Air-gap gate sidewall spacer and method
US-10249728-B2 · Apr 2, 2019 · US
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Patent family 62837331
This patent family groups 4 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 62837331 |
| Family type | — |
| Earliest priority | Jan 18, 2017 |
| First filing country | US |
| Member publications | 4 |
| Countries | US |
| Representative publication | US10249728B2 — Air-gap gate sidewall spacer and method |
Representative publication
Best representative member for this family based on priority and filing country.
US10249728B2 — Air-gap gate sidewall spacer and method (published Apr 2, 2019)
Member publications
Related publications in this family.
Air-gap gate sidewall spacer and method
US-2018240883-A1 · Aug 23, 2018 · US
Air-gap gate sidewall spacer and method
US-2018204927-A1 · Jul 19, 2018 · US
Air-gap gate sidewall spacer and method
US-10026824-B1 · Jul 17, 2018 · US