Apparatus for exhaust cooling

Patent metadata

Field	Value
Publication number	US-11114285-B2
Application number	US-201715487324-A
Country	US
Kind code	B2
Filing date	Apr 13, 2017
Priority date	Apr 13, 2016
Publication date	Sep 7, 2021
Grant date	Sep 7, 2021

Abstract

Embodiments disclosed herein include an abatement system for abating compounds produced in semiconductor processes. The abatement system includes an exhaust cooling apparatus located downstream of a plasma source. The exhaust cooling apparatus includes at least one cooling plate a device for introducing turbulence to the exhaust flowing within the exhaust cooling apparatus. The device may be a plurality of fins, a cylinder with a curved top portion, or a diffuser with angled blades. The turbulent flow of the exhaust within the exhaust cooling apparatus causes particles to drop out of the exhaust, minimizing particles forming in equipment downstream of the exhaust cooling apparatus.

First claim

The invention claimed is:

1. An exhaust cooling apparatus, comprising:
a body having a wall, a first end, a second end, an inlet, and an outlet, wherein the first end and the second end are on opposite sides of the body from each other, and wherein the inlet and the outlet are at least partially disposed between the first and second ends;
a cooling plate disposed within the body, wherein the cooling plate is connected to the first end, and wherein a gap separates the cooling plate and the second end; and
a device disposed over the cooling plate, wherein the device is between the inlet and the cooling plate and comprises:
a plate coupled to the wall; and
a plurality of fins extending from the plate and extending away from the cooling plate, wherein the plurality of fins comprises:
a center fin forming a first angle with respect to the plate;
a first angled fin forming a second angle with respect to the plate, the second angle is an acute angle facing the center fin; and
a second angled fin forming a third angle with respect to the plate, the third angle is an acute angle facing the center fin, and the second angle is greater than the third angle.

2. The exhaust cooling apparatus of claim 1 , wherein the first angle is about 90° with respect to the plate.

3. The exhaust cooling apparatus of claim 1 , wherein the plate is parallel to the cooling plate.

4. The exhaust cooling apparatus of claim 1 , wherein the cooling plate comprises a plurality of through holes.

5. An exhaust cooling apparatus, comprising:
a body having a wall, a first end, a second end, an inlet, and an outlet, wherein the first end and the second end are on opposite sides of the body from each other, and wherein the inlet and the outlet are at least partially disposed between the first and second ends;
a cooling plate disposed within the body, wherein the cooling plate is connected to the first end, and wherein a gap separates the cooling plate and the second end; and
a first liner disposed over the cooling plate, wherein the first liner is between the inlet and the cooling plate and comprises:
a plate coupled to an end of the wall; and
a plurality of fins extending from the plate and extending away from the cooling plate, wherein the plurality of fins comprises:
a center fin forming a first angle with respect to the plate;
a first angled fin forming a second angle with respect to the plate, the second angle is an acute angle facing the center fin; and
a second angled fin forming a third angle with respect to the plate, the third angle is an acute angle facing the center fin, and the second angle is greater than the third angle.

6. The exhaust cooling apparatus of claim 5 , wherein the first angle is about 90° with respect to the plate.

7. The exhaust cooling apparatus of claim 5 , wherein the plate is parallel to the cooling plate.

8. The exhaust cooling apparatus of claim 5 , wherein the cooling plate comprises a plurality of through holes.

9. The exhaust cooling apparatus of claim 1 , wherein the plurality of fins comprises a first pair of angled fins and a second pair of angled fins, wherein the first pair of angled fins is separated from the second pair of angled fins by the center fin, and wherein the first pair of fins comprises the first angled fin and the second angled fin.

10. The exhaust cooling apparatus of claim 9 , wherein the first pair of angled fins and the second pair of angled fins are mirror images of each other.

11. The exhaust cooling apparatus of claim 10 , wherein the center fin forms a right angle with respect to the plate.

12. The exhaust cooling apparatus of claim 5 , wherein the plurality of fins comprises a first pair of angled fins and a second pair of angled fins, wherein the first pair of angled fins is separated from the second pair of angled fins by the center fin, and wherein the first pair of fins comprises the first angled fin and the second angled fin.

13. The exhaust cooling apparatus of claim 12 , wherein the first pair of angled fins and the second pair of angled fins are mirror images of each other.

14. The exhaust cooling apparatus of claim 5 , further comprising a second liner disposed below the cooling plate.

15. The exhaust cooling apparatus of claim 1 , wherein the second angled fin is between the center fin and the first angled fin.

16. The exhaust cooling apparatus of claim 5 , wherein the second angled fin is between the center fin and the first angled fin.

17. The exhaust cooling apparatus of claim 1 , wherein the plate comprises a an opening disposed between the first angled fin and the first or second end of the body.

18. The exhaust cooling apparatus of claim 1 , wherein the plate comprises:
a first opening disposed between the first end of the body and the plurality of fins, and
a second opening disposed between the second end of the body and the plurality of fins.

19. The exhaust cooling apparatus of claim 5 , wherein the plate comprises a an opening disposed between the first angled fin and the first or second end of the body.

20. The exhaust cooling apparatus of claim 5 , wherein the plate comprises:
a first opening disposed between the first end of the body and the plurality of fins, and
a second opening disposed between the second end of the body and the plurality of fins.

Assignees

• Applied Materials Inc

Inventors

• Cox Michael S
• West Brian T
• Johnson Roger M
• Rozenzon Yan
• Somanna Dinkesh
• Ho Dustin W

Classifications

• H10P72/0421 Primary

  for drying etching · CPC title

• Y02C20/30

  of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6] · CPC title

• H01J2237/18

  Vacuum control means · CPC title

• H01J2237/31701

  Ion implantation · CPC title

• H01J2237/002

  Cooling arrangements · CPC title