignees

• Applied Materials Israel Ltd

Inventors

• Lev Uri
• Litman Alon
• Nir Zvi
• Mizrahy Arnon

Classifications

• H01J37/28 Primary

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J2237/2813

  characterised by the application · CPC title

• H01J2237/20221

  Translation · CPC title

• H01J37/265

  Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination · CPC title

• H01J37/147 Primary

  Arrangements for directing or deflecting the discharge along a desired path ({H01J37/045 take precedence;} lenses H01J37/10) · CPC title