Substrate processing apparatus and substrate processing method
US-12569887-B2 · Mar 10, 2026 · US
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Saiki Daisuke patents
Saiki Daisuke is listed as an inventor on 12 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Saiki Daisuke |
| Total patents | 12 |
| First publication | May 28, 2015 |
| Latest publication | Mar 10, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Substrate processing apparatus and substrate processing method
US-12170209-B2 · Dec 17, 2024 · US
Substrate processing apparatus and substrate processing method
US-2024238848-A1 · Jul 18, 2024 · US
Substrate processing method and substrate processing apparatus
US-2024153756-A1 · May 9, 2024 · US
Substrate processing method and substrate processing apparatus
US-11908680-B2 · Feb 20, 2024 · US
Substrate processing method and substrate processing apparatus
US-2022199400-A1 · Jun 23, 2022 · US
Substrate processing apparatus and substrate processing method
US-2022037167-A1 · Feb 3, 2022 · US
Liquid processing apparatus, liquid processing method, and storage medium
US-10236192-B2 · Mar 19, 2019 · US
Substrate liquid processing apparatus and method, and computer-readable recording medium with substrate liquid processing program recorded therein
US-9862007-B2 · Jan 9, 2018 · US
Liquid processing apparatus
US-9192878-B2 · Nov 24, 2015 · US
Recent patents
Latest publications not already listed above.
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Tokyo Electron Ltd | 12 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H10P72/0424 | 7 |
| H10P72/0414 | 5 |
| H10P50/667 | 5 |
| H10P72/0406 | 5 |
| H01L21/67051 | 5 |