System and method for scanning an object with an electron beam using overlapping scans and electron beam counter-deflection
US-10541104-B2 · Jan 21, 2020 · US
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Patent family 57731371
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 57731371 |
| Family type | — |
| Earliest priority | Jul 9, 2015 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US10541104B2 — System and method for scanning an object with an electron beam using overlapping scans and electron beam counter-deflection |
Representative publication
Best representative member for this family based on priority and filing country.
US10541104B2 — System and method for scanning an object with an electron beam using overlapping scans and electron beam counter-deflection (published Jan 21, 2020)
Member publications
Related publications in this family.
System and method for scanning an object with an electron beam
US-2017011883-A1 · Jan 12, 2017 · US