Gas hub for plasma reactor
US-11728141-B2 · Aug 15, 2023 · US
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Rozenzon Yan patents
Rozenzon Yan is listed as an inventor on 21 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Rozenzon Yan |
| Total patents | 21 |
| First publication | Dec 24, 2015 |
| Latest publication | Aug 15, 2023 |
Notable patents
Publications ranked by popularity score, then publication date.
Gas hub for plasma reactor
US-2022157562-A1 · May 19, 2022 · US
Pedestal lift for semiconductor processing chambers
US-11251067-B2 · Feb 15, 2022 · US
Plasma reactor with highly symmetrical four-fold gas injection
US-11244811-B2 · Feb 8, 2022 · US
Nozzle for multi-zone gas injection assembly
US-11139150-B2 · Oct 5, 2021 · US
Apparatus for exhaust cooling
US-11114285-B2 · Sep 7, 2021 · US
Apparatus for collection and subsequent reaction of liquid and solid effluent into gaseous effluent
US-10861681-B2 · Dec 8, 2020 · US
Pedestal lift for semiconductor processing chambers
US-2020343126-A1 · Oct 29, 2020 · US
Nozzle for multi-zone gas injection assembly
US-2019385824-A1 · Dec 19, 2019 · US
Side gas injection kit for multi-zone gas injection assembly
US-10410841-B2 · Sep 10, 2019 · US
Recent patents
Latest publications not already listed above.
Plasma Reactor with Highly Symmetrical Four-Fold Gas Injection
US-2019122861-A1 · Apr 25, 2019 · US
Plasma reactor with highly symmetrical four-fold gas injection
US-10163606-B2 · Dec 25, 2018 · US
Apparatus for collection and subsequent reaction of liquid and solid effluent into gaseous effluent
US-2018337027-A1 · Nov 22, 2018 · US
Multi-Zone Gas Injection Assembly with Azimuthal and Radial Distribution Control
US-2018269038-A1 · Sep 20, 2018 · US
Multi-zone gas injection assembly with azimuthal and radial distribution control
US-10008368-B2 · Jun 26, 2018 · US
Apparatus for exhaust cooling
US-2017301524-A1 · Oct 19, 2017 · US
Multi-channel gas-delivery system
US-9441295-B2 · Sep 13, 2016 · US
Dynamic support system for quartz process chamber
US-2016133778-A1 · May 12, 2016 · US
Dynamic support system for quartz process chamber
US-9240513-B2 · Jan 19, 2016 · US
Multi-zone gas injection assembly with azimuthal and radial distribution control
US-2015371831-A1 · Dec 24, 2015 · US
Plasma reactor with highly symmetrical four-fold gas injection
US-2015371826-A1 · Dec 24, 2015 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 18 |
| Solarcity Corp | 3 |
| Rozenzon Yan | 2 |
| Trujillo Robert T | 2 |
| Beese Steven C | 2 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| C23C16/45561 | 13 |
| C23C16/45578 | 13 |
| H01J37/3244 | 12 |
| C23C16/45563 | 7 |
| H01J37/32082 | 6 |