Capacitive sensing data integration for plasma chamber condition monitoring
US-12537179-B2 · Jan 27, 2026 · US
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Pan Yaoling patents
Pan Yaoling is listed as an inventor on 42 patents in our database. Major assignees and classification codes are summarized below.
| Metric | Value |
|---|---|
| Inventor | Pan Yaoling |
| Total patents | 42 |
| First publication | Feb 19, 2015 |
| Latest publication | Jan 27, 2026 |
Notable patents
Publications ranked by popularity score, then publication date.
Capacitive sensors and capacitive sensing locations for plasma chamber condition monitoring
US-2026011539-A1 · Jan 8, 2026 · US
Capacitive sensors and capacitive sensing locations for plasma chamber condition monitoring
US-12437979-B2 · Oct 7, 2025 · US
Capacitive sensor for monitoring gas concentration
US-12228534-B2 · Feb 18, 2025 · US
Capacitive sensor housing for chamber condition monitoring
US-12163911-B2 · Dec 10, 2024 · US
Differential capacitive sensor for in-situ film thickness and dielectric constant measurement
US-12123090-B2 · Oct 22, 2024 · US
Sensors and system for in-situ edge ring erosion monitor
US-2024321610-A1 · Sep 26, 2024 · US
Capacitive sensor for monitoring gas concentration
US-2024219337-A1 · Jul 4, 2024 · US
Sensors and system for in-situ edge ring erosion monitor
US-12009236-B2 · Jun 11, 2024 · US
Capacitive sensor for monitoring gas concentration
US-11959868-B2 · Apr 16, 2024 · US
Recent patents
Latest publications not already listed above.
Differential capacitive sensor for in-situ film thickness and dielectric constant measurement
US-2024002999-A1 · Jan 4, 2024 · US
Capacitive sensing data integration for plasma chamber condition monitoring
US-2023343568-A2 · Oct 26, 2023 · US
Differential capacitive sensors for in-situ film thickness and dielectric constant measurement
US-11781214-B2 · Oct 10, 2023 · US
Capacitive sensing data integration for plasma chamber condition monitoring
US-2023103165-A1 · Mar 30, 2023 · US
Capacitive sensor for chamber condition monitoring
US-11581206-B2 · Feb 14, 2023 · US
Resonant process monitor
US-11551905-B2 · Jan 10, 2023 · US
Capacitive sensing data integration for plasma chamber condition monitoring
US-11545346-B2 · Jan 3, 2023 · US
Capacitive sensor housing for chamber condition monitoring
US-2022341867-A1 · Oct 27, 2022 · US
Capacitive sensor housing for chamber condition monitoring
US-11415538-B2 · Aug 16, 2022 · US
Capacitive sensor for monitoring gas concentration
US-2022244205-A1 · Aug 4, 2022 · US
Capacitive sensors and capacitive sensing locations for plasma chamber condition monitoring
US-2021280399-A1 · Sep 9, 2021 · US
Capacitive sensing data integration for plasma chamber condition monitoring
US-2021280400-A1 · Sep 9, 2021 · US
Capacitive sensor housing for chamber condition monitoring
US-2021278360-A1 · Sep 9, 2021 · US
Capacitive sensor for chamber condition monitoring
US-2021280443-A1 · Sep 9, 2021 · US
Differential capacitive sensors for in-situ film thickness and dielectric constant measurement
US-2021033557-A1 · Feb 4, 2021 · US
Sensors and system for in-situ edge ring erosion monitor
US-2020335368-A1 · Oct 22, 2020 · US
Resonant process monitor
US-2019287758-A1 · Sep 19, 2019 · US
Stacked vias for vertical integration
US-10131534-B2 · Nov 20, 2018 · US
Nucleotide sensing device having a nanopore formed in an inorganic material
US-2018163266-A1 · Jun 14, 2018 · US
Interferometric modulator mirror design without metal layer in the hinge
US-9715156-B2 · Jul 25, 2017 · US
Major assignees
Companies most often associated with this inventor's publications.
| Assignee | Patents |
|---|---|
| Applied Materials Inc | 27 |
| Qualcomm Mems Technologies Inc | 11 |
| Qualcomm Inc | 3 |
| Snaptrack Inc | 2 |
| Intel Corp | 1 |
Top CPC classifications
Most common classification codes across this inventor's patents.
| CPC | Patents |
|---|---|
| H01J37/32935 | 17 |
| H10P72/0604 | 12 |
| G01N27/228 | 11 |
| G02B26/001 | 9 |
| H01J2237/24564 | 8 |