Air-gap gate sidewall spacer and method

Patent metadata

Field	Value
Publication number	US-10249728-B2
Application number	US-201815955989-A
Country	US
Kind code	B2
Filing date	Apr 18, 2018
Priority date	Jan 18, 2017
Publication date	Apr 2, 2019
Grant date	Apr 2, 2019

Abstract

Disclosed are integrated circuit (IC) structures and formation methods. In the methods, a gate with a sacrificial gate cap and a sacrificial gate sidewall spacer is formed on a channel region. The cap and sidewall spacer are removed, creating a cavity with a lower portion between the sidewalls of the gate and adjacent metal plugs and with an upper portion above the lower portion and the gate. A first dielectric layer is deposited, forming an air-gap in the lower portion and lining the upper portion. A second dielectric layer is deposited, filling the upper portion. During formation of a gate contact opening (optionally over an active region), the second dielectric layer is removed and the first dielectric layer is anisotropically etched, thereby exposing the gate and creating a dielectric spacer with a lower air-gap segment and an upper solid segment. Metal deposited into the opening forms the gate contact.

First claim

What is claimed is:

1. An integrated circuit structure comprising:
a gate adjacent to a semiconductor body at a channel region, the channel region being positioned laterally between source/drain regions;
a gate contact above and immediately adjacent to the gate;
metal plugs on the source/drain regions;
plug caps above and immediately adjacent to the metal plugs; and
a dielectric spacer comprising:
a lower air-gap segment positioned laterally between the gate and the metal plugs; and
an upper solid segment positioned laterally between the gate contact and the plug caps, wherein the lower air-gap segment is wider than a top portion of the upper solid segment.

2. The integrated circuit structure of claim 1 , the upper solid segment and the lower air-gap segment comprising a dielectric material, wherein the lower air-gap segment further comprises a void within the dielectric material.

3. The integrated circuit structure of claim 1 , the dielectric spacer further comprising an additional segment between the semiconductor body and the lower air-gap segment, wherein the additional segment and the upper solid segment comprise two different dielectric materials.

4. The integrated circuit structure of claim 3 , the plug caps, the upper solid segment of the dielectric spacer and the additional segment of the dielectric spacer comprising three different dielectric materials, respectively.

5. The integrated circuit structure of claim 3 , the upper solid segment of the dielectric spacer comprising silicon oxycarbide, the additional segment of the dielectric spacer comprising silicon nitride and the plug caps comprising silicon oxide.

6. The integrated circuit structure of claim 1 , the gate contact further comprising a narrow portion laterally surrounded by the upper solid segment of the dielectric spacer and a wider portion above the narrow portion, the wider portion extending laterally over the upper solid segment.

7. The integrated circuit structure of claim 1 , the gate having a first portion above and immediately adjacent to a top surface of the semiconductor body at the channel region and second portions on an isolation layer and positioned laterally adjacent to opposing sides of the semiconductor body, wherein the gate comprises a replacement metal gate and the gate contact is above and immediately adjacent to the first portion of the gate.

8. An integrated circuit structure comprising:
a gate adjacent to a semiconductor body at a channel region, the channel region being positioned laterally between source/drain regions;
a gate contact above and immediately adjacent to the gate;
metal plugs on the source/drain regions;
plug caps above and immediately adjacent to the metal plugs; and
a dielectric spacer comprising:
a lower air-gap segment positioned laterally between the gate and the metal plugs and comprising a lower portion of a conformal dielectric layer between the gate and the metal plugs and an air-gap within the lower portion of the conformal dielectric layer below a level of a top of the gate; and
an upper solid segment above the lower air-gap segment, positioned laterally between the gate contact and the plug caps, and comprising an upper portion of the conformal dielectric layer, wherein the upper portion is solid and wherein the gate contact further comprises a narrow portion laterally surrounded by the upper solid segment of the dielectric spacer and a wider portion above the narrow portion, the wider portion extending laterally over the upper solid segment.

9. The integrated circuit structure of claim 8 , wherein the upper solid segment prevents conductive material from the gate contact from entering the air-gap and creating a short between the gate contact and any of the metal plugs.

10. The integrated circuit structure of claim 8 , the dielectric spacer further comprising an additional segment between the semiconductor body and the lower air-gap segment, wherein the additional segment and the upper solid segment comprise two different dielectric materials.

11. The integrated circuit structure of claim 10 , the plug caps, the conformal dielectric layer, and the additional segment of the dielectric spacer comprising three different dielectric materials, respectively.

12. The integrated circuit structure of claim 10 , the conformal dielectric layer comprising silicon oxycarbide, the additional segment of the dielectric spacer comprising silicon nitride and the plug caps comprising silicon oxide.

13. The integrated circuit structure of claim 8 , the gate having a first portion above and immediately adjacent to a top surface of the semiconductor body at the channel region and second portions on an isolation layer and positioned laterally adjacent to opposing sides of the semiconductor body, wherein the gate comprises a replacement metal gate and the gate contact is above and immediately adjacent to the first portion of the gate.

14. An integrated circuit structure comprising:
a gate adjacent to a semiconductor fin at a channel region, the channel region being positioned laterally between source/drain regions;
a gate contact above and immediately adjacent to the gate;
metal plugs on the source/drain regions;
plug caps above and immediately adjacent to the metal plugs; and
a dielectric spacer comprising:
a lower air-gap segment above the semiconductor fin and positioned laterally between the gate and the metal plugs, the lower air-gap segment comprising a lower portion of a conformal dielectric layer between the gate and the metal plugs and an air-gap within the lower portion of the conformal dielectric layer below a level of a top of the gate; and
an upper solid segment above the lower air-gap segment, positioned laterally between the gate contact and the plug caps, and comprising an upper portion of the conformal dielectric layer, wherein the upper portion is solid and wherein the gate contact further comprises a narrow portion laterally surrounded by the upper solid segment of the dielectric spacer and a wider portion above the narrow portion, the wider portion extending laterally over the upper solid segment.

15. The integrated circuit structure of claim 14 , wherein the upper solid segment prevents conductive material from the gate contact from entering the air-gap and creating a short between the gate contact and any of the metal plugs.

16. The integrated circuit structure of claim 14 , the dielectric spacer further comprising an additional segment between the semiconductor fin and the lower air-gap segment, wherein the additional segment and the upper solid segment comprise two different dielectric materials.

17. The integrated circuit structure of claim 16 , the plug caps, the conformal dielectric layer, and the additional segment of the dielectric spacer comprising three different dielectric materials, respectively.

18. The integrated circuit structure of claim 16 , the conformal dielectric layer comprising silicon oxycarbide, the additional segment of the dielectric spacer comprising silicon nitride and the plug caps comprising silicon oxide.

Assignees

• Globalfoundries Inc

Inventors

• Chanemougame Daniel
• Labonte Andre
• Xie Ruilong
• Liebmann Lars
• Cave Nigel
• Bouche Guillaume

Classifications

• H10W20/0693

  by forming self-aligned vias · CPC title

• H10P50/642

  Chemical etching · CPC title

• H10P14/69433

  the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz · CPC title

• H10D64/01334

  by defining the insulator using a sidewall spacer mask, a transformation under a mask or a plating at a sidewall · CPC title

• H10W20/077

  on sidewalls or on top surfaces of conductors (H10W20/076 takes precedence) · CPC title