Side gas injection kit for multi-zone gas injection assembly

Patent metadata

Field	Value
Publication number	US-10410841-B2
Application number	US-201815989019-A
Country	US
Kind code	B2
Filing date	May 24, 2018
Priority date	Mar 12, 2013
Publication date	Sep 10, 2019
Grant date	Sep 10, 2019

Abstract

A gas injection system includes (a) a side gas plenum, (b) a plurality of N gas inlets coupled to said side gas plenum, (c) plural side gas outlets extending radially inwardly from said plenum, (d) an N-way gas flow ratio controller having N outputs coupled to said N gas inlets respectively, and (e) an M-way gas flow ratio controller having M outputs, respective ones of said M outputs coupled to said tunable gas nozzle and a gas input of said N-way gas flow ratio controller.

First claim

What is claimed is:

1. A side gas injection kit, comprising:
a top liner ring comprising plural nozzle pockets; and
plural side gas injection nozzles extending into said nozzle pockets, each of said plural side gas injection nozzles comprising
a cylindrical outer nozzle surface and plural O-ring nozzle grooves in said cylindrical outer nozzle surface and concentric with said side gas injection nozzle,
first plural O-rings in said plural O-ring nozzle grooves compressed against an interior side wall of a corresponding one of said nozzle pockets,
nozzle groove surfaces indented with respect to said cylindrical outer nozzle surface and defined by said O-ring nozzle grooves, and
an axial evacuation slot comprising slot sections in said cylindrical outer nozzle surface extending from an end of said side gas injection nozzle inside said nozzle pocket, and slot sections in said nozzle groove surfaces.

2. The side gas injection kit of claim 1 , further comprising a gap between said cylindrical outer nozzle surface and an interior side wall of a corresponding one of said nozzle pockets, said slot sections in said nozzle groove surfaces providing an evacuation path around said first plural O-rings, said slot sections in said cylindrical outer nozzle surface providing an evacuation path to said gap.

3. The side gas injection kit of claim 2 , further comprising:
plural gas delivery insert pockets in said top liner ring;
plural gas delivery inserts extending into said gas delivery insert pockets;
each of said gas delivery inserts comprising plural O-ring insert grooves concentric with said gas delivery insert, and second plural O-rings in said plural O-ring insert grooves compressed against an interior side wall of a corresponding one of said plural gas delivery insert pockets.

4. The side gas injection kit of claim 3 , wherein:
said side gas injection nozzles comprise a ceramic material, said gas delivery insert comprises steel and a top liner surface comprises a protective layer comprising an anodized material or Yttria.

5. The side gas injection kit of claim 1 , wherein each of said plural side gas injection nozzle comprises a ceramic material.

6. A side gas injection kit, comprising:
a top liner ring comprising plural nozzle pockets; and
plural side gas injection nozzles extending into said nozzle pockets, each of said plural side gas injection nozzles comprising
an outer nozzle surface and plural O-ring nozzle grooves in said outer nozzle surface and concentric with said side gas injection nozzle,
first plural O-rings in said plural O-ring nozzle grooves compressed against an interior side wall of a corresponding one of said nozzle pockets,
a cylindrical body having said outer nozzle surface and said plural O-ring nozzle grooves in said outer nozzle surface,
a gas injection passage forming an orifice at a radially inner end of the cylindrical body,
an axially extending gas delivery insert hole extending through the cylindrical body near a radially outer end of the cylindrical body, and
an internal radial nozzle gas flow passage that extends through the cylindrical body from the axially extending gas delivery insert hole to the gas injection passage.

7. The side gas injection kit of claim 6 , wherein the axially extending gas delivery insert hole is positioned between a first and a second of the plurality of O-ring nozzle grooves.

8. The side gas injection kit of claim 6 , wherein each of said plural side gas injection nozzle comprises a ceramic material.

9. A side gas injection kit, comprising:
a top liner ring comprising plural nozzle pockets; and
plural side gas injection nozzles extending into said nozzle pockets, each of said plural side gas injection nozzles comprising
an outer nozzle surface and plural O-ring nozzle grooves in said outer nozzle surface and concentric with said side gas injection nozzle,
first plural O-rings in said plural O-ring nozzle grooves compressed against an interior side wall of a corresponding one of said nozzle pockets,
a cylindrical body having said outer nozzle surface and said plural O-ring nozzle grooves in said outer nozzle surface, and
an axial evacuation slot comprising slot sections in the outer nozzle surface extending from a radial outer end of the cylindrical body to the O-ring nozzle grooves.

10. The side gas injection kit of claim 9 , wherein the axial evacuation slot includes a first axial slot section extending between the radial outer end of the cylindrical body and a first of the plurality of O-ring nozzle grooves.

11. The side gas injection kit of claim 10 , the axial evacuation slot includes a second axial slot section in the outer nozzle surface extending from the first of the plurality of O-ring nozzle grooves to a second the plurality of O-ring nozzle grooves.

12. The side gas injection kit of claim 11 , wherein the axial evacuation slot comprises a third axial slot section in the outer nozzle surface extending for a short distance from the second of the plurality of O-ring nozzle grooves toward the radial inner end of the cylindrical body.

13. The side gas injection kit of claim 9 , wherein the axial evacuation slot comprises a first grove axial slot section formed in an inner nozzle groove surface of the first of the O-ring nozzle grooves and a second grove axial slot section formed in an inner nozzle groove surface of the second of the O-ring nozzle grooves, said slot sections in said nozzle groove surfaces providing an evacuation path around plural O-rings in the plural O-ring nozzle grooves.

14. The side gas injection kit of claim 9 , wherein each of said plural side gas injection nozzle comprises a ceramic material.

Assignees

• Applied Materials Inc

Inventors

• Rozenzon Yan
• Tantiwong Kyle
• Yousif Imad
• Knyazik Vladimir
• Keating Bojenna
• Banna Samer

Classifications

• C23C16/45561

  Gas plumbing upstream of the reaction chamber · CPC title

• H01J37/3244 Primary

  Gas supply means · CPC title

• H01J37/32449 Primary

  Gas control, e.g. control of the gas flow · CPC title

• C23C16/45578

  Elongated nozzles, tubes with holes · CPC title

• C23C16/45563

  Gas nozzles · CPC title