Semiconductor processing system and methods using capacitively coupled plasma
US-10283321-B2 · May 7, 2019 · US
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Lubomirsky Dmitry patents
Lubomirsky Dmitry holds 8 patents in our database, with recent filings and technology areas summarized below.
| Metric | Value |
|---|---|
| Total patents | 8 |
| Recent patents | 0 |
| First publication | Jan 20, 2015 |
| Latest publication | May 7, 2019 |
Filing trend
Year-over-year patent counts for this assignee.
Recent patents
Latest publications where this party is an assignee.
Module for ozone cure and post-cure moisture treatment
US-9285168-B2 · Mar 15, 2016 · US
Surface treated aluminum nitride baffle
US-9222172-B2 · Dec 29, 2015 · US
Method for refurbishing an electrostatic chuck with reduced plasma penetration and arcing
US-9202736-B2 · Dec 1, 2015 · US
Method of patterning a low-k dielectric film
US-9165783-B2 · Oct 20, 2015 · US
Notable patents
Representative or frequently cited publications from precomputed assignee stats.
Semiconductor processing system and methods using capacitively coupled plasma
US-10283321-B2 · May 7, 2019 · US
Module for ozone cure and post-cure moisture treatment
US-9285168-B2 · Mar 15, 2016 · US
Surface treated aluminum nitride baffle
US-9222172-B2 · Dec 29, 2015 · US
Method for refurbishing an electrostatic chuck with reduced plasma penetration and arcing
US-9202736-B2 · Dec 1, 2015 · US
Method of patterning a low-k dielectric film
US-9165783-B2 · Oct 20, 2015 · US
Top CPC classifications
Most common classification codes in this portfolio.
| CPC | Patents |
|---|---|
| H10P95/00 | 3 |
| H10P14/6922 | 3 |
| H01L21/3105 | 3 |
| H01L21/02126 | 3 |
| H01J37/32091 | 2 |
Technology areas
Mapped technology topics for this assignee.
| Technology | Patents |
|---|---|
| Electricity | 8 |
| Chemistry & Metallurgy | 3 |
| Operations & Transport | 1 |
| Mechanical Engineering | 1 |
| Cross-Sectional Technologies | 1 |