Plasma reactor with highly symmetrical four-fold gas injection

Patent metadata

Field	Value
Publication number	US-10163606-B2
Application number	US-201414762224-A
Country	US
Kind code	B2
Filing date	Feb 3, 2014
Priority date	Mar 15, 2013
Publication date	Dec 25, 2018
Grant date	Dec 25, 2018

Abstract

An annular lid plate of a plasma reactor has upper and lower layers of gas distribution channels distributing gas along equal length paths from gas supply lines to respective gas distribution passages of a ceiling gas nozzle.

First claim

What is claimed is:

1. An annular lid plate for a plasma reactor, comprising:
first and second pluralities of gas outlets, the gas outlets in each of said first and second pluralities of gas outlets being spaced apart by a first arc length;
a gas delivery block comprising first and second gas supply passages;
first and second pluralities of gas distribution channels in respective upper and lower levels, each of said first and second pluralities of gas distribution channels comprising:
an arcuate gas delivery channel having a pair of ends connected to a corresponding pair of said gas outlets; and
an arcuate gas supply channel comprising an input end connected to a corresponding one of said first and second gas supply passages, and an output end coupled to a middle zone of said arcuate gas delivery channel, the arcuate gas supply channel connected to said first gas supply passage extending in a first direction from the input end at said gas delivery block around said annular lip plate and the arcuate gas supply channel connected to said second gas supply passage extending in an opposite second direction from the input end at said gas delivery block around said annular lid plate.

2. The annular lid plate of claim 1 wherein said gas delivery block is disposed at a location that is offset from the output end of each gas supply channel by a second arc length such that gas supply channels of said first and second pluralities of gas distribution channels are of equal lengths.

3. The annular lid plate of claim 1 wherein the gas outlets of said first and second pluralities of gas outlets are distributed with respect to a circumference of said annular lid plate, and wherein said first plurality of gas outlets alternates with said second plurality of gas outlets along said circumference.

4. The annular lid plate of claim 1 wherein said first plurality of gas outlets comprises a first pair of gas outlets and said first arc length corresponds to a half circle, and said second plurality of gas outlets comprises a second pair of gas outlets offset from said first pair of gas outlets by a quarter circle.

5. The annular lid plate of claim 4 wherein said gas delivery block is disposed at a location that is offset from the output end of each of the gas supply channels by an arc length of 45 degrees.

6. The annular lid plate of claim 1 wherein each of said first and second pluralities of gas distribution channels further comprises a flow transition element connected between said output end of said gas supply channel and said middle zone of said gas delivery channel.

7. The annular lid plate of claim 6 wherein said flow transition element comprises:
a radial transition conduit displaced axially relative to said gas supply channel;
an axial input conduit coupled between said output end of said gas supply channel and one end of said radial transition conduit; and
an axial output conduit connected between said middle zone of said gas delivery channel and another end of said radial transition conduit.

8. The annular lid plate of claim 7 wherein said axial input conduit meets an opening in said output end of said gas supply channel, and said axial output conduit meets an opening in said middle zone of said gas delivery channel.

9. A gas delivery system for a plasma reactor chamber, comprising:
a gas nozzle comprising respective inner and outer gas injection passages;
an annular lid plate defining a central opening positioned radially outward of and extending angularly around said gas nozzle and comprising:
first and second pluralities of gas outlets coupled to respective ones of said inner and outer gas injection passages of said nozzle, the gas outlets in each of said first and second pluralities of gas outlets being spaced apart by a first arc length;
a gas delivery block comprising first and second gas supply passages;
first and second pluralities of gas distribution channels in respective upper and lower levels, each of said first and second pluralities of gas distribution channels comprising:
an arcuate gas delivery channel having a pair of ends connected to a corresponding pair of said gas outlets; and
an arcuate gas supply channel comprising an input end connected to a corresponding one of said first and second gas supply passages, and an output end coupled to a middle zone of said arcuate gas delivery channel.

10. The gas delivery system of claim 9 wherein said gas delivery block is disposed at a location that is offset from the output end of each gas supply channel by a second arc length such that gas supply channels of said first and second pluralities of gas distribution channels are of equal lengths.

11. The gas delivery system of claim 9 wherein the gas outlets of said first and second pluralities of gas outlets are distributed with respect to a circumference of said annular lid plate, and wherein said first plurality of gas outlets alternates with said second plurality of gas outlets along said circumference.

12. The gas delivery system of claim 9 wherein said first plurality of gas outlets comprises a first pair of gas outlets and said first arc length corresponds to a half circle, and said second plurality of gas outlets comprises a second pair of gas outlets offset from said first pair of gas outlets by a quarter circle.

13. The gas delivery system of claim 12 wherein said gas delivery block is disposed at a location that is offset from the output end of each of the gas supply channels by an arc length of 45 degrees.

14. The gas delivery system of claim 9 wherein each of said first and second pluralities of gas distribution channels further comprises a flow transition element connected between said output end of said gas supply channel and said middle zone of said gas delivery channel.

15. The gas delivery system of claim 14 wherein said flow transition element comprises:
a radial transition conduit axially displaced relative to said gas supply channel;
an axial input conduit coupled between said output end of said gas supply channel and one end of said radial transition conduit; and
an axial output conduit connected between said middle zone of said gas delivery channel and another end of said radial transition conduit.

16. The gas delivery system of claim 15 wherein said axial input conduit meets an opening in said outlet end of said gas supply channel, and said axial output conduit meets an opening in said middle zone of said gas feed channel.

17. The gas delivery system of claim 9 wherein said gas nozzle comprises:
a first plurality of radial elevated feed lines having respective input ends coupled to respective ones of said first plurality of gas outlets and respective output ends overlying inner gas injection passages;
a second plurality of radial elevated feed lines having respective input ends coupled to respective ones of said second plurality of gas outlets and respective output ends overlying inner outer gas injection passages;
a first plurality of axial drop lines connected between said respective output ends and said inner gas injection passages;
a second plurality of axial drop lines connected between said respective output ends and said outer gas injection passages.

18. The gas delivery system of claim 17 wherein:
said first plurality of axial drop lines intersect said inner gas injection passage at respective drop points evenly spaced along said inner gas injection passage;
said second plurality of axial drop lines intersect said outer gas injection passage at respective drop points evenly spaced along said out

Assignees

• Applied Materials Inc

Inventors

• Rozenzon Yan
• Tantiwong Kyle
• Yousif Imad
• Knyazik Vladimir
• Keating Bojenna
• Banna Samer

Classifications

• H01J37/32082

  Radio frequency generated discharge (H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence) · CPC title

• H01J37/3244 Primary

  Gas supply means · CPC title

• C23C16/45578

  Elongated nozzles, tubes with holes · CPC title

• C23C16/45561

  Gas plumbing upstream of the reaction chamber · CPC title

• C23C16/4558

  Perforated rings · CPC title