Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
US-12564012-B2 · Feb 24, 2026 · US
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Sun Jennifer patents
Sun Jennifer is listed as an inventor on 22 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Sun Jennifer |
| Total patents | 22 |
| First publication | Mar 5, 2015 |
| Latest publication | Feb 24, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Soft touch coating materials for substrate handling
US-2025149373-A1 · May 8, 2025 · US
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
US-2024284650-A1 · Aug 22, 2024 · US
Implant devices and methods for treatment of cervical cancer
US-2023142353-A1 · May 11, 2023 · US
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
US-2023077895-A1 · Mar 16, 2023 · US
Capacitive sensor for chamber condition monitoring
US-11581206-B2 · Feb 14, 2023 · US
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
US-11547030-B2 · Jan 3, 2023 · US
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
US-11540432-B2 · Dec 27, 2022 · US
Capacitive sensor for chamber condition monitoring
US-2021280443-A1 · Sep 9, 2021 · US
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
US-2021100087-A1 · Apr 1, 2021 · US
Recent patents
Latest publications not already listed above.
Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools
US-2021100141-A1 · Apr 1, 2021 · US
Smart device fabrication via precision patterning
US-10818481-B2 · Oct 27, 2020 · US
Slurry plasma spray of plasma resistant ceramic coating
US-2020325073-A1 · Oct 15, 2020 · US
Rare-earth oxide based erosion resistant coatings for semiconductor application
US-10734202-B2 · Aug 4, 2020 · US
Slurry plasma spray of plasma resistant ceramic coating
US-10730798-B2 · Aug 4, 2020 · US
Electrostatic chuck and showerhead with enhanced thermal properties and methods of making thereof
US-9597734-B2 · Mar 21, 2017 · US
Smart device fabrication via precision patterning
US-9420639-B2 · Aug 16, 2016 · US
Component for semiconductor process chamber having surface treatment to reduce particle emission
US-2016056059-A1 · Feb 25, 2016 · US
Slurry plasma spray of plasma resistant ceramic coating
US-2015321964-A1 · Nov 12, 2015 · US
Rare-earth oxide based erosion resistant coatings for semiconductor application
US-2015270108-A1 · Sep 24, 2015 · US
Gas distribution plate with discrete protective elements
US-9068265-B2 · Jun 30, 2015 · US
Electrostatic chuck and showerhead with enhanced thermal properties and methods of making thereof
US-2015061237-A1 · Mar 5, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 21 |
| Lubomirsky Dmitry | 1 |
| Ramaswamy Kartik | 1 |
| Bera Kallol | 1 |
| Sun Jennifer | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/32495 | 11 |
| H10P72/7616 | 9 |
| H10P72/7602 | 8 |
| H01J37/32477 | 8 |
| C23C4/134 | 7 |