Loadlock integrated bevel etcher system

Patent metadata

Field	Value
Publication number	US-10403515-B2
Application number	US-201615013547-A
Country	US
Kind code	B2
Filing date	Feb 2, 2016
Priority date	Sep 24, 2015
Publication date	Sep 3, 2019
Grant date	Sep 3, 2019

Abstract

Implementations disclosed herein describe a bevel etch apparatus within a loadlock bevel etch chamber and methods of using the same. The bevel etch apparatus has a mask assembly within the loadlock bevel etch chamber. During an etch process, the mask assembly delivers a gas flow to control bevel etch without the use of a shadow frame. As such, the edge exclusion at the bevel edge can be reduced, thus increasing product yield.

First claim

What is claimed is:

1. A loadlock chamber, comprising:
a substrate support having a substrate support surface positioned in a processing region;
a remote plasma source positioned to supply an etching agent through a planar baffle to a peripheral region of the substrate support surface, wherein the planar baffle includes a standoff portion positioned to contact the substrate support; and
a masking assembly coupled to a gas source, wherein the masking assembly is positioned to deliver a gas flow over the substrate support surface, the gas flowing from an approximately central region of the substrate support surface toward the peripheral region of the substrate support surface, and wherein, when the substrate support is disposed against the standoff portion, a parallel and uniform gap is formed between a portion of the mask assembly and the peripheral region of the substrate support.

2. The loadlock chamber of claim 1 , wherein the masking assembly comprises a masking plate with a central port formed therein.

3. The loadlock chamber of claim 2 , wherein the masking plate further comprises an angled ledge.

4. The loadlock chamber of claim 3 , wherein the angled ledge forms an angle of between 15 and 45 degrees as measured from a surface of the masking plate.

5. The loadlock chamber of claim 2 , wherein the masking plate further comprises a flow surface.

6. The loadlock chamber of claim 1 , wherein the masking assembly comprises a masking plate with a plurality of ports formed therein.

7. The loadlock chamber of claim 1 , wherein species from the etching agent are delivered to the processing region through a plurality of slits through a lower portion of the planar baffle.

8. The loadlock chamber of claim 1 , wherein the standoff portion extends from the outer periphery of the planar baffle.

9. The loadlock chamber of claim 8 , further comprising a chuck ring in contact with the substrate support and positioned to receive the standoff portion, the standoff portion maintaining a first distance between the masking plate and the substrate support during operation.

10. The loadlock chamber of claim 1 further comprising a movement control device positioned to adjust the position of the planar baffle.

11. The loadlock chamber of claim 1 , wherein the masking assembly is coupled to a center portion of the planar baffle.

12. A loadlock chamber, comprising:
a substrate support having a substrate support surface positioned in a processing region;
a remote plasma source positioned to supply an etching agent through a planar baffle to a peripheral region of the substrate support surface, wherein the planar baffle includes a standoff portion positioned to contact the substrate support; and
a masking assembly coupled to a gas source and coupled to a center portion of the planar baffle, wherein the masking assembly is positioned to deliver a gas flow over the substrate support surface, the gas flowing from an approximately central region of the substrate support surface toward the peripheral region of the substrate support surface, wherein when the substrate support is disposed against the standoff portion a parallel and uniform gap is formed between a portion of the mask assembly and the peripheral region of the substrate support.

13. A loadlock chamber, comprising:
a substrate support having a substrate support surface positioned in a processing region;
a remote plasma source positioned to supply an etching agent through a baffle to a peripheral region of the substrate support surface;
an actuator configured to position the baffle relative to a stationary portion of the loadlock chamber, wherein the baffle includes a standoff portion positioned to contact the substrate support; and
a masking assembly coupled to a gas source, wherein the masking assembly is positioned to deliver a gas flow over the substrate support surface, the gas flowing from an approximately central region of the substrate support surface toward the peripheral region of the substrate support surface, wherein, when the substrate support is disposed against the standoff portion, a parallel and uniform gap is formed between a portion of the mask assembly and the peripheral region of the substrate support.

Assignees

• Applied Materials Inc

Inventors

• Basu Saptarshi
• Lee Jeongmin
• Connors Paul
• Du Bois Dale R
• Kulshreshtha Prashant Kumar
• Narasimha Karthik Thimmavajjula
• Berens Brett
• Ghosh Kalyanjit
• Zhou Jianhua
• Balasubramanian Ganesh
• Lee Kwangduk Douglas
• Rocha-Alvarez Juan Carlos
• Ogiso Hiroyuki
• Krivulina Liliya
• Gilbert Rick
• Waqar Mohsin
• Shankaramurthy Venkatanarayana
• Ponnekanti Hari K

Classifications

• H10P72/7624

  characterised by the mechanical construction of the susceptor, stage or support · CPC title

• H10P72/0466

  characterised by the construction of the load-lock chamber · CPC title

• H10P72/0424

  using mainly spraying means, e.g. nozzles · CPC title

• H10P72/0421 Primary

  for drying etching · CPC title

• H01J37/32366

  Localised processing · CPC title