Gas hub for plasma reactor

Patent metadata

Field	Value
Publication number	US-11728141-B2
Application number	US-202217590681-A
Country	US
Kind code	B2
Filing date	Feb 1, 2022
Priority date	Mar 15, 2013
Publication date	Aug 15, 2023
Grant date	Aug 15, 2023

Abstract

A gas distribution hub for a plasma chamber. The hub has a nozzle including a plurality of inner gas injection passage and a plurality of outer gas injection passages. The first plurality of gas injection passages are angularly spaced-apart arcuate channels at a first radial distance from a center of the hub, and the second plurality of gas injection passages are angularly spaced apart arcuate channels at a different second radial distance from the center of the hub.

First claim

What is claimed is:

1. A gas distributor for a plasma reactor chamber, comprising:
a hub having formed therein
a gas nozzle including a plurality of inner gas injection passage and a plurality of outer gas injection passages, each gas injection passage of the plurality of inner gas injection passages and plurality of outer gas injection passages being open at a bottom surface of the hub, wherein the plurality of inner gas injection passages are angularly spaced-apart arcuate channels at a first radial distance from a center of the hub, and the plurality of outer gas injection passages are angularly spaced apart arcuate channels at a different second radial distance from the center of the hub,
a first plurality of radial elevated feed lines having respective input ends at a periphery of the hub to receive gas and respective output ends overlying the inner gas injection passage,
a first plurality of axial drop lines connected between the respective output ends of the first plurality of radial elevated feed lines and the inner gas injection passage,
a second plurality of radial elevated feed lines having respective input ends at the periphery of the hub and respective output ends overlying the outer gas injection passage, and
a second plurality of axial drop lines connected between the respective output ends of the plurality of radial elevated feed lines and the outer gas injection passages.

2. The gas distributor of claim 1 , wherein the plurality of inner gas injection passages and the plurality of outer gas injection passages lie along concentric circles.

3. The gas distributor of claim 1 , wherein:
each of the first plurality of axial drop lines intersects a different gas injection passage of the plurality of inner injection passages, and
each of the second plurality of axial drop lines intersects a different gas injection passage of the plurality of outer gas injection passages.

4. The gas distributor of claim 3 , wherein:
each of the first plurality of axial drop lines intersects a midpoint of the gas injection passage of the plurality of inner injection passages, and
each of the second plurality of axial drop lines intersects a midpoint of the gas injection passage of the plurality of outer gas injection passages.

5. The gas distributor of claim 1 , wherein the plurality of inner injection passages extend vertically.

6. The gas distributor of claim 1 , wherein the plurality of gas outer injection passages are angled outwardly.

7. The gas distributor of claim 1 , further comprising:
a first plurality of gas supply ports evenly spaced around the periphery of the gas nozzle; and
a second plurality of gas supply ports evenly spaced around the periphery of the gas nozzle, and offset from the first plurality of gas supply ports.

8. The gas distributor of claim 7 , wherein the first plurality of supply ports are connected to respective pairs of the first plurality of radial elevated feed lines, and the second plurality of supply ports are connected to respective pairs of the second plurality of radial elevated feed lines.

Assignees

• Applied Materials Inc

Inventors

• Rozenzon Yan
• Tantiwong Kyle
• Yousif Imad
• Knyazik Vladimir
• Keating Bojenna
• Banna Samer

Classifications

• H01J37/3244 Primary

  Gas supply means · CPC title

• C23C16/4558

  Perforated rings · CPC title

• C23C16/45561

  Gas plumbing upstream of the reaction chamber · CPC title

• C23C16/45578

  Elongated nozzles, tubes with holes · CPC title

• H01J37/32082

  Radio frequency generated discharge (H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence) · CPC title