Plasma suppression behind a showerhead through the use of increased pressure

Patent metadata

Field	Value
Publication number	US-9758868-B1
Application number	US-201615066550-A
Country	US
Kind code	B1
Filing date	Mar 10, 2016
Priority date	Mar 10, 2016
Publication date	Sep 12, 2017
Grant date	Sep 12, 2017

Abstract

A substrate processing system includes a showerhead including a stem portion and a head portion. The stem portion is in fluid communication with a process gas source, and the head portion is arranged to provide process gases from the process gas source to a reaction volume of a processing chamber below the showerhead to generate plasma in the reaction volume. A suppressor is arranged above the head portion of the showerhead, extends from the stem portion toward sidewalls of the processing chamber, and is sealed against the sidewalls of the processing chamber or sealed against an enclosure surrounding the suppressor. The suppressor, the sidewalls, and a top surface of the processing chamber, the suppressor and the enclosure, or the suppressor, the enclosure, and the top surface define a partitioned volume of the processing chamber above the showerhead. The partitioned volume is in fluid communication with a purge gas source.

First claim

What is claimed is:

1. A substrate processing system comprising:
a showerhead including a stem portion and a head portion, wherein the stem portion is in fluid communication with a process gas source, and wherein the head portion is arranged to provide process gases from the process gas source to a reaction volume of a processing chamber below the showerhead; and
a suppressor arranged above the head portion of the showerhead,
wherein the suppressor extends from the stem portion toward sidewalls of the processing chamber,
wherein the suppressor is one of (i) sealed against the sidewalls of the processing chamber and (ii) sealed against an enclosure surrounding the suppressor within the sidewalls of the processing chamber,
wherein a partitioned volume of the processing chamber is defined above the suppressor and below a top surface of the processing chamber and is further defined by one of (i) the suppressor, the sidewalls of the processing chamber, and the top surface of the processing chamber, (ii) the suppressor and the enclosure surrounding the suppressor, and (iii) the suppressor, the enclosure surrounding the suppressor, and the top surface of the processing chamber, and
wherein the partitioned volume is in fluid communication with a purge gas source.

2. The substrate processing system of claim 1 , wherein the suppressor includes at least one opening providing fluid communication between the partitioned volume and the reaction volume, wherein the opening is arranged to allow a purge gas to flow from the partitioned volume to the reaction volume.

3. The substrate processing system of claim 2 , wherein the at least one opening comprises at least one of (i) a slot and (ii) a via.

4. The substrate processing system of claim 2 , wherein at least one of a size, type, shape, position, flow direction, and quantity of the at least one opening is selected based on at least one of a gas species of the purge gas and a desired pressure in the partitioned volume.

5. The substrate processing system of claim 4 , further comprising a controller configured to control a flow rate of the purge gas into the partitioned volume according to the desired pressure while plasma is being generated in the reaction volume.

6. The substrate processing system of claim 5 , wherein the controller is configured to calculate the desired pressure based on a pressure within the reaction volume.

7. The substrate processing system of claim 5 , wherein the controller is configured to control the flow rate such that the desired pressure is greater than a pressure within the reaction volume.

8. The substrate processing system of claim 5 , wherein the controller is configured to control the flow rate based on a measured pressure within the partitioned volume.

9. The substrate processing system of claim 1 , wherein the enclosure is cylindrical and the suppressor is a disc.

10. The substrate processing system of claim 1 , further comprising a sealing member arranged between an end of the suppressor and (i) the sidewalls or (ii) the enclosure.

11. A substrate processing system, comprising:
a showerhead including a stem portion and a head portion, wherein the stem portion is in fluid communication with a process gas source, and wherein the head portion is arranged to provide process gases from the process gas source to a reaction volume of a processing chamber below the showerhead; and
a suppressor arranged above the head portion of the showerhead,
wherein the suppressor extends from the stem portion toward sidewalls of the processing chamber,
wherein the suppressor is one of (i) sealed against the sidewalls of the processing chamber and (ii) sealed against an enclosure surrounding the suppressor within the sidewalls of the processing chamber,
wherein one of (i) the suppressor, the sidewalls, and a top surface of the processing chamber, (ii) the suppressor and the enclosure, and (iii) the suppressor, the enclosure, and the top surface define a partitioned volume of the processing chamber above the showerhead,
wherein the partitioned volume is in fluid communication with a purge gas source,
wherein the suppressor includes at least one opening providing fluid communication between the partitioned volume and the reaction volume, wherein the opening is arranged to allow a purge gas to flow from the partitioned volume to the reaction volume, and
wherein an inner surface of the at least one opening is threaded.

12. A substrate processing system, comprising:
a showerhead including a stem portion and a head portion, wherein the stem portion is in fluid communication with a process gas source, and wherein the head portion is arranged to provide process gases from the process gas source to a reaction volume of a processing chamber below the showerhead; and
a suppressor arranged above the head portion of the showerhead,
wherein the suppressor extends from the stem portion toward sidewalls of the processing chamber,
wherein the suppressor is one of (i) sealed against the sidewalls of the processing chamber and (ii) sealed against an enclosure surrounding the suppressor within the sidewalls of the processing chamber,
wherein one of (i) the suppressor, the sidewalls, and a top surface of the processing chamber, (ii) the suppressor and the enclosure, and (iii) the suppressor, the enclosure, and the top surface define a partitioned volume of the processing chamber above the showerhead,
wherein the partitioned volume is in fluid communication with a purge gas source,
wherein the suppressor includes at least one opening providing fluid communication between the partitioned volume and the reaction volume, wherein the opening is arranged to allow a purge gas to flow from the partitioned volume to the reaction volume, and
wherein the at least one opening includes a plurality of openings, and wherein a first opening of the plurality of openings includes a removable plug that at least partially closes off the first opening to prevent the purge gas from flowing from the partitioned volume to the reaction volume.

13. The substrate processing system of claim 12 , wherein the removable plug includes a via having a smaller diameter than the first opening.

Assignees

• Lam Res Corp

Inventors

• Breiling Patrick Girard
• Chandrasekharan Ramesh
• Minshall Edmund
• Smith Colin
• Duvall Andrew
• Leeser Karl

Classifications

• C23C16/50

  using electric discharges {(generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34)} · CPC title

• C23C16/455 Primary

  characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber · CPC title

• C23C16/4408 Primary

  by purging residual gases from the reaction chamber or gas lines · CPC title

• C23C16/45536

  Use of plasma, radiation or electromagnetic fields · CPC title

• C23C16/45565

  Shower nozzles · CPC title