Electrostatic chuck and showerhead with enhanced thermal properties and methods of making thereof

Patent metadata

Field	Value
Publication number	US-9597734-B2
Application number	US-201414534574-A
Country	US
Kind code	B2
Filing date	Nov 6, 2014
Priority date	Oct 27, 2010
Publication date	Mar 21, 2017
Grant date	Mar 21, 2017

Abstract

Embodiments of the present disclosure generally provide chamber components with enhanced thermal properties and methods of enhancing thermal properties of chamber components including bonding materials. One embodiment of the present disclosure provides a method for fabricating a composite structure. The method includes applying a bonding material to a first component, and converting the bonding material applied to the first component to an enhanced bonding layer by heating the bonding material to outgas volatile species from the bonding material. The outgassed volatile species accumulates to at least 0.05% in mass of the bonding material. The method further includes contacting a second component and the enhanced bonding layer to join the first and second components.

First claim

The invention claimed is:

1. A chamber structure, comprising:
a first component fabricated from a first material;
a second component fabricated from a second material; and
an enhanced bonding layer joining the first and second components under a pressure between about 14 psi to about 200 psi, wherein the enhanced bonding layer is converted from a bonding material by heating the bonding material after applying the bonding material to the first component and prior to joining the second component with the first component, the enhanced bonding layer has at least about 0.05% less volatile species than the bonding material from which the enhanced bonding layer is converted, and the enhanced bonding layer has a molecular weight that is reduced by at least 35% from a molecular weight of the bonding material.

2. The chamber structure of claim 1 , wherein the chamber structure is an electrostatic chuck, the first component is a chuck member having a body formed from a dielectric material, and the second component is a base member.

3. The chamber structure of claim 1 , wherein the structure is a showerhead, the first component is a showerhead cover, and the second component is a showerhead body.

4. The chamber structure of claim 1 , wherein the enhanced bonding layer has a molecular weight and molecular weight distribution less than that of the bonding material.

5. The chamber structure of claim 1 , wherein the second component has a bonding surface having a diameter between about 0.5 inches and 17 inches.

6. The chamber structure of claim 1 , wherein the enhanced bonding layer is formed from an acrylic based polymer or a silicone based polymer.

7. The chamber structure of claim 6 , wherein the enhanced bonding layer formed from the silicone based polymer has a Lap shear strength of about 232 psi.

8. The chamber structure of claim 7 , wherein the enhanced bonding layer formed from the silicone based polymer has a Lap shear strain of about 5.6.

9. The chamber structure of claim 1 , wherein the bonding material may be doped with a doping material.

10. The chamber structure of claim 9 , wherein the doping material is a metal oxide powder.

11. The chamber structure of claim 1 , wherein the bonding material has a thickness of about 0.01 inches.

Assignees

• Applied Materials Inc

Inventors

• Sun Jennifer
• Banda Sumanth
• Duan Ren-Guan

Classifications

• H10P72/72

  using electrostatic chucks · CPC title

• C04B2235/604

  Pressing at temperatures other than sintering temperatures · CPC title

• C04B2237/064

  based on alumina or aluminates · CPC title

• C04B37/028

  by means of an interlayer consisting of an organic adhesive, e.g. phenol resin or pitch · CPC title

• B32B15/08

  of synthetic resin · CPC title