Method and apparatus for purging and plasma suppression in a process chamber

Patent metadata

Field	Value
Publication number	US-9399228-B2
Application number	US-201313760686-A
Country	US
Kind code	B2
Filing date	Feb 6, 2013
Priority date	Feb 6, 2013
Publication date	Jul 26, 2016
Grant date	Jul 26, 2016

Abstract

A substrate processing system includes a showerhead that comprises a head portion and a stem portion and that delivers precursor gas to a processing chamber. A baffle includes a base portion having an outer diameter that is greater than an outer diameter of the head portion of the showerhead, that comprises a dielectric material and that is arranged between the head portion of the showerhead and an upper surface of the processing chamber.

First claim

What is claimed is:

1. A substrate processing system, comprising:
a showerhead that comprises a head portion and a stem portion and that delivers precursor gas to a processing chamber;
a baffle that includes a base portion having an outer diameter that is greater than an outer diameter of the head portion of the showerhead,
wherein the baffle comprises a dielectric material and is arranged (i) above the head portion of the showerhead, (ii) between the head portion of the showerhead and an upper surface of the processing chamber,
wherein the baffle defines (i) a volume between the baffle and the upper surface of the processing chamber and (ii) a gap between an outer edge of the baffle and sidewalls of the processing chamber,
wherein the gap between the outer edge of the baffle and the sidewalls of the processing chamber is smaller than a gap between an outer edge of the showerhead and the sidewalls of the processing chamber,
wherein the gap between the outer edge of the baffle and the sidewalls of the processing chamber extends from the outer edge of the baffle to the sidewalls, and wherein no structure is arranged in the gap between the outer edge of the baffle and the sidewalls of the processing chamber, and
wherein no structure is arranged in the gap between the outer edge of the showerhead and the sidewalls of the processing chamber; and
one or more purge gas inlets arranged in the upper surface of the processing chamber to supply purge gas downward into the volume defined between the baffle and the upper surface of the processing chamber.

2. A substrate processing system, comprising:
a showerhead that comprises a head portion and a stem portion and that delivers precursor gas to a processing chamber;
a baffle that includes a base portion having an outer diameter that is greater than an outer diameter of the head portion of the showerhead,
wherein the baffle comprises a dielectric material and is arranged (i) above the head portion of the showerhead, (ii) between the head portion of the showerhead and an upper surface of the processing chamber,
wherein the baffle defines (i) a volume between the baffle and the upper surface of the processing chamber and (ii) a gap between an outer edge of the baffle and sidewalls of the processing chamber,
wherein the gap between the outer edge of the baffle and the sidewalls of the processing chamber is smaller than a gap between an outer edge of the showerhead and the sidewalls of the processing chamber,
wherein the qap between the outer edqe of the baffle and the sidewalls of the processing chamber extends from the outer edge of the baffle to the sidewalls, and wherein no structure is arranqed in the qap between the outer edqe of the baffle and the sidewalls of the processing chamber, and
wherein no structure is arranged in the qap between the outer edge of the showerhead and the sidewalls of the processing chamber; and
a collar that connects the showerhead to a upper surface of the processing chamber, wherein the collar includes a head portion and a stem portion, wherein:
the baffle includes a stem portion extending from the base portion towards the upper surface of the processing chamber; and
the stem portion of the baffle is arranged around the stem portion of the collar.

3. The substrate processing system of claim 2 , wherein the stem portion of the baffle extends beyond the upper surface of the processing chamber.

4. The substrate processing system of claim 2 , wherein flow of purge gas through a gap between a radially outer surface of the showerhead and a side wall of the processing chamber is varied based on a thickness of the baffle and a width of the gap of the baffle to provide a predetermined Peclet number.

5. The substrate processing system of claim 4 , wherein a purge gas flow rate, the width of the gap of the baffle and the thickness of the baffle are selected to provide a Peclet number greater than or equal to 5.

6. The substrate processing system of claim 1 , wherein the dielectric material is selected from a group consisting of quartz, sapphire, alumina, and aluminum nitride.

7. The substrate processing system of claim 4 , wherein the width of the gap of the baffle is less than or equal to 0.2 inches and the thickness of the baffle is less than or equal to than 1 inch.

8. The substrate processing system of claim 1 , wherein the gap between the outer edge of the baffle and the sidewalls of the processing chamber is arranged to allow a curtain of air into the processing chamber below the showerhead, and wherein the curtain of air is concentric with the showerhead.

Assignees

• Novellus Systems Inc

Inventors

• Breiling Patrick
• Gerber Kevin
• O'Loughlin Jennifer
• Shankar Nagraj
• Subramonium Pramod

Classifications

• C23C16/45561

  Gas plumbing upstream of the reaction chamber · CPC title

• C23C16/45536 Primary

  Use of plasma, radiation or electromagnetic fields · CPC title

• C23C16/45591

  Fixed means, e.g. wings, baffles · CPC title

• B05B1/18

  Roses; Shower heads · CPC title

• B05B7/22

  electrically {, magnetically or electromagnetically}, e.g. by arc {(B05B7/20 takes precedence)} · CPC title