Measuring method and measuring system for interferometrically measuring the imaging quality
US-10697852-B2 · Jun 30, 2020 · US
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Wegmann Ulrich patents
Wegmann Ulrich is listed as an inventor on 13 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Wegmann Ulrich |
| Total patents | 13 |
| First publication | Jan 12, 2016 |
| Latest publication | Jun 30, 2020 |
Notable patents
Publications ranked by popularity score, then publication date.
Measuring method and measuring arrangement for an imaging optical system
US-10502545-B2 · Dec 10, 2019 · US
Device and method for wavefront analysis
US-10386728-B2 · Aug 20, 2019 · US
Measuring method and measuring system for interferometrically measuring the imaging quality
US-2019212226-A1 · Jul 11, 2019 · US
Microlithographic projection exposure apparatus and measuring device for a projection lens
US-10345710-B2 · Jul 9, 2019 · US
Device and method for wavefront analysis
US-2018299782-A1 · Oct 18, 2018 · US
Optical imaging device with image defect determination
US-9996014-B2 · Jun 12, 2018 · US
Measuring method and measuring arrangement for an imaging optical system
US-2018087891-A1 · Mar 29, 2018 · US
Microlithographic projection exposure apparatus and measuring device for a projection lens
US-2017082930-A1 · Mar 23, 2017 · US
Exposure apparatus and measuring device for a projection lens
US-9436095-B2 · Sep 6, 2016 · US
Recent patents
Latest publications not already listed above.
System for measuring the image quality of an optical imaging system
US-9429495-B2 · Aug 30, 2016 · US
Optical imaging device with image defect determination
US-2016246182-A1 · Aug 25, 2016 · US
Optical imaging device with image defect determination
US-9235131-B2 · Jan 12, 2016 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Zeiss Carl Smt Gmbh | 13 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| G03F7/706 | 9 |
| G03F7/7085 | 8 |
| G01M11/0271 | 5 |
| G03F7/70258 | 5 |
| G01J2009/0219 | 4 |