Method of forming micro-electromechanical system device
US-2026091971-A1 · Apr 2, 2026 · US
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Xia jia jie patents
Xia jia jie is listed as an inventor on 28 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Xia jia jie |
| Total patents | 28 |
| First publication | Jan 17, 2017 |
| Latest publication | Apr 2, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Micro-electromechanical system device and method of forming the same
US-12515940-B2 · Jan 6, 2026 · US
Method of forming micro-electromechanical system device
US-12239024-B2 · Feb 25, 2025 · US
Micro-electro-mechanical system package and fabrication method thereof
US-2025011165-A1 · Jan 9, 2025 · US
Micro-electro-mechanical system device and piezoelectric composite stack thereof
US-2024235512-A9 · Jul 11, 2024 · US
Micro-electro-mechanical system device
US-2024140781-A1 · May 2, 2024 · US
Micro-electro-mechanical system device and piezoelectric composite stack thereof
US-2024136994-A1 · Apr 25, 2024 · US
Method of fabricating micro-electromechanical system device
US-2024116749-A1 · Apr 11, 2024 · US
Piezoelectric micromachined ultrasonic transducer and method of fabricating the same
US-11890643-B2 · Feb 6, 2024 · US
Method of forming micro-electromechanical system device
US-2024040932-A1 · Feb 1, 2024 · US
Recent patents
Latest publications not already listed above.
Micro-electromechanical system device and method of forming the same
US-11878905-B2 · Jan 23, 2024 · US
Micro-electromechanical system device and method of forming the same
US-11825750-B2 · Nov 21, 2023 · US
Piezoelectric micromachined ultrasonic transducer and method of fabricating the same
US-11759823-B2 · Sep 19, 2023 · US
Piezoelectric MEMS devices and methods of forming thereof
US-11631800-B2 · Apr 18, 2023 · US
Piezoelectric micromachined ultrasonic transducer and method of fabricating the same
US-11498097-B2 · Nov 15, 2022 · US
Micro-electromechanical system device and method of forming the same
US-2022140225-A1 · May 5, 2022 · US
Piezoelectric micromachined ultrasonic transducer and method of fabricating the same
US-2022048072-A1 · Feb 17, 2022 · US
Micro-electromechanical system device and method of forming the same
US-2022024753-A1 · Jan 27, 2022 · US
Piezoelectric micromachined ultrasonic transducer and method of fabricating the same
US-2022023915-A1 · Jan 27, 2022 · US
Micro-electromechanical system device and method of forming the same
US-2022024754-A1 · Jan 27, 2022 · US
Piezoelectric micromachined ultrasonic transducer and method of fabricating the same
US-2021362189-A1 · Nov 25, 2021 · US
Piezoelectric mems devices and methods of forming thereof
US-2021050506-A1 · Feb 18, 2021 · US
Fabrication methods for a piezoelectric micro-electromechanical system (MEMS)
US-10490728-B2 · Nov 26, 2019 · US
Piezoelectric microphone with deflection control and method of making the same
US-2019036003-A1 · Jan 31, 2019 · US
Piezoelectric micro-electromechanical system (mems)
US-2017301853-A1 · Oct 19, 2017 · US
Integrated mems-cmos devices and integrated circuits with mems devices and cmos devices
US-2017121172-A1 · May 4, 2017 · US
Integrated MEMS pressure sensor and MEMS inertial sensor
US-9550668-B1 · Jan 24, 2017 · US
Integrated MEMS-CMOS devices and methods for fabricating MEMS devices and CMOS devices
US-9546090-B1 · Jan 17, 2017 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Vanguard Int Semiconduct Corp | 20 |
| Globalfoundries Sg Pte Ltd | 8 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| B81B3/0021 | 17 |
| B81B2201/0235 | 13 |
| H04R2201/003 | 12 |
| H10N30/05 | 8 |
| B81B2203/0127 | 8 |